公开(公告)号：US20100051501A1

公开(公告)日：2010-03-04

申请号：US12201553

申请日：2008-08-29

申请人： William E. Corbin, JR. ,  Alison K. Easton ,  James E. Fluegel ,  Christopher W. Long ,  James H. Peterman ,  Laura Mauer

发明人： William E. Corbin, JR. ,  Alison K. Easton ,  James E. Fluegel ,  Christopher W. Long ,  James H. Peterman ,  Laura Mauer

IPC分类号： B65D85/00

CPC分类号： H01L21/67393

摘要： A wafer carrying structure is provided that allows more efficient operation of the opening and closing mechanisms. More specifically, the wafer carrier includes pressure relief structures that provide appropriate pressure equalization during the opening and closing operations of the wafer carrier. This allows doors on the wafer to be more easily opened and closed while also providing significant environmental isolation for the wafers during transport operations. Relief structures specifically designed to remain closed except for those brief periods of time where pressure relief is necessary to equalize pressure during opening and closing of the carrier.

摘要翻译： 提供了允许更有效地操作打开和关闭机构的晶片承载结构。 更具体地，晶片载体包括在晶片载体的打开和关闭操作期间提供适当的压力平衡的压力释放结构。 这允许晶片上的门更容易地打开和关闭，同时还在运输操作期间为晶片提供显着的环境隔离。 特别设计为保持关闭的救济结构，除了需要压力释放以在打开和关闭载体的过程中平衡压力的短暂时间内。

公开(公告)号：US08015040B2

公开(公告)日：2011-09-06

申请号：US11668731

申请日：2007-01-30

申请人： Susan M. Cianfrani ,  Christopher W. Long ,  Brad J. Rawlins ,  James Rice ,  Yunsheng Song

发明人： Susan M. Cianfrani ,  Christopher W. Long ,  Brad J. Rawlins ,  James Rice ,  Yunsheng Song

IPC分类号： G06F17/30

CPC分类号： G05B19/41875 ,  G05B2219/32097 ,  G05B2219/32225 ,  G05B2219/45031 ,  G06Q10/063 ,  Y02P90/10 ,  Y02P90/20 ,  Y02P90/22

摘要： Methods, systems, and computer program products for implementing product randomization and analysis in a manufacturing environment are provided. A method includes processing products for a plurality of lots, at process equipment, using a randomization technique for selecting each product in the lots. The method further including generating an operation identification record for each operation in the process recipe that includes mapping, for each operation, a slot identifier associated with a randomly selected product to a process variable identifier, a process tool, and the operation. The method also includes defining slot groupings using slot identifiers for a product carrier and identifying product yield patterns by analyzing historical yields for each of the slot groupings. The method also includes determining the frequency of occurrence of one or more product yield patterns for each operation in the process recipe by analyzing product yields from the operation identification records corresponding to the plurality of lots.

摘要翻译： 提供了在制造环境中实施产品随机化和分析的方法，系统和计算机程序产品。 一种方法包括使用用于选择批次中的每个产品的随机化技术在处理设备处处理多个批次的产品。 所述方法还包括为所述过程配方中的每个操作生成操作识别记录，所述操作识别记录包括对于每个操作，将与随机选择的产品相关联的时隙标识符映射到过程变量标识符，处理工具和操作。 该方法还包括使用产品载体的时隙标识符来定义时隙分组，并通过分析每个时隙分组的历史收益率来识别产品产量模式。 该方法还包括通过从与多个批次相对应的操作识别记录中分析产品产量来确定处理配方中的每个操作的一个或多个产品收益模式的发生频率。

公开(公告)号：US20080183321A1

公开(公告)日：2008-07-31

申请号：US11668731

申请日：2007-01-30

申请人： Susan M. Cianfrani ,  Christopher W. Long ,  Brad J. Rawlins ,  James Rice ,  Yunsheng Song

发明人： Susan M. Cianfrani ,  Christopher W. Long ,  Brad J. Rawlins ,  James Rice ,  Yunsheng Song

IPC分类号： G06F19/00

CPC分类号： G05B19/41875 ,  G05B2219/32097 ,  G05B2219/32225 ,  G05B2219/45031 ,  G06Q10/063 ,  Y02P90/10 ,  Y02P90/20 ,  Y02P90/22

摘要： Methods, systems, and computer program products for implementing product randomization and analysis in a manufacturing environment are provided. A method includes processing products for a plurality of lots, at process equipment, using a randomization technique for selecting each product in the lots. The method further including generating an operation identification record for each operation in the process recipe that includes mapping, for each operation, a slot identifier associated with a randomly selected product to a process variable identifier, a process tool, and the operation. The method also includes defining slot groupings using slot identifiers for a product carrier and identifying product yield patterns by analyzing historical yields for each of the slot groupings. The method also includes determining the frequency of occurrence of one or more product yield patterns for each operation in the process recipe by analyzing product yields from the operation identification records corresponding to the plurality of lots.

摘要翻译： 提供了在制造环境中实施产品随机化和分析的方法，系统和计算机程序产品。 一种方法包括使用用于选择批次中的每个产品的随机化技术在处理设备处处理多个批次的产品。 所述方法还包括为所述过程配方中的每个操作生成操作识别记录，所述操作识别记录包括对于每个操作，将与随机选择的产品相关联的时隙标识符映射到过程变量标识符，处理工具和操作。 该方法还包括使用产品载体的时隙标识符来定义时隙分组，并通过分析每个时隙分组的历史收益率来识别产品产量模式。 该方法还包括通过从与多个批次相对应的操作识别记录中分析产品产量来确定处理配方中的每个操作的一个或多个产品收益模式的发生频率。