公开(公告)号：US06815959B2

公开(公告)日：2004-11-09

申请号：US10119377

申请日：2002-04-09

申请人： Walter H. Johnson ,  Torsten Borchers ,  Daniel Griffing ,  Andrei Danet ,  George Erskine

发明人： Walter H. Johnson ,  Torsten Borchers ,  Daniel Griffing ,  Andrei Danet ,  George Erskine

IPC分类号： G01R2708

CPC分类号： G01R1/06733 ,  G01R1/06711 ,  G01R27/14 ,  G01R31/2831

摘要： A pin configured to be disposed within a probe is provided. The probe may be configured to measure a property of a conductive layer. The pin may include a contact surface which may be substantially planar. The pin may also include a first portion extending from the contact surface. A cross-sectional area of the first portion, in a direction substantially parallel to the contact surface, may be substantially equal to a surface area of the contact surface across a length of the first portion. A system configured to measure a property of a conductive layer is also provided. The system may include a mounting device and at least two probes coupled to the mounting device. The probes may be configured to measure the property of a conductive layer. In addition, the mounting device may be configured such that one of the probes may contact the conductive layer during measurement.

摘要翻译： 提供了构造成设置在探针内的引脚。 探针可以被配置为测量导电层的性质。 销可以包括可以是基本上平面的接触表面。 销还可以包括从接触表面延伸的第一部分。 在基本上平行于接触表面的方向上的第一部分的横截面积可以基本上等于穿过第一部分的长度的接触表面的表面积。 还提供了一种被配置为测量导电层性质的系统。 该系统可以包括安装装置和耦合到安装装置的至少两个探针。 探针可以被配置成测量导电层的性质。 此外，安装装置可以被配置成使得在测量期间探针中的一个可以接触导电层。