SENSING DEVICES AND METHODS
    1.
    发明申请
    SENSING DEVICES AND METHODS 有权
    感应装置和方法

    公开(公告)号:US20120036917A1

    公开(公告)日:2012-02-16

    申请号:US13208107

    申请日:2011-08-11

    IPC分类号: G01N7/00 H01L41/22

    摘要: Embodiments of the present disclosure include devices and methods for humidity and temperature sensing. For example, in one embodiment, a sensing device can include a first surface acoustic wave (SAW) component, wherein the first SAW component is a temperature component, a second SAW component, wherein the second SAW component is a humidity component, a third SAW component, wherein the third SAW component is a reference component, and a piezoelectric layer, wherein the first SAW component, the second. SAW component, and the third SAW component are on a surface of the piezoelectric layer.

    摘要翻译: 本公开的实施例包括用于湿度和温度感测的装置和方法。 例如,在一个实施例中,感测装置可以包括第一表面声波(SAW)部件,其中第一SAW部件是温度部件,第二SAW部件,其中第二SAW部件是湿度分量,第三SAW 分量,其中所述第三SAW分量是参考分量,以及压电层,其中所述第一SAW分量,第二SAW分量。 SAW分量和第三SAW分量在压电层的表面上。

    Sensing devices and methods
    2.
    发明授权
    Sensing devices and methods 有权
    感应装置和方法

    公开(公告)号:US09097638B2

    公开(公告)日:2015-08-04

    申请号:US13208107

    申请日:2011-08-11

    摘要: Embodiments of the present disclosure include devices and methods for humidity and temperature sensing. For example, in one embodiment, a sensing device can include a first surface acoustic wave (SAW) component, wherein the first SAW component is a temperature component, a second SAW component, wherein the second SAW component is a humidity component, a third SAW component, wherein the third SAW component is a reference component, and a piezoelectric layer, wherein the first SAW component, the second SAW component, and the third SAW component are on a surface of the piezoelectric layer.

    摘要翻译: 本公开的实施例包括用于湿度和温度感测的装置和方法。 例如,在一个实施例中,感测装置可以包括第一表面声波(SAW)部件,其中第一SAW部件是温度部件,第二SAW部件,其中第二SAW部件是湿度分量,第三SAW 分量,其中第三SAW分量是参考分量,以及压电层,其中第一SAW分量,第二SAW分量和第三SAW分量位于压电层的表面上。