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公开(公告)号:US09625923B2
公开(公告)日:2017-04-18
申请号:US14254229
申请日:2014-04-16
发明人: William Bohlinger , John Bergen , Stanton Hopkins-Breitlow , James Hentges , Jason Houzenga , Gil Ramos , Kurt Peterson , Larry Walters , Daryl James
CPC分类号: G05D23/1931 , G05D23/1934 , G05D23/27
摘要: The present disclosure relates generally to a process controller and more specifically to a process controller with integrated optical sensing.
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公开(公告)号:US11353368B2
公开(公告)日:2022-06-07
申请号:US16419612
申请日:2019-05-22
发明人: John Bergen
摘要: Temperature sensing probes for sensing the temperature of a substrate based on fluorescence are disclosed. The temperature sensing probes include a fiber optic cable having at a cold end an optical interface and at a hot end a temperature sensing element for contacting a substrate. A sheath surrounds at least a portion of the hot end of the fiber optic cable. A retaining member securely and removably engages the sheath with a support member. The sheath forms a vacuum seal around the contact between the temperature sensing element and the substrate.
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公开(公告)号:US12111634B2
公开(公告)日:2024-10-08
申请号:US17443595
申请日:2021-07-27
发明人: Jacob Lindley , Miranda Pizzella , Jeremy Quandt , Philip Schmidt , John Bergen , Hanwen Yuan , Daniel Gander
IPC分类号: G05B17/00 , G05B11/42 , G05B19/4155 , G05D23/19
CPC分类号: G05B19/4155 , G05B17/00 , G05B11/42 , G05B2219/50333 , G05D23/1917
摘要: A method of controlling a thermal system of an industrial process includes monitoring intermediate data, associating the intermediate data with correlation data, wherein the correlation data includes an internal process control input, an external heater control input, the output control, or a combination thereof. The method further includes generating a model that defines a relationship between the intermediate data and the correlation data, identifying a state of the heater system based on the model, and selectively performing a corrective action based on the identified state of the heater system.
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公开(公告)号:US12044581B2
公开(公告)日:2024-07-23
申请号:US17833030
申请日:2022-06-06
发明人: John Bergen
摘要: Temperature sensing probes for sensing the temperature of a substrate based on fluorescence are disclosed. The temperature sensing probes include a fiber optic cable having at a cold end an optical interface and at a hot end a temperature sensing element for contacting a substrate. A sheath surrounds at least a portion of the hot end of the fiber optic cable. A retaining member securely and removably engages the sheath with a support member. The sheath forms a vacuum seal around the contact between the temperature sensing element and the substrate.
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公开(公告)号:US20140341563A1
公开(公告)日:2014-11-20
申请号:US14254229
申请日:2014-04-16
发明人: William Bohlinger , John Bergen , Stanton Hopkins-Breitiow , James Hentges , Jason Houzenga , Gil Ramos , Kurt Peterson , Larry Walters , Daryl James
IPC分类号: H04B10/073 , H04B10/2575
CPC分类号: G05D23/1931 , G05D23/1934 , G05D23/27
摘要: The present disclosure relates generally to a process controller and more specifically to a process controller with integrated optical sensing.
摘要翻译: 本公开一般涉及过程控制器,更具体地涉及具有集成光学感测的过程控制器。
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