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公开(公告)号：US20170127474A1
公开(公告)日：2017-05-04
申请号：US14925330
申请日：2015-10-28
发明人： Jacob Lindley , Cal Swanson
CPC分类号： H05B1/0233 , H05B1/0202 , H05B3/0014 , H05B3/26 , H05B3/42 , H05B2203/005 , H05B2203/009 , H05B2203/011 , H05B2203/013 , H05B2203/017 , H05B2213/03 , H05B2213/07
摘要： A thermal system includes a plurality of resistor circuits that define a number of resistor circuits Rn. The thermal system also has a plurality of nodes that connect the plurality of resistor circuits and define a number of nodes Nn. A plurality of power wires are connected to each of the plurality of nodes, and the plurality of power wires define a number of power wires Pn. A plurality of signal wires connect to each of the plurality of nodes to sense the temperature of each of the resistor circuits, and the plurality of signal wires define a number of signal wires Sn. The number of power wires Pn and the number of signal wires Sn is equal to the number of nodes Nn, and the number of resistor circuits Rn is greater than or equal to the number of nodes Nn.
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公开(公告)号：US20160118277A1
公开(公告)日：2016-04-28
申请号：US14990118
申请日：2016-01-07
发明人： Kevin Ptasienski , Kevin Robert Smith , Cal Thomas Swanson , Philip Steven Schmidt , Mohammad Nosrati , Jacob Lindley , Allen Norman Boldt , Sanhong Zhang , Louis P. Steinhauser , Dennis Stanley Grimard
IPC分类号： H01L21/67 , H01L21/683
摘要： A heater system is provided that includes a base functional layer having at least one functional zone. A substrate is secured to the functional member, and a tuning layer is secured to the substrate opposite the base functional layer. The tuning layer includes a plurality of zones that is greater in number than the zones of the base functional layer, and the tuning layer provides lower power than the base functional layer. A component is secured to the tuning layer opposite the substrate, and the substrate defines a thermal conductivity to absorb and dissipate a requisite amount of power from the base functional layer. A control system is also provided that has a plurality of addressable control elements in electrical communication with power lines and with the tuning layer, the control elements providing selective control of the tuning layer zones.
摘要翻译： 提供一种加热器系统，其包括具有至少一个功能区的基础功能层。 衬底被固定到功能构件上，并且调谐层固定到与基底功能层相对的衬底上。 调谐层包括数量大于基底功能层的区域的多个区域，并且调谐层提供比基底功能层更低的功率。 组件被固定到与衬底相对的调谐层，并且衬底限定热传导率以吸收和消散来自基底功能层的所需量的功率。 还提供了一种控制系统，其具有与电力线电连通的多个可寻址控制元件，并且在调谐层中，控制元件提供调谐层区域的选择性控制。
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3.发明授权公开(公告)号：US12111634B2
公开(公告)日：2024-10-08
申请号：US17443595
申请日：2021-07-27
发明人： Jacob Lindley , Miranda Pizzella , Jeremy Quandt , Philip Schmidt , John Bergen , Hanwen Yuan , Daniel Gander
IPC分类号： G05B17/00 , G05B11/42 , G05B19/4155 , G05D23/19
CPC分类号： G05B19/4155 , G05B17/00 , G05B11/42 , G05B2219/50333 , G05D23/1917
摘要： A method of controlling a thermal system of an industrial process includes monitoring intermediate data, associating the intermediate data with correlation data, wherein the correlation data includes an internal process control input, an external heater control input, the output control, or a combination thereof. The method further includes generating a model that defines a relationship between the intermediate data and the correlation data, identifying a state of the heater system based on the model, and selectively performing a corrective action based on the identified state of the heater system.
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公开(公告)号：US20160118276A1
公开(公告)日：2016-04-28
申请号：US14990109
申请日：2016-01-07
发明人： Kevin Ptasienski , Kevin Robert Smith , Cal Thomas Swanson , Philip Steven Schmidt , Mohammad Nosrati , Jacob Lindley , Allen Norman Boldt , Sanhong Zhang , Louis P. Steinhauser , Dennis Stanley Grimard
IPC分类号： H01L21/67
CPC分类号： H01L21/67103 , H01L21/67098 , H01L21/67109 , H01L21/67248 , H01L21/6833 , H05B1/00 , H05B1/02 , H05B1/0202 , H05B1/0227 , H05B1/0233 , H05B3/02 , H05B3/06 , H05B3/20 , H05B2203/005 , H05B2203/013 , H05B2213/03 , Y10T156/10
摘要： An apparatus is provided, by way of example, a heater for use in semiconductor processing equipment, that includes a base functional layer having at least one functional zone. A substrate is secured to the base functional layer, and a tuning layer is secured to the substrate opposite the base functional layer. The tuning layer includes a plurality of zones that is greater in number than the zones of the base functional layer, and the tuning layer has lower power than the base functional layer. Further, a component, such as a chuck by way of example, is secured to the tuning layer opposite the substrate. The substrate defines a thermal conductivity to dissipate a requisite amount of power from the base functional layer.
摘要翻译： 例如，提供了一种用于半导体处理设备的加热器，其包括具有至少一个功能区的基本功能层。 将基板固定到基底功能层，并且调谐层固定到与基底功能层相对的基板。 调谐层包括多个区域，其数量大于基底功能层的区域，并且调谐层具有比基底功能层低的功率。 此外，通过示例的方式将诸如卡盘的部件固定到与基板相对的调谐层。 衬底限定热导率以从基底功能层消散所需量的功率。
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公开(公告)号：US11692905B2
公开(公告)日：2023-07-04
申请号：US16907976
申请日：2020-06-22
IPC分类号： G01M7/02 , G01M7/00 , G05B19/042 , H01L21/67
CPC分类号： G01M7/025 , G01M7/00 , G05B19/042 , H01L21/67017 , G05B2219/49056
摘要： A method of monitoring a condition of a dynamic system includes installing a vibration signal acquisition device at a predetermined location of the dynamic system, acquiring vibration signals by the vibration signal acquisition device, analyzing the vibration signals in a frequency domain, and predicting a change in the condition of the dynamic system based on the vibration signals in the frequency domain. A system is also provided, and a condition of the dynamic system includes clogging.
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公开(公告)号：US09826574B2
公开(公告)日：2017-11-21
申请号：US14925330
申请日：2015-10-28
发明人： Jacob Lindley , Cal Swanson
CPC分类号： H05B1/0233 , H05B1/0202 , H05B3/0014 , H05B3/26 , H05B3/42 , H05B2203/005 , H05B2203/009 , H05B2203/011 , H05B2203/013 , H05B2203/017 , H05B2213/03 , H05B2213/07
摘要： A thermal system includes a plurality of resistor circuits that define a number of resistor circuits Rn. The thermal system also has a plurality of nodes that connect the plurality of resistor circuits and define a number of nodes Nn. A plurality of power wires are connected to each of the plurality of nodes, and the plurality of power wires define a number of power wires Pn. A plurality of signal wires connect to each of the plurality of nodes to sense the temperature of each of the resistor circuits, and the plurality of signal wires define a number of signal wires Sn. The number of power wires Pn and the number of signal wires Sn is equal to the number of nodes Nn, and the number of resistor circuits Rn is greater than or equal to the number of nodes Nn.
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公开(公告)号：US10734256B2
公开(公告)日：2020-08-04
申请号：US14990118
申请日：2016-01-07
发明人： Kevin Ptasienski , Kevin Robert Smith , Cal Thomas Swanson , Philip Steven Schmidt , Mohammad Nosrati , Jacob Lindley , Allen Norman Boldt , Sanhong Zhang , Louis P. Steinhauser , Dennis Stanley Grimard
IPC分类号： F27B5/14 , H05B3/28 , H01L21/67 , H05B1/02 , H05B1/00 , H05B3/02 , H01L21/683 , H05B3/20 , H05B3/06
摘要： A heater system is provided that includes a base functional layer having at least one functional zone. A substrate is secured to the functional member, and a tuning layer is secured to the substrate opposite the base functional layer. The tuning layer includes a plurality of zones that is greater in number than the zones of the base functional layer, and the tuning layer provides lower power than the base functional layer. A component is secured to the tuning layer opposite the substrate, and the substrate defines a thermal conductivity to absorb and dissipate a requisite amount of power from the base functional layer. A control system is also provided that has a plurality of addressable control elements in electrical communication with power lines and with the tuning layer, the control elements providing selective control of the tuning layer zones.
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公开(公告)号：US10362637B2
公开(公告)日：2019-07-23
申请号：US15817573
申请日：2017-11-20
发明人： Jacob Lindley , Cal Swanson
摘要： The present disclosure provides a thermal system that includes an array of heating resistor circuits having first termination ends and second termination ends, and a plurality of nodes connected to the heating resistor circuits at the first and second termination ends. The thermal system further includes power wires to provide power to the heating resistor circuits and signal wires to sense a temperature of each of the heating resistor circuits. Each node is connected to a power wire and to a signal wire, and a number of heating resistor circuits is greater than or equal to a number of power wires and to a number of the signal wires.
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公开(公告)号：US20170254250A1
公开(公告)日：2017-09-07
申请号：US15448162
申请日：2017-03-02
CPC分类号： H05B1/0244 , F01N3/021 , F01N3/023 , F01N3/027 , F01N3/0814 , F01N3/103 , F01N3/106 , F01N3/2006 , F01N3/2013 , F01N3/2066 , F01N9/00 , F01N9/002 , F01N11/002 , F01N11/005 , F01N13/0097 , F01N2240/10 , F01N2240/16 , F01N2240/36 , F01N2410/00 , F01N2410/04 , F01N2550/22 , F01N2560/06 , F01N2560/07 , F01N2560/12 , F01N2560/20 , F01N2610/102 , F01N2900/0416 , F01N2900/1404 , F01N2900/1406 , F01N2900/1411 , F01N2900/1602 , F02D41/024 , F02D41/1446 , F02D41/1447 , F02D41/22 , F02D41/222 , F02D2041/1433 , F02D2041/228 , F28F2200/00 , G01F1/68 , G01F1/86 , G01K7/16 , G01K2205/04 , G01M15/05 , G05D23/185 , G05D23/2401 , G05D23/30 , G07C5/0808 , H01C7/02 , H01C7/04 , H05B1/0227 , H05B3/0042 , H05B3/141 , H05B3/18 , H05B3/20 , H05B3/40 , H05B2203/019 , H05B2203/021 , H05B2203/022 , Y02T10/26 , Y02T10/47
摘要： A fluid control system is provided that in one form includes a first flow channel, a second flow channel, a heater disposed in the second flow channel, and a fluid control device disposed upstream from the first and second flow channels. When the heater is turned on, the fluid control device changes a fluid flow rate through at least one of the first flow channel and the second flow channel. In another form, the fluid control system includes a bypass conduit, a heater disposed within the bypass conduit, and a fluid control device disposed near the inlet and outlet of the bypass conduit. In still another form, the fluid control system includes a regeneration device disposed downstream from at least one exhaust aftertreatment system and closes an outlet of the exhaust pipe.
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公开(公告)号：US11921526B2
公开(公告)日：2024-03-05
申请号：US17465441
申请日：2021-09-02
发明人： Andrew Oplawski , Jeremy Quandt , Keith Ness , Jacob Lindley
IPC分类号： G05D23/19 , G05B19/4155 , H05B1/02
CPC分类号： G05D23/1902 , G05B19/4155 , H05B1/0288 , G05B2219/42033 , G05B2219/50333
摘要： A method for controlling a heated process of an electric heater includes obtaining a setpoint variable indicating a target temperature of the heater. The method includes identifying an energy profile for the heater based on the setpoint variable. The energy profile provides a defined magnitude of initial electrical energy to be applied to the heater to have a temperature of the heated process reach the target temperature. The method includes obtaining a process variable indicating a performance characteristic of the heated process. The method includes providing electrical energy to the heater based on at least one of the energy profile and the process variable.
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