公开(公告)号：US07172915B2

公开(公告)日：2007-02-06

申请号：US10752666

申请日：2004-01-08

申请人： Wen-Jian Lin ,  Hung-Huei Hsu ,  Hsiung-Kuang Tsai

发明人： Wen-Jian Lin ,  Hung-Huei Hsu ,  Hsiung-Kuang Tsai

IPC分类号： H01L21/00 ,  H01J9/00 ,  G02B26/00

CPC分类号： G02B26/001

摘要： An optical-interference type display panel and a method for making the same are disclosed, wherein the display panel has a substrate on which multiple first conductive optical film stacks, supporting layers and multiple second conductive optical film stacks are formed. The substrate further has a plurality of connecting pads consisting of a transparent conductive film of the first conductive optical film stacks. Since the transparent conductive film is made of indium tin oxide, these connecting pads have the excellent anti-oxidation ability at their surface.

摘要翻译： 公开了一种光干涉型显示面板及其制造方法，其中显示面板具有形成有多个第一导电光学膜叠层，支撑层和多个第二导电光学膜叠层的基板。 基板还具有由第一导电光学膜叠层的透明导电膜构成的多个连接焊盘。 由于透明导电膜由氧化铟锡制成，这些连接焊盘在其表面具有优异的抗氧化能力。

公开(公告)号：US07323217B2

公开(公告)日：2008-01-29

申请号：US11261466

申请日：2005-10-31

申请人： Wen-Jian Lin ,  Hsiung-Kuang Tsai

发明人： Wen-Jian Lin ,  Hsiung-Kuang Tsai

IPC分类号： B05D5/06

CPC分类号： G02B26/001

摘要： An optical-interference type reflective panel and a method for making the same are disclosed, wherein the display panel has a substrate on which multiple supporting layers are firstly formed. Then, a plurality of first conductive optical film stacks, spacing layers and multiple second conductive optical film stacks are sequentially formed on the substrate. Finally, once the spacing layers are removed, optical-interference regulators are formed. Since said supporting layers forming step is prior to the first conductive optical film stacks, a precise back-side exposing step is not necessary so that the making procedure of the panel is simplified.

摘要翻译： 公开了一种光干涉型反射板及其制造方法，其中显示面板具有首先形成有多个支撑层的基板。 然后，在衬底上依次形成多个第一导电光学膜堆叠，间隔层和多个第二导电光学膜堆叠。 最后，一旦间隔层被去除，就形成光干涉调节器。 由于所述支撑层形成步骤在第一导电光学膜堆叠之前，因此不需要精确的背面曝光步骤，从而简化了面板的制作步骤。

公开(公告)号：US20050202649A1

公开(公告)日：2005-09-15

申请号：US10873014

申请日：2004-06-21

申请人： Po-Chung Hung ,  Hsiung-Kuang Tsai ,  Wen-Jian Lin

发明人： Po-Chung Hung ,  Hsiung-Kuang Tsai ,  Wen-Jian Lin

IPC分类号： G02B26/00 ,  G02F1/03 ,  G02F1/1335 ,  G09G3/34 ,  H01L21/76

CPC分类号： G02B26/001 ,  G02F1/21 ,  G09G3/3466 ,  G09G2330/08

摘要： An optical interference reflective element has a light-incident electrode and a light-reflective electrode, and each or both of the two electrodes are made of a display part and a wiring part which are electrically connected to each other with a connection part. A plurality of the interference reflective elements are connected to form an electrode line by the wiring parts, and the electrode line is used in an optical interference reflective structure formed by the optical interference reflective elements that is operated in a passive matrix mode.

公开(公告)号：US20060050393A1

公开(公告)日：2006-03-09

申请号：US11261466

申请日：2005-10-31

申请人： Wen-Jian Lin ,  Hsiung-Kuang Tsai

发明人： Wen-Jian Lin ,  Hsiung-Kuang Tsai

IPC分类号： G02B1/10

CPC分类号： G02B26/001

摘要： An optical-interference type reflective panel and a method for making the same are disclosed, wherein the display panel has a substrate on which multiple supporting layers are firstly formed. Then, a plurality of first conductive optical film stacks, spacing layers and multiple second conductive optical film stacks are sequentially formed on the substrate. Finally, once the spacing layers are removed, optical-interference regulators are formed. Since said supporting layers forming step is prior to the first conductive optical film stacks, a precise back-side exposing step is not necessary so that the making procedure of the panel is simplified.

摘要翻译： 公开了一种光干涉型反射板及其制造方法，其中显示面板具有首先形成有多个支撑层的基板。 然后，在衬底上依次形成多个第一导电光学膜堆叠，间隔层和多个第二导电光学膜堆叠。 最后，一旦间隔层被去除，就形成光干涉调节器。 由于所述支撑层形成步骤在第一导电光学膜堆叠之前，因此不需要精确的背面曝光步骤，从而简化了面板的制作步骤。

公开(公告)号：US06952303B2

公开(公告)日：2005-10-04

申请号：US10815947

申请日：2004-04-02

申请人： Wen-Jian Lin ,  Hsiung-Kuang Tsai

发明人： Wen-Jian Lin ,  Hsiung-Kuang Tsai

IPC分类号： G02B26/00 ,  G02F1/1335 ,  G02F1/21

CPC分类号： G02B26/001

摘要： A protection layer covers the cavity-side surface of a bottom electrode of a interferometric modulation pixel. Consequently, the protective layer protects the surface of the bottom electrode while a sacrificial layer between the bottom electrode and the top electrode is being etched. Thus, the distance between the bottom electrode and the top electrode is maintained, thereby ensuring that only the light with desired wavelengths is reflected by the interferometric modulation pixel.

公开(公告)号：US06882461B1

公开(公告)日：2005-04-19

申请号：US10812257

申请日：2004-03-29

申请人： Hsiung-Kuang Tsai ,  Wen-Jian Lin

发明人： Hsiung-Kuang Tsai ,  Wen-Jian Lin

IPC分类号： G02B26/06 ,  B81B3/00 ,  B81C1/00 ,  B81C99/00 ,  G02B26/02 ,  G02F1/1335 ,  G02B26/00

CPC分类号： G02B26/001

摘要： A micro electro mechanical system display cell comprises a substrate, black matrix layer, a first electrode, a second electrode and supporters. The black matrix layer is located on the substrate and the first electrode is bridged between the black matrixes. The supporters are located on the black matrix layers and located between the two electrodes. The black matrix layers are used to prevent the light leakage between the second electrodes and between the first electrode and the second electrode.

摘要翻译： 微电子机械系统显示单元包括基板，黑矩阵层，第一电极，第二电极和支撑件。 黑矩阵层位于衬底上，第一电极桥接在黑色矩阵之间。 支持者位于黑矩阵层上并位于两个电极之间。 黑矩阵层用于防止第二电极之间和第一电极与第二电极之间的光泄漏。

公开(公告)号：US20050046923A1

公开(公告)日：2005-03-03

申请号：US10815947

申请日：2004-04-02

申请人： Wen-Jian Lin ,  Hsiung-Kuang Tsai

发明人： Wen-Jian Lin ,  Hsiung-Kuang Tsai

IPC分类号： G02B26/00 ,  G02F1/1335 ,  G02F1/21

CPC分类号： G02B26/001

摘要： A protection layer covers the cavity-side surface of a bottom electrode of a interferometric modulation pixel. Consequently, the protective layer protects the surface of the bottom electrode while a sacrificial layer between the bottom electrode and the top electrode is being etched. Thus, the distance between the bottom electrode and the top electrode is maintained, thereby ensuring that only the light with desired wavelengths is reflected by the interferometric modulation pixel.

摘要翻译： 保护层覆盖干涉式调制像素的底部电极的空腔侧表面。 因此，当蚀刻底部电极和顶部电极之间的牺牲层时，保护层保护底部电极的表面。 因此，保持底部电极和顶部电极之间的距离，从而确保只有具有期望波长的光被干涉式调制像素反射。

公开(公告)号：US07198973B2

公开(公告)日：2007-04-03

申请号：US10705824

申请日：2003-11-13

申请人： Wen-Jian Lin ,  Hsiung-Kuang Tsai

发明人： Wen-Jian Lin ,  Hsiung-Kuang Tsai

IPC分类号： H01L21/00

CPC分类号： B81C1/00182 ,  B81B2201/047 ,  G02B26/001 ,  G03F7/0007

摘要： A method for fabricating an interference display unit is provided. A first plate and a sacrificial layer are formed in order on a substrate and at least two openings are formed in the first plate and the sacrificial layer. A photoresist layer is spin-coated on the sacrificial layer and fills the openings. A photolithographic process patterns the photoresist layer to define a support with an arm. A second plate is formed on the sacrificial layer and posts. The arm's stress is released through a thermal process. The position of the arm is shifted and the distance between the first plate and the second plate is therefore defined. Finally, The sacrificial layer is removed.

摘要翻译： 提供一种制造干涉显示单元的方法。 在基板上依次形成第一板和牺牲层，并且在第一板和牺牲层中形成至少两个开口。 将光致抗蚀剂层旋涂在牺牲层上并填充开口。 光刻工艺使光致抗蚀剂图案形成具有臂的支撑。 在牺牲层和柱上形成第二板。 手臂的压力通过热过程释放。 臂的位置移动，因此限定了第一板和第二板之间的距离。 最后，去除牺牲层。

公开(公告)号：US07078293B2

公开(公告)日：2006-07-18

申请号：US10796997

申请日：2004-03-11

申请人： Wen-Jian Lin ,  Hsiung-Kuang Tsai

发明人： Wen-Jian Lin ,  Hsiung-Kuang Tsai

IPC分类号： H01L21/302

CPC分类号： G02B26/001

摘要： A method for fabricating an optical interference display cell is described. A first electrode and a sacrificial layer are sequentially formed on a transparent substrate and at least two openings are formed in the first electrode and the sacrificial layer to define a position of the optical interference display cell. An insulated heat-resistant inorganic supporter is formed in each of the openings. A second electrode is formed on the sacrificial layer and the supporters. Finally, a remote plasma etching process is used for removing the sacrificial layer.

摘要翻译： 描述了制造光学干涉显示单元的方法。 第一电极和牺牲层依次形成在透明基板上，并且在第一电极和牺牲层中形成至少两个开口以限定光学干涉显示单元的位置。 在每个开口中形成绝缘的耐热无机支撑体。 在牺牲层和支撑体上形成第二电极。 最后，使用远程等离子体蚀刻工艺来去除牺牲层。

公开(公告)号：US06999236B2

公开(公告)日：2006-02-14

申请号：US10752811

申请日：2004-01-08

申请人： Wen-Jian Lin ,  Hsiung-Kuang Tsai

发明人： Wen-Jian Lin ,  Hsiung-Kuang Tsai

IPC分类号： G02B1/10

CPC分类号： G02B5/288 ,  G02B26/001

摘要： An optical-interference type reflective panel and a method for making the same are disclosed, wherein the display panel has a substrate on which multiple supporting layers are firstly formed. Then, a plurality of first conductive optical film stacks, spacing layers and multiple second conductive optical film stacks are sequentially formed on the substrate. Finally, once the spacing layers are removed, optical-interference regulators are formed. Since said supporting layers forming step is prior to the first conductive optical film stacks, a precise back-side exposing step is not necessary so that the making procedure of the panel is simplified.

摘要翻译： 公开了一种光干涉型反射板及其制造方法，其中显示面板具有首先形成有多个支撑层的基板。 然后，在衬底上依次形成多个第一导电光学膜堆叠，间隔层和多个第二导电光学膜堆叠。 最后，一旦间隔层被去除，就形成光干涉调节器。 由于所述支撑层形成步骤在第一导电光学膜堆叠之前，因此不需要精确的背面曝光步骤，从而简化了面板的制作步骤。