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公开(公告)号：US6017382A
公开(公告)日：2000-01-25
申请号：US50259
申请日：1998-03-30
申请人： Wenchang Ji , Dongmin Shen , Ravi Jain , Arthur I. Shirley , Atul M. Athalye , Piotr J. Sadkowski
发明人： Wenchang Ji , Dongmin Shen , Ravi Jain , Arthur I. Shirley , Atul M. Athalye , Piotr J. Sadkowski
IPC分类号： B01D53/047
CPC分类号： B01D53/02 , B01D53/047 , B01D2253/104 , B01D2253/106 , B01D2253/108 , B01D2253/308 , B01D2256/26 , B01D2257/102 , B01D2257/104 , B01D2257/80 , B01D2258/0216 , B01D2259/404 , B01D2259/4146
摘要： A method of processing semiconductor manufacturing exhaust gases for recovering at least hexafluoroethane in which a feed stream composed of the exhaust gases is passed through an adsorbent bed selected to adsorb oxygen, and also nitrogen if present, but not to appreciably adsorb the hexafluoroethane. As a result, a product stream, discharged from the adsorbent bed, has a higher concentration of hexafluoroethane than in the feed stream. In one embodiment, only a single adsorbent such as carbon molecular sieve is provided to adsorb the oxygen or a modified 4A zeolite could be used to adsorb both oxygen and nitrogen. When nitrogen is a potential constituent, layers of carbon molecular sieve and zeolite are provided to adsorb the oxygen and then the nitrogen, respectively. A third adsorbent, preferably 5A zeolite may be provided in addition to the foregoing two adsorbents to also adsorb any carbon tetrafluoride produced as a by-product.
摘要翻译： 一种处理半导体制造废气的方法，用于回收至少六氟乙烷，其中由排气组成的进料流通过选择吸附氧的吸附剂床，以及氮气（如果存在），但不显着吸附六氟乙烷。 结果，从吸附床排出的产物流具有比进料流中更高浓度的六氟乙烷。 在一个实施方案中，仅提供单一吸附剂例如碳分子筛以吸附氧，或者可以使用改性的4A沸石吸附氧和氮。 当氮是潜在的成分时，分别提供碳分子筛和沸石层以分别吸附氧气和氮气。 除了上述两种吸附剂之外，还可以提供第三吸附剂，优选5A沸石，以吸附作为副产物生产的任何四氟化碳。
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公开(公告)号：US06065306A
公开(公告)日：2000-05-23
申请号：US81381
申请日：1998-05-19
CPC分类号： C01C1/024
摘要： Ammonia is purified by a membrane unit to concentrate ammonia and/or ammonia and moisture. Moisture is removed in a temperature-swing adsorption unit. The resultant product of such purification is then partially condensed to remove light components of other impurities and then partially vaporized to produce a pressurized ammonia product lean in heavy components. If the feed stream is processed through the membrane unit first, the permeate stream will be lean in such impurities as carbon dioxide, nitrogen and methane. Moisture and any carbon dioxide not removed in the membrane unit is then removed by the adsorption unit. The resultant stream produced by action of the membrane and adsorption units is then partially condensed to produce a liquid lean in light impurities. Such liquid is then partially vaporized within a product pressure vessel to produce ammonia vapor lean in heavy impurities and at a required operational pressure.
摘要翻译： 氨通过膜单元纯化以浓缩氨和/或氨和水分。 在变温吸附装置中除去水分。 然后将得到的纯化产物部分冷凝以除去其它杂质的轻组分，然后部分蒸发，以产生稀重的组分中的加压氨产物。 如果原料流首先通过膜单元进行处理，则渗透物流将如二氧化碳，氮气和甲烷这样的杂质贫化。 然后通过吸附单元去除膜单元中未除去的水分和任何二氧化碳。 然后通过膜和吸附单元的作用产生的所得料流被部分冷凝以产生轻质杂质的液体贫。 然后将这样的液体在产品压力容器内部分蒸发，以产生贫重的杂质和所需操作压力的氨蒸气。
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公开(公告)号：US06197091B1
公开(公告)日：2001-03-06
申请号：US09263614
申请日：1999-03-05
IPC分类号： B01D5322
CPC分类号： B01D53/228 , B01D53/229 , C01B13/10 , C02F1/78
摘要： An ozone-oxygen gas stream produced by passing oxygen into an ozone generator is introduced into a membrane separation unit containing an ozone-permeable membrane. Ozone-enriched gas passes through the membrane and is recovered or it contacts a liquid or gas stream which contains ozone-reactive substances, thereby oxidizing the substances. The oxygen-enriched gas stream produced on the feed side of the membrane by permeation of ozone through the membrane is recycled to the ozone generator. Prior to being recycled, the oxygen-enriched stream may be purified to remove gaseous impurities which permeate through the membrane from the liquid or gas stream being treated.
摘要翻译： 通过将氧气传递到臭氧发生器中产生的臭氧 - 氧气流被引入到含有臭氧渗透膜的膜分离单元中。 富含臭氧的气体通过膜并被回收或接触含有臭氧反应物质的液体或气体物流，从而氧化物质。 通过臭氧渗透膜在膜的进料侧产生的富氧气流再循环到臭氧发生器中。 在再循环之前，可以纯化富氧物流以除去从被处理的液体或气流中透过膜的气态杂质。
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公开(公告)号：US06190436B1
公开(公告)日：2001-02-20
申请号：US09263615
申请日：1999-03-05
IPC分类号： B01D5322
CPC分类号： B01D53/22 , B01D53/228 , B01D63/02 , B01D63/06 , B01D63/087 , B01D2313/18 , B01D2313/38 , C01B13/10 , C02F1/78
摘要： An ozone-oxygen gas stream is introduced into feed side of a membrane separation unit containing an elastomeric polymer membrane. Ozone-enriched gas passes through the membrane to a permeate zone and is contacted with an ozone-reactive substance-containing gas stream in the permeate zone, thereby oxidizing the substances or is removed from the permeate zone. Removal of the ozone-enriched gas from the permeate zone may be effected by purging the permeate zone with an inert gas and/or evacuating the permeate zone. Ozone-enriched gas removed from the permeate zone may be mixed with a liquid or gas stream which contains ozone-reactive substances in, for example, a venturi device, thereby oxidizing the substances.
摘要翻译： 将臭氧 - 氧气流引入含有弹性聚合物膜的膜分离单元的进料侧。 富含臭氧的气体通过膜进入渗透区，并与渗透区中的含臭氧反应性物质的气流接触，从而氧化物质或从渗透区除去。 可以通过用惰性气体清洗渗透区域和/或抽空渗透区域来实现从渗透区域去除富臭氧气体。 从渗透区域除去的富含臭氧的气体可以与在例如文丘里装置中含有臭氧反应性物质的液体或气体流混合，从而氧化物质。
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公开(公告)号：US6125638A
公开(公告)日：2000-10-03
申请号：US138143
申请日：1998-08-21
申请人： Wenchang Ji , Arthur I. Shirley , Roger Meagher
发明人： Wenchang Ji , Arthur I. Shirley , Roger Meagher
IPC分类号： C03B37/12 , B01D53/047 , C03B37/027 , G02B6/00 , F25D13/06 , C03B37/10 , F25B25/00
CPC分类号： C03B37/02718 , B01D2256/10 , B01D2256/16 , B01D2256/18 , B01D2256/22 , B01D2257/102 , B01D2257/104 , B01D2259/40009 , B01D2259/40037 , B01D2259/40064 , B01D2259/404 , B01D53/0462 , B01D53/047
摘要： Hot optical fiber being drawn from a preform is cooled in a helium cooled heat exchanger by a two-stage process. In the first stage, in which the rate of draw of fiber through the heat exchanger is increased to the design draw rate, the rate of flow of helium to the heat exchanger is increased as the rate of draw of fiber is increased. Helium is withdrawn from the heat exchanger by a variable speed blower, and during the first stage the rate of withdrawal of helium from the heat exchanger is controlled primarily by the rate of flow of helium into the heat exchanger, and during the second stage, the rate of flow of helium to the heat exchanger is maintained constant and the rate of withdrawal is determined primarily by the pressure in the heat exchanger.
摘要翻译： 通过两阶段工艺在氦冷却的热交换器中将从预制件中抽出的热光纤冷却。 在通过热交换器的纤维的拉伸速率提高到设计拉伸速率的第一阶段中，随着纤维的拉伸速率的增加，氦流向热交换器的流速增加。 氦气通过变速鼓风机从热交换器中排出，并且在第一阶段期间，氦从热交换器排出的速率主要由氦流入热交换器的速率控制，而在第二阶段期间， 氦气到热交换器的流速保持不变，并且主要由热交换器中的压力确定抽出速率。
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公开(公告)号：US06364932B1
公开(公告)日：2002-04-02
申请号：US09561980
申请日：2000-05-02
IPC分类号： B01D4624
摘要： The present invention provides an improved cold gas-dynamic spraying process utilizing a carrier gas and small-diameter particulates whereby the particulate-laden carrier gas is directed to a ceramic filter unit where the particulates are separated out and the particulate-free carrier gas is analyzed and returned to the spraying process or to other gas purification systems.
摘要翻译： 本发明提供一种利用载气和小直径颗粒的改进的冷气动动态喷涂方法，其中载有颗粒的载气被引导到陶瓷过滤器单元，其中颗粒被分离出并且分析无颗粒载体 并返回喷涂过程或其他气体净化系统。
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公开(公告)号：US20050034479A1
公开(公告)日：2005-02-17
申请号：US10911868
申请日：2004-08-05
申请人： Wenchang Ji , Arthur Shirley , Piotr Sadkowski
发明人： Wenchang Ji , Arthur Shirley , Piotr Sadkowski
IPC分类号： B01D61/36 , B01D53/04 , C01C1/02 , C01C1/10 , C01C1/12 , C10G9/00 , C10G11/00 , C10G15/00 , C10G47/00 , C10G49/22 , F25J1/00 , F25J3/00
CPC分类号： B01D61/362 , B01D61/364 , C01C1/024
摘要： A process for enriching a crude ammonia stream having moisture and/or metal impurities and/or gas impurities therein. The crude ammonia stream is condensed to form a crude liquid ammonia stream. A distillation membrane or pervaporation membrane is contacted with the crude liquid ammonia stream to form an enriched ammonia vapor stream, which is removed as a permeate. When the crude ammonia stream originates from a manufacturing tool, the enriched ammonia vapor stream may be recycled to the manufacturing tool. There is also an apparatus for enriching a crude ammonia stream.
摘要翻译： 一种富含其中具有水分和/或金属杂质和/或气体杂质的粗氨物流的方法。 将粗氨气流冷凝以形成粗液氨流。 蒸馏膜或渗透蒸发膜与粗液氨流接触以形成富集的氨蒸汽流，其被作为渗透物除去。 当粗氨流源自制造工具时，富集的氨蒸汽流可以再循环到制造工具中。 还有一种用于富集粗氨气流的装置。
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公开(公告)号：US6117328A
公开(公告)日：2000-09-12
申请号：US827310
申请日：1997-03-26
申请人： Subhas K. Sikdar , Wenchang Ji , Sun-tak Wang
发明人： Subhas K. Sikdar , Wenchang Ji , Sun-tak Wang
CPC分类号： B01D61/362 , B01D61/00 , B01D69/141 , C02F1/44 , C02F1/448
摘要： Pervaporation membranes are used for removing volatile organic compounds from wastewaters. These pervaporation membranes are prepared by dispersing at least one hydrophobic adsorbent such as activated carbon uniformly into a polymer matrix.
摘要翻译： 渗透蒸发膜用于从废水中去除挥发性有机化合物。 这些渗透蒸发膜通过将至少一种疏水性吸附剂如活性炭均匀地分散在聚合物基质中来制备。
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