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    Laterally supported handle wafer for through-wafer reactive-ion etch micromachining
    2.
    发明授权
    Laterally supported handle wafer for through-wafer reactive-ion etch micromachining 失效
    用于通过晶片反应离子蚀刻微加工的侧面支撑的处理晶片

    公开(公告)号：US06733681B1

    公开(公告)日：2004-05-11

    申请号：US09707698

    申请日：2000-11-07

    申请人： Roger L. Hipwell, Jr. ,  Lee Walter ,  Wayne A. Bonin ,  Barry D. Wissman ,  Zine-Eddine Boutaghou ,  Barbara J. Ihlow-Mahrer

    发明人： Roger L. Hipwell, Jr. ,  Lee Walter ,  Wayne A. Bonin ,  Barry D. Wissman ,  Zine-Eddine Boutaghou ,  Barbara J. Ihlow-Mahrer

    IPC分类号： B81C100

    CPC分类号： B81C1/00357 ,  B81C2201/019 ,  Y10T29/49025

    摘要： A method of handling a wafer for through-wafer plasma etching includes lateral support provided between a handle wafer and a product wafer without wafer bonding or an adhesive film using mating mechanical structures. The product wafer is easily separated from the handle wafer following etching without stripping or cleaning. Because the connection between the wafers is mechanical, not from an adhesive layer/bonded layer, a wafer can be etched, inspected, and subsequently continue to be etched without the hindrance of repeated bonding, separation, and cleaning. A non-bonded support for released devices following a through-etch process is also provided.

    摘要翻译： 用于晶圆等离子体蚀刻处理晶片的方法包括在晶片接合之间提供的手柄晶片和产品晶片之间的侧向支撑，或者使用配合机械结构的粘合膜。 在没有剥离或清洁的情况下，产品晶片在蚀刻之后容易地与处理晶片分离。 因为晶片之间的连接是机械的，而不是粘合层/接合层，所以可以蚀刻，检查晶片并且随后继续蚀刻晶片，而不会重复地进行接合，分离和清洁。 还提供了在通过蚀刻工艺之后的释放器件的非接合支撑。

    Breakable tethers for microelectromechanical system devices utilizing reactive ion etching lag
    3.
    发明授权
    Breakable tethers for microelectromechanical system devices utilizing reactive ion etching lag 有权
    用于使用反应离子蚀刻滞后的微机电系统装置的可破坏的系绳

    公开(公告)号：US06387778B1

    公开(公告)日：2002-05-14

    申请号：US09649536

    申请日：2000-08-28

    申请人： Wayne A. Bonin ,  Zine-Eddine Boutaghou ,  Roger L. Hipwell, Jr. ,  Barry D. Wissman ,  Lee Walter ,  Barbara J. Ihlow-Mahrer

    发明人： Wayne A. Bonin ,  Zine-Eddine Boutaghou ,  Roger L. Hipwell, Jr. ,  Barry D. Wissman ,  Lee Walter ,  Barbara J. Ihlow-Mahrer

    IPC分类号： H01L21301

    CPC分类号： B81C1/00873 ,  B81C2201/0132

    摘要： Utilizing reactive ion etching (RIE) lag, tethers are fabricated that reliably hold devices in place during processing and storage, yet are easily broken to remove the parts from the wafer as desired, without requiring excessive force that could damage the devices. The tethers are fabricated by slightly narrowing the periphery etch feature at several places. By adjusting the ratio of the main periphery width to the necked width at the tethers, the final thickness of the tether can be controlled to a small fraction of the wafer thickness, so that tethers defined by readily achievable feature sizes will reliably hold the parts in place until removal is desired. Since the tethers are now only a fraction of the wafer thickness, they will reliably break to release the part at a force level that will not damage the part.

    摘要翻译： 利用反应离子蚀刻（RIE）滞后，制造了在加工和存储期间可靠地将装置保持在适当位置的系链，但是容易断裂以根据需要从晶片中除去部件，而不需要可能损坏装置的过大的力。 系绳是通过在几个地方略微缩小周边蚀刻特征来制造的。 通过调节主臂周边宽度与系绳颈缩宽度的比例，可以将系绳的最终厚度控制在晶片厚度的一小部分，从而可以容易地达到的特征尺寸所限定的系绳将可靠地保持在 地方，直到需要去除。 由于系绳现在只是晶片厚度的一部分，它们将可靠地断裂，以不会损坏零件的力水平释放零件。

    Transducer-level microactuator with dual-axis control
    5.
    发明授权
    Transducer-level microactuator with dual-axis control 失效
    带双轴控制的传感器级微型致动器

    公开(公告)号：US06785086B1

    公开(公告)日：2004-08-31

    申请号：US09815679

    申请日：2001-03-23

    申请人： Wayne A. Bonin ,  Zine-Eddine Boutaghou ,  Roger L. Hipwell, Jr. ,  Barry D. Wissman ,  Lee Walter ,  Barbara J. Ihlow-Mahrer

    发明人： Wayne A. Bonin ,  Zine-Eddine Boutaghou ,  Roger L. Hipwell, Jr. ,  Barry D. Wissman ,  Lee Walter ,  Barbara J. Ihlow-Mahrer

    IPC分类号： G11B5596

    CPC分类号： G11B5/5552

    摘要： A slider for carrying and finely adjusting both a radial position and a flying height of a transducing head with respect to a track of a rotatable disc includes a stator portion carried by a support structure such as a flexure of a disc drive system. A plurality of springs extend from the stator portion and are flexible in a lateral direction (for radial positioning) and in a vertical direction (for flying height control). A rotor portion is connected to the stator portion by the plurality of springs. The rotor portion carries the transducing head. The stator portion includes a plurality of stator electrodes, and the rotor portion includes a plurality of rotor electrodes suspended between the stator electrodes. Selected voltages are applied to the stator electrodes and the rotor electrodes to create a selected force in the lateral and vertical directions for moving the rotor portion with respect to the stator portion to finely adjust the radial position and flying height of the transducing head.

    摘要翻译： 用于承载和精细地调节换能头相对于可旋转盘的轨道的径向位置和飞行高度的滑块包括由诸如盘驱动系统的弯曲的支撑结构承载的定子部分。 多个弹簧从定子部分延伸并且在横向方向（用于径向定位）和沿垂直方向（用于飞行高度控制）是柔性的。 转子部分通过多个弹簧连接到定子部分。 转子部分承载换能头。 定子部分包括多个定子电极，转子部分包括悬置在定子电极之间的多个转子电极。 所选择的电压被施加到定子电极和转子电极以在横向和垂直方向上产生选定的力，以使转子部分相对于定子部分移动，以微调头部的径向位置和飞行高度。

    Slider-level microactuator for precise head positioning
    6.
    发明授权
    Slider-level microactuator for precise head positioning 有权
    滑块级微型致动器用于精确的头部定位

    公开(公告)号：US06683757B1

    公开(公告)日：2004-01-27

    申请号：US09733351

    申请日：2000-12-08

    申请人： Wayne A. Bonin ,  Zine-Eddine Boutaghou ,  Roger L. Hipwell, Jr. ,  Barry D. Wissman ,  Lee Walter ,  Barbara J. Ihlow-Mahrer

    发明人： Wayne A. Bonin ,  Zine-Eddine Boutaghou ,  Roger L. Hipwell, Jr. ,  Barry D. Wissman ,  Lee Walter ,  Barbara J. Ihlow-Mahrer

    IPC分类号： G11B556

    CPC分类号： G11B5/5552 ,  G11B21/21

    摘要： A microactuator is built at the slider level to achieve high resolution positioning of a transducing head with respect to a track of a rotatable disc having a plurality of concentric tracks in a disc drive system. The slider includes a main body carried by a flexure. A stator portion extends from the main body, and a plurality of beams extend from the stator portion, the beams being flexible in a lateral direction. A rotor portion is connected to the stator portion by the plurality of beams, forming a gap between the stator portion and the rotor portion. The rotor portion carries the transducing head. A plurality of stator electrodes are formed on the stator portion, and a plurality of rotor electrodes are formed on the rotor portion to confront the stator electrodes across the gap. Control circuitry applies selected voltages to the stator electrodes and the rotor electrodes to create a force in the lateral direction for moving the rotor portion with respect to the stator portion of the slider, thereby finely positioning the transducing head.

    摘要翻译： 在滑块水平上构建微致动器，以实现相对于在盘驱动系统中具有多个同心轨道的可旋转盘的轨道的换能头的高分辨率定位。 滑块包括由挠曲件承载的主体。 定子部分从主体延伸，并且多个梁从定子部分延伸，梁在横向方向上是柔性的。 转子部分通过多个梁连接到定子部分，在定子部分和转子部分之间形成间隙。 转子部分承载换能头。 在定子部分上形成有多个定子电极，并且在转子部分上形成多个转子电极，以跨过间隙对置定子电极。 控制电路将所选择的电压施加到定子电极和转子电极以在横向方向上产生相对于滑块的定子部分移动转子部分的力，从而精细地定位换能头。

    Bonded transducer-level electrostatic microactuator for disc drive system
    8.
    发明授权
    Bonded transducer-level electrostatic microactuator for disc drive system 有权
    用于磁盘驱动系统的传感器级静电微型致动器

    公开(公告)号：US06697232B1

    公开(公告)日：2004-02-24

    申请号：US09809378

    申请日：2001-03-15

    申请人： Roger L. Hipwell, Jr. ,  Wayne A. Bonin ,  Lee Walter ,  Barry D. Wissman ,  Zine-Eddine Boutaghou

    发明人： Roger L. Hipwell, Jr. ,  Wayne A. Bonin ,  Lee Walter ,  Barry D. Wissman ,  Zine-Eddine Boutaghou

    IPC分类号： G11B2124

    CPC分类号： G11B5/6005 ,  G11B5/4826 ,  G11B5/5552

    摘要： A slider assembly is operable to selectively alter a position of a transducing head with respect to a track of a rotatable disc having a plurality of concentric tracks. The slider assembly includes a slider wafer arranged to be supported by a disc drive support structure. A stator is bonded to the slider wafer, with the stator including at least one electrode. A rotor is bonded to the stator, with the rotor having a frame portion bonded to the stator and a head-carrying portion attached to the frame portion by a flexible beam structure. The head-carrying portion of the rotor carries the transducing head, supports at least one rotor electrode adjacent to the at least one stator electrode, and is movable with respect to the frame portion of the rotor in response to a voltage difference between the at least one rotor electrode and the at least one stator electrode.

    摘要翻译： 滑动器组件可操作以选择性地改变换能头相对于具有多个同心轨道的可旋转盘的轨道的位置。 滑块组件包括布置成由盘驱动器支撑结构支撑的滑块晶片。 定子被结合到滑块晶片，定子包括至少一个电极。 转子结合到定子，其中转子具有结合到定子的框架部分和通过柔性梁结构附接到框架部分的头部承载部分。 转子的头部承载部分带有换能头，支撑至少一个与该至少一个定子电极相邻的转子电极，并且响应于该至少一个定子电极之间的电压差可相对于转子的框架部分移动 一个转子电极和至少一个定子电极。

    Method of fabricating electrically isolated metal MEMS beams and microactuator incorporating the MEMS beam
    9.
    发明授权
    Method of fabricating electrically isolated metal MEMS beams and microactuator incorporating the MEMS beam 有权
    制造电隔离金属MEMS光束的方法和结合MEMS光束的微型致动器

    公开(公告)号：US06674614B2

    公开(公告)日：2004-01-06

    申请号：US10037679

    申请日：2002-01-02

    申请人： Wayne A. Bonin ,  Lee Walter ,  Zine-Eddine Boutaghou

    发明人： Wayne A. Bonin ,  Lee Walter ,  Zine-Eddine Boutaghou

    IPC分类号： G11B2124

    CPC分类号： G11B5/5552

    摘要： A microactuator is formed by defining stator and rotor regions on a wafer. Isolation barriers are formed in the stator and rotor regions to define a isolation regions. Conductive suspension beam are formed between the first and second isolation regions, and wafer material between the stator and rotor regions is removed to form a stator and a rotor. The microactuator is arranged to position a load device having an electrical component. The suspension beams support the rotor and load device and provide electrical connection between the stator and rotor for the microactuator and/or the load device.

    摘要翻译： 通过在晶片上限定定子和转子区域来形成微致动器。 在定子和转子区域中形成隔离屏障，以限定隔离区域。 在第一和第二隔离区域之间形成导电悬架梁，并且去除定子和转子区域之间的晶片材料以形成定子和转子。 微型致动器布置成定位具有电气部件的负载装置。 悬架梁支撑转子和负载装置，并为微型致动器和/或负载装置提供定子和转子之间的电连接。

    Microactuator magnetic circuit
    10.
    发明授权
    Microactuator magnetic circuit 失效
    微致动器磁路

    公开(公告)号：US06671132B1

    公开(公告)日：2003-12-30

    申请号：US09742569

    申请日：2000-12-20

    申请人： Peter Crane ,  Derek A. Lewis ,  Zine-Eddine Boutaghou ,  Lee Walter

    发明人： Peter Crane ,  Derek A. Lewis ,  Zine-Eddine Boutaghou ,  Lee Walter

    IPC分类号： G11B5596

    CPC分类号： G11B5/5552

    摘要： An improved microactuator magnetic circuit having a simplified assembly, reduced field leakage, and improved passivation methods is disclosed. To simplify assembly, a single magnet is polarized in two magnetic regions so that the single magnet is functionally similar to two separate magnets. In addition, the magnetic circuit can be produced without a top keeper. Field leakage is reduced by expanding the bottom keeper. Finally, corrosion-resistant alloys with acceptable magnetic properties are used in forming the keeper.

    摘要翻译： 公开了一种具有简化的组装，减少的场泄漏和改进的钝化方法的改进的微致动器磁路。 为了简化组装，单个磁体在两个磁性区域中极化，使得单个磁体在功能上类似于两个分离的磁体。 此外，可以在没有顶部保持器的情况下制造磁路。 通过扩大底部保持器来减少场泄漏。 最后，使用具有可接受磁性的耐腐蚀合金来形成保持器。