公开(公告)号：US20100139401A1

公开(公告)日：2010-06-10

申请号：US12445398

申请日：2007-10-12

Applicant: Oliver Schwarzelbach ,  Manfred Weiss ,  Volker Kempe

Inventor： Oliver Schwarzelbach ,  Manfred Weiss ,  Volker Kempe

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0831

Abstract: Exemplary embodiments relate to a sensor for detecting an acceleration acting on the sensor, having: a substrate, a mass unit, which acts as an inert mass in the event of the presence of an acceleration, a fixing structure, wherein the mass unit is articulated on the substrate in such a way that at least one pivot axis is defined, about which the mass unit can perform a rotation relative to the substrate as a result of an acceleration acting on the sensor, and the mass unit has an interial center of gravity, which is at a distance from the respective pivot axis, and at least one detection unit, with which a change in position between the mass unit and the substrate may be detected. The detection unit is arranged with respect to the mass unit in such a way that a deformation of the mass unit cannot be transferred to the detection unit.

Abstract translation: 示例性实施例涉及用于检测作用在传感器上的加速度的传感器，其具有：基板，质量单元，其在存在加速度时用作惰性质量，固定结构，其中质量单元被铰接 在基板上以至少一个枢转轴线被限定，由于作用在传感器上的加速度，质量单元可围绕该枢转轴线相对于基板进行旋转，并且质量单元具有中间重心 ，并且可以检测质量单元和基板之间的位置变化的至少一个检测单元。 检测单元相对于质量单元布置，使得质量单元的变形不能传递到检测单元。

公开(公告)号：US20130031977A1

公开(公告)日：2013-02-07

申请号：US13641663

申请日：2011-04-19

Applicant: Volker Kempe

Inventor： Volker Kempe

IPC: G01C19/56

CPC classification number: G01C19/5747 ,  G01C19/56 ,  G01C19/5642 ,  G01C19/5656 ,  G01C19/5719

Abstract: The invention relates to a micro-gyroscope for detecting motions relative to an X and/or Y and Z axis, particularly as a 3D, 5D, or 6D sensor. Sample masses are disposed uniformly about an anchor and can be driven radially relative to the central anchor. Anchor springs are disposed to attach the sample masses to a substrate, and these sample masses can be deflected both radially within and out of the X-Y plane. A sensor mass is disposed on one of the sample masses by means of sensor springs, and the sensor springs allow deflection of the sensor mass within the plane of the sample mass, and orthogonal to the radial drive direction of the sample masses. Drive elements oscillate these sample masses in the X-Y plane, and sensor elements captures the defection of the sample masses due to the Coriolis forces generated when the substrate is rotated.

Abstract translation: 本发明涉及用于检测相对于X和/或Y和Z轴的运动的微陀螺仪，特别是作为3D，5D或6D传感器。 样品质量均匀地围绕锚固件设置并且可以相对于中心锚向径向驱动。 锚固弹簧被设置成将样品质量块附着到基底上，并且这些样品质量可以径向地偏转到X-Y平面内和外。 传感器质量通过传感器弹簧设置在一个样品质量上，并且传感器弹簧允许传感器质量在样品质量平面内偏转，并与样品质量的径向驱动方向垂直。 驱动元件在X-Y平面上振荡这些样品质量，传感器元件捕获由于在旋转基板时产生的科里奥利力产生的样品质量的偏差。

公开(公告)号：US20110308314A1

公开(公告)日：2011-12-22

申请号：US13203550

申请日：2010-02-03

Applicant: Volker Kempe

Inventor： Volker Kempe

IPC: G01C19/00

CPC classification number: G01C19/574

Abstract: The invention relates to an electromechanic microsensor (MEMS) (1) comprising drive elements (2, 3, 4) which are moved linearly in an x-y plane and disposed on a substrate for determining at least two, preferably three, components of the yaw rate vector of the substrate, wherein two groups of drive elements (2, 3; 4) exist, which are driven essentially in directions running essentially at right angles to each other. The electromechanic microsensor (MEMS) (1) according to the invention is characterized in that the drive elements (2, 4; 3, 4) which are moved at right angles to each other are connected to one another for synchronizing the movements by means of a coupling device (6, 7) that is rotatably mounted on the substrate.

Abstract translation: 本发明涉及一种机电微传感器（MEMS）（1），其包括驱动元件（2,3,4），其在xy平面上线性移动并且设置在基板上，用于确定横摆率的至少两个，优选三个分量 基板的矢量，其中存在两组驱动元件（2,3; 4），其基本上在基本上彼此成直角的方向上被驱动。 根据本发明的机电微传感器（MEMS）（1）的特征在于，彼此成直角移动的驱动元件（2,4; 3,4）彼此连接，用于通过 可旋转地安装在基板上的联接装置（6,7）。

公开(公告)号：US08850886B2

公开(公告)日：2014-10-07

申请号：US13203550

申请日：2010-02-03

Applicant: Volker Kempe

Inventor： Volker Kempe

IPC: G01C19/56 ,  G01C19/574

CPC classification number: G01C19/574

Abstract: The invention relates to an electromechanic microsensor (MEMS) comprising drive elements which are moved linearly in an x-y plane and disposed on a substrate to determine at least two, preferably three, components of the yaw rate vector of a substrate, wherein two groups of drive elements are driven in directions running essentially at right angles to each other. The MEMS according to the invention is characterized in that the drive elements, which are moved at right angles to each other, are connected to one another to synchronize the movements via a coupling device that is rotatably mounted on the substrate.

Abstract translation: 本发明涉及一种机电微传感器（MEMS），其包括在xy平面中线性移动并且设置在基板上的驱动元件，以确定基板的偏转速率矢量的至少两个，优选三个分量，其中两组驱动 元件在基本上彼此成直角地运行的方向上被驱动。 根据本发明的MEMS的特征在于，彼此成直角移动的驱动元件彼此连接，以通过可旋转地安装在基板上的联接装置使运动同步。

公开(公告)号：US08042393B2

公开(公告)日：2011-10-25

申请号：US12443664

申请日：2007-09-13

Applicant: Lothar Gier ,  Volker Kempe ,  Drago Strle

Inventor： Lothar Gier ,  Volker Kempe ,  Drago Strle

IPC: G01C19/56

CPC classification number: G01C19/5712

Abstract: An arrangement for measuring a rate of rotation using a vibration sensor, being excited and measured by means of capacitive drive elements, and the rotation of said sensor in an axis, excited by a rotation in another axis by means of the Coriolis force, being measured by means of capacitive measuring elements. Excitation voltages can be supplied to the fixed electrodes of the drive elements, the frequency of said voltages corresponding to the resonance frequency or the subharmonic of the resonance frequency of the vibration sensor. An alternating voltage having a first measuring frequency which is higher than the excitation frequency can be supplied to capacitive elements for measuring the excited vibration. Alternating voltages having a second measuring frequency higher than the excitation frequency are supplied to the fixed electrodes of the measuring elements can be supplied to drive elements causing a vibration excitation in a direction on the basis of the excitation voltage, being in antiphase with the excitation voltage.

Abstract translation: 用于通过电容式驱动元件激发和测量使用振动传感器测量旋转速率的装置，以及通过科里奥利力在另一轴线上的旋转激励的所述传感器在轴上的旋转的装置，被测量 通过电容测量元件。 励磁电压可以提供给驱动元件的固定电极，所述电压的频率对应于谐振频率或振动传感器的谐振频率的次谐波。 可以将具有高于激励频率的第一测量频率的交流电压提供给用于测量激励振动的电容元件。 向测量元件的固定电极提供具有高于激励频率的第二测量频率的交替电压可以被提供给驱动元件，该驱动元件基于激励电压在与激励电压相反的方向上产生振动激励 。

公开(公告)号：US06483301B2

公开(公告)日：2002-11-19

申请号：US09847604

申请日：2001-05-01

Applicant: Volker Kempe

Inventor： Volker Kempe

IPC: G01R3307

CPC classification number: G01R33/07

Abstract: A method for compensating mechanical stresses in measuring the magnetic field strength by Hall sensors is disclosed. It is proceeded in a manner that the electric resistance and/or a measuring quantity proportional to the electric resistance of the Hall sensor is determined in at least two different directions, that the mean value of the determined resistances and/or measuring quantities proportional thereto is calculated, and that the current conducted through the Hall sensor is chosen to be proportional to the mean value calculated.

Abstract translation: 公开了一种用于通过霍尔传感器来测量磁场强度的机械应力的补偿方法。 以与至少两个不同方向确定与霍尔传感器的电阻成比例的电阻和/或测量量的方式进行，确定的电阻和/或与其成比例的测量量的平均值为 并且通过霍尔传感器传导的电流被选择为与所计算的平均值成比例。

公开(公告)号：US09157740B2

公开(公告)日：2015-10-13

申请号：US13641663

申请日：2011-04-19

Applicant: Volker Kempe

Inventor： Volker Kempe

IPC: G01P3/44 ,  G01C19/56 ,  G01C19/5642 ,  G01C19/5747 ,  G01C19/5719 ,  G01C19/5656

CPC classification number: G01C19/5747 ,  G01C19/56 ,  G01C19/5642 ,  G01C19/5656 ,  G01C19/5719

Abstract: The invention relates to a micro-gyroscope for detecting motions relative to an X and/or Y and Z axis, particularly as a 3D, 5D, or 6D sensor. Sample masses are disposed uniformly about an anchor and can be driven radially relative to the central anchor. Anchor springs are disposed to attach the sample masses to a substrate, and these sample masses can be deflected both radially within and out of the X-Y plane. A sensor mass is disposed on one of the sample masses by means of sensor springs, and the sensor springs allow deflection of the sensor mass within the plane of the sample mass, and orthogonal to the radial drive direction of the sample masses. Drive elements oscillate these sample masses in the X-Y plane, and sensor elements captures the defection of the sample masses due to the Coriolis forces generated when the substrate is rotated.

Abstract translation: 本发明涉及用于检测相对于X和/或Y和Z轴的运动的微陀螺仪，特别是作为3D，5D或6D传感器。 样品质量均匀地围绕锚固件设置并且可以相对于中心锚向径向驱动。 锚固弹簧被设置成将样品质量块附着到基底上，并且这些样品质量可以径向地偏转到X-Y平面内和外。 传感器质量通过传感器弹簧设置在一个样品质量上，并且传感器弹簧允许传感器质量在样品质量平面内偏转，并与样品质量的径向驱动方向垂直。 驱动元件在X-Y平面上振荡这些样品质量，传感器元件捕获由于在旋转基板时产生的科里奥利力产生的样品质量的偏差。

公开(公告)号：US08549921B2

公开(公告)日：2013-10-08

申请号：US12445398

申请日：2007-10-12

Applicant: Oliver Schwarzelbach ,  Manfred Weiss ,  Volker Kempe

Inventor： Oliver Schwarzelbach ,  Manfred Weiss ,  Volker Kempe

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0831

Abstract: Exemplary embodiments relate to a sensor for detecting an acceleration acting on the sensor, having: a substrate, a mass unit, which acts as an inert mass in the event of the presence of an acceleration, a fixing structure, wherein the mass unit is articulated on the substrate in such a way that at least one pivot axis is defined, about which the mass unit can perform a rotation relative to the substrate as a result of an acceleration acting on the sensor, and the mass unit has an interial center of gravity, which is at a distance from the respective pivot axis, and at least one detection unit, with which a change in position between the mass unit and the substrate may be detected. The detection unit is arranged with respect to the mass unit in such a way that a deformation of the mass unit cannot be transferred to the detection unit.

Abstract translation: 示例性实施例涉及用于检测作用在传感器上的加速度的传感器，其具有：基板，质量单元，其在存在加速度时用作惰性质量，固定结构，其中质量单元被铰接 在基板上以至少一个枢转轴线被限定，由于作用在传感器上的加速度，质量单元可围绕该枢转轴线相对于基板进行旋转，并且质量单元具有中间重心 ，并且可以检测质量单元和基板之间的位置变化的至少一个检测单元。 检测单元相对于质量单元布置，使得质量单元的变形不能传递到检测单元。

公开(公告)号：US08479575B2

公开(公告)日：2013-07-09

申请号：US13203554

申请日：2010-02-22

Applicant: Volker Kempe

Inventor： Volker Kempe

IPC: G01C19/00

CPC classification number: G01C19/5747

Abstract: The invention relates to a microgyroscope for determining rotational movements about an x-axis and/or a y-axis and a z-axis. Oscillating masses are fastened to a substrate by springs. Drive elements vibrate individual masses in an oscillatory manner in the x-y plane in order to produce Coriolis forces when the substrate is rotated, and sensor elements detect deflections of the masses on account of the Coriolis forces produced. The Individual masses are arranged in two groups that are jointly induced by the drive elements to carry out an oscillating primary movement in the plane of the x-y axis. The masses of the first group allow movements starting from the x-y plane, and the masses of the second group allow movements perpendicular to the oscillating primary movement in the plane of the x-y axis.

Abstract translation: 本发明涉及一种用于确定围绕x轴和/或y轴和z轴的旋转运动的微型陀螺仪。 振荡质量通过弹簧固定在基体上。 驱动元件在x-y平面上以振荡的方式振动各个质量块，以便当基底旋转时产生科里奥利力，传感器元件由于产生的科里奥利力产生的物体的偏转。 单独的质量被布置成由驱动元件共同诱导的两组，以在x-y轴的平面中执行振荡的一次运动。 第一组的质量允许从x-y平面开始的运动，并且第二组的质量允许垂直于在x-y轴的平面中的振荡主运动的运动。

公开(公告)号：US20120048017A1

公开(公告)日：2012-03-01

申请号：US13203554

申请日：2010-02-22

Applicant: Volker Kempe

Inventor： Volker Kempe

IPC: G01C19/56

CPC classification number: G01C19/5747

Abstract: The invention relates to a microgyroscope for determining rotational movements about an x and/or y and z axis, comprising a substrate, several oscillating masses (4, 5), springs for fastening the oscillating masses (4, 5) to the substrate, drive elements for vibrating at least individual ones of the masses in an oscillatory manner in the x-y plane in order to produce Coriolis forces when the substrate is rotated, and sensor elements for defecting deflections of the masses (4, 5) on account of the Coriolis forces produced. At least individual ones of the masses (4, 5) are arranged in two groups. The masses (4, 5) of both groups can be jointly induced by the drive elements to carry out an oscillating primary movement in the plane of the x-y axis. The masses (4) of the first group are arranged on the substrate in such a manner that they allow movement starting from the x-y plane. The masses (5) of the second group are arranged on the substrate in such a manner that they allow movements perpendicular to the oscillating primary movement in the plane of the x-y axis.

Abstract translation: 本发明涉及一种用于确定关于x和/或y轴和z轴的旋转运动的微型陀螺仪，包括基底，几个振动块（4,5），用于将振荡块（4,5）紧固到基底的弹簧 用于在xy平面中以振荡方式振动至少单个质量块的元件，以便当衬底旋转时产生科里奥利力，以及由于科里奥利力而导致质量块（4,5）的挠曲的传感器元件 生产。 至少有个体（4,5）分为两组。 两组的质量（4,5）可以由驱动元件共同感应，以在x-y轴平面上进行摆动一次运动。 第一组的质量块（4）以允许从x-y平面开始的移动的方式布置在基板上。 第二组的质量（5）以这样的方式布置在基板上，使得它们允许垂直于在x-y轴的平面中的振荡主运动的运动。