公开(公告)号：US4685331A

公开(公告)日：1987-08-11

申请号：US721535

申请日：1985-04-10

申请人： Wayne G. Renken ,  Dan B. LeMay ,  Ricardo M. Takahashi

发明人： Wayne G. Renken ,  Dan B. LeMay ,  Ricardo M. Takahashi

IPC分类号： G01F1/68 ,  G01F1/684 ,  G01F1/692 ,  G01F1/698 ,  G05D7/06

CPC分类号： G01F1/698 ,  G01F1/6842 ,  G01F1/6845 ,  G05D7/0635 ,  Y10T137/7759

摘要： A mass flowmeter and controller measures the mass flow rate of liquid or gaseous fluids and controls the flow rate of the fluids being utilized in a processing operation. A series of flow channels and blocked channels are micro-etched from a silicon substrate leaving an integral membrane suspended across the channels. A heater-sensor thin film resistor, diode or transistor is formed on the membranes and the substrate during manufacture to sense the temperature at particular locations. A cover housing matching channels and grooves forms flow and stagnant blocked conduits in the structure. Through a bridge circuit a signal indicative of mass flow is produced. This signal is passed to a control valve armature coil in an in-line flow control valve. The controller includes a sensor module containing monitored flow and blocked channels and passive by-pass channels as required for additional flow capacity, a control valve cartridge, an overall housing and the magnetic armature coil which controls the flow of fluid through the valve and the sensor module.

摘要翻译： 质量流量计和控制器测量液体或气体流体的质量流量并控制在处理操作中使用的流体的流速。 从硅衬底对一系列流动通道和阻塞通道进行微蚀刻，留下悬挂在通道上的整体膜。 在制造期间，在膜和基板上形成加热器传感器薄膜电阻器，二极管或晶体管以感测特定位置处的温度。 匹配通道和凹槽的盖壳在结构中形成流动和停滞的阻塞管道。 通过桥接电路产生指示质量流量的信号。 该信号被传递到在线流量控制阀中的控制阀电枢线圈。 该控制器包括一个传感器模块，该传感器模块包含监控流量和阻塞通道以及额外流量所需的被动旁通通道，控制阀芯，整体外壳和磁性衔铁线圈，其控制通过阀门和传感器的流体流动 模块。