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    METHODS, SYSTEMS, AND COMPUTER PROGRAM PRODUCTS FOR PRODUCT RANDOMIZATION AND ANALYSIS IN A MANUFACTURING ENVIRONMENT
    2.
    发明申请
    METHODS, SYSTEMS, AND COMPUTER PROGRAM PRODUCTS FOR PRODUCT RANDOMIZATION AND ANALYSIS IN A MANUFACTURING ENVIRONMENT 有权
    制造环境中产品随机化和分析的方法，系统和计算机程序产品

    公开(公告)号：US20080183321A1

    公开(公告)日：2008-07-31

    申请号：US11668731

    申请日：2007-01-30

    申请人： Susan M. Cianfrani ,  Christopher W. Long ,  Brad J. Rawlins ,  James Rice ,  Yunsheng Song

    发明人： Susan M. Cianfrani ,  Christopher W. Long ,  Brad J. Rawlins ,  James Rice ,  Yunsheng Song

    IPC分类号： G06F19/00

    CPC分类号： G05B19/41875 ,  G05B2219/32097 ,  G05B2219/32225 ,  G05B2219/45031 ,  G06Q10/063 ,  Y02P90/10 ,  Y02P90/20 ,  Y02P90/22

    摘要： Methods, systems, and computer program products for implementing product randomization and analysis in a manufacturing environment are provided. A method includes processing products for a plurality of lots, at process equipment, using a randomization technique for selecting each product in the lots. The method further including generating an operation identification record for each operation in the process recipe that includes mapping, for each operation, a slot identifier associated with a randomly selected product to a process variable identifier, a process tool, and the operation. The method also includes defining slot groupings using slot identifiers for a product carrier and identifying product yield patterns by analyzing historical yields for each of the slot groupings. The method also includes determining the frequency of occurrence of one or more product yield patterns for each operation in the process recipe by analyzing product yields from the operation identification records corresponding to the plurality of lots.

    摘要翻译： 提供了在制造环境中实施产品随机化和分析的方法，系统和计算机程序产品。 一种方法包括使用用于选择批次中的每个产品的随机化技术在处理设备处处理多个批次的产品。 所述方法还包括为所述过程配方中的每个操作生成操作识别记录，所述操作识别记录包括对于每个操作，将与随机选择的产品相关联的时隙标识符映射到过程变量标识符，处理工具和操作。 该方法还包括使用产品载体的时隙标识符来定义时隙分组，并通过分析每个时隙分组的历史收益率来识别产品产量模式。 该方法还包括通过从与多个批次相对应的操作识别记录中分析产品产量来确定处理配方中的每个操作的一个或多个产品收益模式的发生频率。

    Method and system for randomizing wafers in a complex process line
    4.
    发明授权
    Method and system for randomizing wafers in a complex process line 有权
    在复杂工艺线中随机化晶片的方法和系统

    公开(公告)号：US07831324B2

    公开(公告)日：2010-11-09

    申请号：US11746320

    申请日：2007-05-09

    申请人： James Broc Stirton ,  Richard Good

    发明人： James Broc Stirton ,  Richard Good

    IPC分类号： G06F19/00

    CPC分类号： G05B19/41875 ,  G05B2219/32225 ,  G05B2219/45031 ,  Y02P90/22 ,  Y02P90/86

    摘要： By coordinating a process regime of a process module for sample substrates used in a previously performed metrology process, an increased degree of measurement information may be obtained. For this purpose, the coordination may be based on a sampling ruleset related to the process module, wherein the previously selected sample substrates may be appropriately sequenced through the process module to increase the probability for complying with the associated sampling ruleset. Furthermore, the enhanced process coordination may be advantageously combined with randomization steps, thereby providing a “pseudo randomization,” in which sample substrates are intentionally positioned, while the remaining substrates may be randomized for decoupling related process steps.

    摘要翻译： 通过协调先前执行的计量过程中使用的样品基板的处理模块的处理方案，可以获得增加的测量信息。 为此，协调可以基于与过程模块相关的抽样规则集，其中可以通过过程模块适当地排序先前选择的样本衬底，以增加遵守相关抽样规则集的概率。 此外，增强的过程协调可以有利地与随机化步骤组合，从而提供“伪随机化”，其中样本衬底被有意地定位，而剩余的衬底可以被随机化以用于解耦相关的工艺步骤。

    Method and system for managing wafer processing
    5.
    发明授权
    Method and system for managing wafer processing 有权
    晶圆加工管理方法及系统

    公开(公告)号：US07801636B2

    公开(公告)日：2010-09-21

    申请号：US11851008

    申请日：2007-09-06

    申请人： Nam-young Lee ,  Pil-woong Bang ,  Yeong-lyeol Park

    发明人： Nam-young Lee ,  Pil-woong Bang ,  Yeong-lyeol Park

    IPC分类号： G06F19/00

    CPC分类号： G05B19/4184 ,  G05B2219/32225 ,  G05B2219/34048 ,  G05B2219/45031 ,  Y02P90/14 ,  Y02P90/22

    摘要： Disclosed are a method of managing a process and a process managing system in which a failure-generating process step can be quickly detected. The method of managing a process includes sequentially performing first to n-th (n is a natural number) process steps with respect to a plurality of wafers, the order that the plurality of wafers are processed in each of the n process steps are different from one another. Calculating characteristic parameter values for the plurality of wafers, calculating first to n-th relations that indicate relationships between the first to n-th process orders and the characteristic parameter values, performing a Fourier transform on the first to n-th relations so as to calculate first to n-th conversion relations, and determining the existence of patterns among the first to n-th relations using the first to n-th conversion relations.

    摘要翻译： 公开了一种管理过程和方法管理系统的方法，其中可以快速检测故障生成处理步骤。 管理处理的方法包括相对于多个晶片顺序地执行第一至第n（n是自然数）处理步骤，在n个处理步骤中的每一个处理多个晶片的顺序不同于 另一个。 计算多个晶片的特性参数值，计算表示第一至第n处理阶数之间的关系的特征参数值的第一至第n关系，对第一至第n关系进行傅里叶变换，以便 计算第一至第n转换关系，并且使用第一至第n转换关系确定第一至第n关系中的模式的存在。

    Methods, systems, and computer program products for product randomization and analysis in a manufacturing environment
    9.
    发明授权
    Methods, systems, and computer program products for product randomization and analysis in a manufacturing environment 有权
    用于制造环境中产品随机化和分析的方法，系统和计算机程序产品

    公开(公告)号：US08015040B2

    公开(公告)日：2011-09-06

    申请号：US11668731

    申请日：2007-01-30

    申请人： Susan M. Cianfrani ,  Christopher W. Long ,  Brad J. Rawlins ,  James Rice ,  Yunsheng Song

    发明人： Susan M. Cianfrani ,  Christopher W. Long ,  Brad J. Rawlins ,  James Rice ,  Yunsheng Song

    IPC分类号： G06F17/30

    CPC分类号： G05B19/41875 ,  G05B2219/32097 ,  G05B2219/32225 ,  G05B2219/45031 ,  G06Q10/063 ,  Y02P90/10 ,  Y02P90/20 ,  Y02P90/22

    摘要： Methods, systems, and computer program products for implementing product randomization and analysis in a manufacturing environment are provided. A method includes processing products for a plurality of lots, at process equipment, using a randomization technique for selecting each product in the lots. The method further including generating an operation identification record for each operation in the process recipe that includes mapping, for each operation, a slot identifier associated with a randomly selected product to a process variable identifier, a process tool, and the operation. The method also includes defining slot groupings using slot identifiers for a product carrier and identifying product yield patterns by analyzing historical yields for each of the slot groupings. The method also includes determining the frequency of occurrence of one or more product yield patterns for each operation in the process recipe by analyzing product yields from the operation identification records corresponding to the plurality of lots.

    摘要翻译： 提供了在制造环境中实施产品随机化和分析的方法，系统和计算机程序产品。 一种方法包括使用用于选择批次中的每个产品的随机化技术在处理设备处处理多个批次的产品。 所述方法还包括为所述过程配方中的每个操作生成操作识别记录，所述操作识别记录包括对于每个操作，将与随机选择的产品相关联的时隙标识符映射到过程变量标识符，处理工具和操作。 该方法还包括使用产品载体的时隙标识符来定义时隙分组，并通过分析每个时隙分组的历史收益率来识别产品产量模式。 该方法还包括通过从与多个批次相对应的操作识别记录中分析产品产量来确定处理配方中的每个操作的一个或多个产品收益模式的发生频率。

    METHOD AND SYSTEM FOR RANDOMIZING WAFERS IN A COMPLEX PROCESS LINE
    10.
    发明申请
    METHOD AND SYSTEM FOR RANDOMIZING WAFERS IN A COMPLEX PROCESS LINE 有权
    用于在复杂工艺线中对波浪进行随机化的方法和系统

    公开(公告)号：US20080103618A1

    公开(公告)日：2008-05-01

    申请号：US11746320

    申请日：2007-05-09

    申请人： James Broc Stirton ,  Richard Good

    发明人： James Broc Stirton ,  Richard Good

    IPC分类号： G06F19/00

    CPC分类号： G05B19/41875 ,  G05B2219/32225 ,  G05B2219/45031 ,  Y02P90/22 ,  Y02P90/86

    摘要： By coordinating a process regime of a process module for sample substrates used in a previously performed metrology process, an increased degree of measurement information may be obtained. For this purpose, the coordination may be based on a sampling ruleset related to the process module, wherein the previously selected sample substrates may be appropriately sequenced through the process module to increase the probability for complying with the associated sampling ruleset. Furthermore, the enhanced process coordination may be advantageously combined with randomization steps, thereby providing a “pseudo randomization,” in which sample substrates are intentionally positioned, while the remaining substrates may be randomized for decoupling related process steps.

    摘要翻译： 通过协调先前执行的计量过程中使用的样品基板的处理模块的处理方案，可以获得增加的测量信息。 为此，协调可以基于与过程模块相关的抽样规则集，其中可以通过过程模块适当地排序先前选择的样本衬底，以增加遵守相关抽样规则集的概率。 此外，增强的过程协调可以有利地与随机化步骤组合，从而提供“伪随机化”，其中样本衬底被有意地定位，而剩余的衬底可以被随机化以用于解耦相关的工艺步骤。