摘要:
Sputtering method for producing amorphous hydrogenated carbon thin films with high sp.sup.3 content. By sputtering the carbon with a pulsed DC power supply having high voltage peaks, a carbon film with remarkably high sp.sup.3 bonding fraction can be obtained. Previously, carbon films with a very high sp.sup.3 fraction film with content as high (e.g. as 80%) could only be produced by methods such as filtered cathodic arc deposition or chemical vapor deposition methods (CVD) such as plasma-enhanced chemical vapor deposition (PE-CVD) and ion-beam deposition operating at some narrowly defined range of deposition conditions. It is very advantageous to use sputtering to create a high sp.sup.3 content film, since sputtering is more manufacturable and has higher productivity compared to CVD or ion-beam deposition methods. The resultant carbon film has excellent durability and corrosion resistance capability down to very low thickness. Also compared to PE-CVD and ion-beam deposition, the new sputtering process produce much less particles and the process can be run on a manufacturing tool for much longer time, thereby increasing the productivity of the machine, and providing disks with higher quality.
摘要:
A data/information storage and retrieval medium, comprising: (a) a disk-shaped substrate including at least one surface with a layer stack thereon and including at least one magnetic or magneto-optical (“MO”) recording layer and an uppermost, protective overcoat layer comprising a carbon (C)-based material; and (b) a lubricant topcoat layer on the protective overcoat layer, the lubricant topcoat layer treated solely with UV radiation at a dosage sufficient to increase the glide yield, decrease the glide noise, and increase the number of CSS pass cycles of the medium before failure, relative to that of the same medium but with an untreated lubricant topcoat layer.
摘要:
The present invention provides one kind of IP telecom network system and its realizing method, and a method of building virtual private network and carrying out multicast based on this IP telecom network, and a method of managing resource in this IP telecom network etc. The IP telecom network system includes at least one complex address no-connection data network including at least one address mapping device, several IP networks and several edge pass devices for connection between the IP network and data network address. Each of the devices and the edge pass devices in the data network has one distributed data network address, each of the devices and the edge pass devices in the IP network has one distributed IP address, and the mapping relation between the IP address and the data network address is maintained in the address mapping table in the address mapping device. The IP network provided by this invention can be work as the next generation IP telecom network The IP telecom network system can realize the integration of telecom business in one IP network.
摘要:
A method of forming a layer of a hard, abrasion, and corrosion-resistant hydrogenated carbon (C:H) material on a substrate surface comprises steps of: (a) providing a vacuum chamber including a carbon sputtering target in the interior space thereof; (b) providing a substrate in the chamber interior space, a surface of the substrate the sputtering target; (c) supplying the vacuum chamber with at least one hydrocarbon gas and at least one inert gas at separately controllable flow rates and applying a sufficient negative potential to the carbon target to generate a plasma in said interior space to deposit a layer of the C:H material on the substrate surface by a process comprising simultaneous sputtering of the carbon sputtering target and plasma enhanced chemical vapor deposition (PECVD) of carbon and hydrogen from the hydrocarbon gas, wherein: step (c) includes separately controlling the flow rates of each of the hydrocarbon and inert gases such that the amount of C atoms in the C:H which are contributed by the PECVD component of the process is less than about 50 at. %. Embodiments of the invention include utilizing the C:H material as a protective overcoat layer for magnetic and magneto-optical recording media.