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    Transducer-level microactuator for a magnetic recording system
    2.
    发明授权
    Transducer-level microactuator for a magnetic recording system 有权
    用于磁记录系统的传感器级微致动器

    公开(公告)号：US07277257B2

    公开(公告)日：2007-10-02

    申请号：US10729472

    申请日：2003-12-05

    申请人： Roger L. Hipwell, Jr. ,  Kyle M. Bartholomew ,  Lance E. Stover ,  Wayne A. Bonin ,  Jeremy A. Thurn ,  Zine-Eddine Boutaghou

    发明人： Roger L. Hipwell, Jr. ,  Kyle M. Bartholomew ,  Lance E. Stover ,  Wayne A. Bonin ,  Jeremy A. Thurn ,  Zine-Eddine Boutaghou

    IPC分类号： G11B5/56 ,  G11B21/21

    CPC分类号： G11B5/5552

    摘要： A transducer-level microactuator selectively positions a transducer portion of a slider radially with respect to circumferential data tracks of a rotatable disc. The slider includes a slider body having a leading edge and a trailing edge, a transducer body and a flexure body. The transducer body is spaced from the trailing edge of the sliding body and includes at least one transducer element. The flexure body extends from the trailing edge of the slider body and includes a first anchor point connected to the slider body and a second anchor point connected to the transducer body. The basecoat layer is deposited on the trailing edge of the slider body and substantially surrounds the flexure body wherein a gap separates the flexure body from the basecoat. A first actuation assembly is formed on the basecoat and a second actuation assembly is formed on the transducer body adjacent the slider body.

    摘要翻译： 传感器级微致动器相对于可旋转盘的周向数据轨道选择性地定位滑块的换能器部分。 滑块包括具有前缘和后缘的滑块体，换能器本体和挠曲体。 换能器主体与滑动体的后缘间隔开并且包括至少一个换能器元件。 弯曲体从滑块主体的后缘延伸并且包括连接到滑块主体的第一锚定点和连接到换能器本体的第二锚定点。 基底层沉积在滑块体的后缘上并且基本上围绕挠曲体，其中间隙将挠曲体与基底分隔开。 第一致动组件形成在底座上，并且第二致动组件形成在邻近滑块主体的换能器本体上。

    Laterally supported handle wafer for through-wafer reactive-ion etch micromachining
    4.
    发明授权
    Laterally supported handle wafer for through-wafer reactive-ion etch micromachining 失效
    用于通过晶片反应离子蚀刻微加工的侧面支撑的处理晶片

    公开(公告)号：US06733681B1

    公开(公告)日：2004-05-11

    申请号：US09707698

    申请日：2000-11-07

    申请人： Roger L. Hipwell, Jr. ,  Lee Walter ,  Wayne A. Bonin ,  Barry D. Wissman ,  Zine-Eddine Boutaghou ,  Barbara J. Ihlow-Mahrer

    发明人： Roger L. Hipwell, Jr. ,  Lee Walter ,  Wayne A. Bonin ,  Barry D. Wissman ,  Zine-Eddine Boutaghou ,  Barbara J. Ihlow-Mahrer

    IPC分类号： B81C100

    CPC分类号： B81C1/00357 ,  B81C2201/019 ,  Y10T29/49025

    摘要： A method of handling a wafer for through-wafer plasma etching includes lateral support provided between a handle wafer and a product wafer without wafer bonding or an adhesive film using mating mechanical structures. The product wafer is easily separated from the handle wafer following etching without stripping or cleaning. Because the connection between the wafers is mechanical, not from an adhesive layer/bonded layer, a wafer can be etched, inspected, and subsequently continue to be etched without the hindrance of repeated bonding, separation, and cleaning. A non-bonded support for released devices following a through-etch process is also provided.

    摘要翻译： 用于晶圆等离子体蚀刻处理晶片的方法包括在晶片接合之间提供的手柄晶片和产品晶片之间的侧向支撑，或者使用配合机械结构的粘合膜。 在没有剥离或清洁的情况下，产品晶片在蚀刻之后容易地与处理晶片分离。 因为晶片之间的连接是机械的，而不是粘合层/接合层，所以可以蚀刻，检查晶片并且随后继续蚀刻晶片，而不会重复地进行接合，分离和清洁。 还提供了在通过蚀刻工艺之后的释放器件的非接合支撑。

    Transducer-level microactuator with dual-axis control
    7.
    发明授权
    Transducer-level microactuator with dual-axis control 失效
    带双轴控制的传感器级微型致动器

    公开(公告)号：US06785086B1

    公开(公告)日：2004-08-31

    申请号：US09815679

    申请日：2001-03-23

    申请人： Wayne A. Bonin ,  Zine-Eddine Boutaghou ,  Roger L. Hipwell, Jr. ,  Barry D. Wissman ,  Lee Walter ,  Barbara J. Ihlow-Mahrer

    发明人： Wayne A. Bonin ,  Zine-Eddine Boutaghou ,  Roger L. Hipwell, Jr. ,  Barry D. Wissman ,  Lee Walter ,  Barbara J. Ihlow-Mahrer

    IPC分类号： G11B5596

    CPC分类号： G11B5/5552

    摘要： A slider for carrying and finely adjusting both a radial position and a flying height of a transducing head with respect to a track of a rotatable disc includes a stator portion carried by a support structure such as a flexure of a disc drive system. A plurality of springs extend from the stator portion and are flexible in a lateral direction (for radial positioning) and in a vertical direction (for flying height control). A rotor portion is connected to the stator portion by the plurality of springs. The rotor portion carries the transducing head. The stator portion includes a plurality of stator electrodes, and the rotor portion includes a plurality of rotor electrodes suspended between the stator electrodes. Selected voltages are applied to the stator electrodes and the rotor electrodes to create a selected force in the lateral and vertical directions for moving the rotor portion with respect to the stator portion to finely adjust the radial position and flying height of the transducing head.

    摘要翻译： 用于承载和精细地调节换能头相对于可旋转盘的轨道的径向位置和飞行高度的滑块包括由诸如盘驱动系统的弯曲的支撑结构承载的定子部分。 多个弹簧从定子部分延伸并且在横向方向（用于径向定位）和沿垂直方向（用于飞行高度控制）是柔性的。 转子部分通过多个弹簧连接到定子部分。 转子部分承载换能头。 定子部分包括多个定子电极，转子部分包括悬置在定子电极之间的多个转子电极。 所选择的电压被施加到定子电极和转子电极以在横向和垂直方向上产生选定的力，以使转子部分相对于定子部分移动，以微调头部的径向位置和飞行高度。

    Slider-level microactuator for precise head positioning
    9.
    发明授权
    Slider-level microactuator for precise head positioning 有权
    滑块级微型致动器用于精确的头部定位

    公开(公告)号：US06683757B1

    公开(公告)日：2004-01-27

    申请号：US09733351

    申请日：2000-12-08

    申请人： Wayne A. Bonin ,  Zine-Eddine Boutaghou ,  Roger L. Hipwell, Jr. ,  Barry D. Wissman ,  Lee Walter ,  Barbara J. Ihlow-Mahrer

    发明人： Wayne A. Bonin ,  Zine-Eddine Boutaghou ,  Roger L. Hipwell, Jr. ,  Barry D. Wissman ,  Lee Walter ,  Barbara J. Ihlow-Mahrer

    IPC分类号： G11B556

    CPC分类号： G11B5/5552 ,  G11B21/21

    摘要： A microactuator is built at the slider level to achieve high resolution positioning of a transducing head with respect to a track of a rotatable disc having a plurality of concentric tracks in a disc drive system. The slider includes a main body carried by a flexure. A stator portion extends from the main body, and a plurality of beams extend from the stator portion, the beams being flexible in a lateral direction. A rotor portion is connected to the stator portion by the plurality of beams, forming a gap between the stator portion and the rotor portion. The rotor portion carries the transducing head. A plurality of stator electrodes are formed on the stator portion, and a plurality of rotor electrodes are formed on the rotor portion to confront the stator electrodes across the gap. Control circuitry applies selected voltages to the stator electrodes and the rotor electrodes to create a force in the lateral direction for moving the rotor portion with respect to the stator portion of the slider, thereby finely positioning the transducing head.

    摘要翻译： 在滑块水平上构建微致动器，以实现相对于在盘驱动系统中具有多个同心轨道的可旋转盘的轨道的换能头的高分辨率定位。 滑块包括由挠曲件承载的主体。 定子部分从主体延伸，并且多个梁从定子部分延伸，梁在横向方向上是柔性的。 转子部分通过多个梁连接到定子部分，在定子部分和转子部分之间形成间隙。 转子部分承载换能头。 在定子部分上形成有多个定子电极，并且在转子部分上形成多个转子电极，以跨过间隙对置定子电极。 控制电路将所选择的电压施加到定子电极和转子电极以在横向方向上产生相对于滑块的定子部分移动转子部分的力，从而精细地定位换能头。