公开(公告)号：US07777160B2

公开(公告)日：2010-08-17

申请号：US12002381

申请日：2007-12-17

申请人： Wei Fan ,  Benjamin J. Olechnowicz ,  Marc Schaepkens ,  David M. Rusinko, Jr. ,  Xiang Liu ,  John T. Mariner

发明人： Wei Fan ,  Benjamin J. Olechnowicz ,  Marc Schaepkens ,  David M. Rusinko, Jr. ,  Xiang Liu ,  John T. Mariner

IPC分类号： H05B3/68 ,  C23C16/00

CPC分类号： H01L21/68735 ,  H01L21/67103 ,  H05B3/143

摘要： A layered heater structure including an electrode layer and a localized tuning method for tuning the electrode layer of a layered heater structure with high precision is provided. The localized tuning method tunes the electrode layer to its proper local resistance to minimize temperature offsets on the heater surface and thus provide a desired thermal profile that is in marked contrast to conventional, non-localized resistance tuning approaches based on thickness trimming practices, such as grinding or blasting, or resistivity adjustment, such as local heat treatment.

摘要翻译： 提供了包括电极层和用于高精度地调谐层状加热器结构的电极层的局部调谐方法的层状加热器结构。 局部调谐方法将电极层调整到其适当的局部电阻以最小化加热器表面上的温度偏移，并因此提供期望的热分布，其与基于厚度修整实践的常规非局部电阻调谐方法形成鲜明对比，例如 研磨或爆破，或电阻率调整，如局部热处理。