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公开(公告)号：US06216873B1
公开(公告)日：2001-04-17
申请号：US09272132
申请日：1999-03-19
IPC分类号： B65D8590
CPC分类号： G03F1/66 , G03F7/70541 , G03F7/70741
摘要： A reticle support mechanism is disclosed in which a reticle may be quickly and easily located and removed, and which is capable of securely supporting a reticle for storage and/or transport. A preferred embodiment of the present invention includes a pair of reticle supports mounted to a door of a container, and a pair of reticle retainers mounted to a shell of the container. When the container shell is coupled with the container door, sections of the reticle support and reticle retainer engage chamfered edges of the reticle and sandwich the reticle in a secure position within the container. As a result of engaging the reticle at its chamfered edges, potentially harmful contact with the upper and lower surfaces and vertical edges of the reticle is avoided.
摘要翻译： 公开了一种掩模版支撑机构，其中光罩可以快速且容易地定位和移除，并且其能够可靠地支撑用于存储和/或运输的掩模版。 本发明的优选实施例包括安装到容器的门上的一对掩模版支架和安装到容器壳体上的一对掩模版保持器。 当容器壳与容器门联接时，标线架支架和标线保持器的部分接合掩模版的倒角边缘并将掩模版夹在容器内的安全位置。 由于将掩模版接合在其倒角边缘处，避免了与掩模版的上表面和下表面以及垂直边缘的潜在的有害接触。
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公开(公告)号：US06261044B1
公开(公告)日：2001-07-17
申请号：US09130254
申请日：1998-08-06
IPC分类号： B65G4907
CPC分类号： H01L21/67772 , Y10S414/139 , Y10S414/14
摘要： A system is disclosed for retaining a pod door on a port door at a load port, and for removing contaminants, particulates and/or gasses from between the pod and port door surfaces and from within the interior of the pod door. According to a preferred embodiment of the present invention, a vacuum source may be provided within, adjacent to, or remote from a process tool, which vacuum source is connected to a vacuum port in the front surface of a port door. The vacuum is provided to produce a negative pressure between juxtaposed surfaces of the port and pod doors. The negative pressure accomplishes two functions. First, the negative pressure serves to hold the pod door firmly against the port door to prevent vibration, tilting and/or movement of the pod door with respect to the port door while the pod and port doors are stowed within the process tool. Second, the negative pressure serves to remove particulates, contaminants and/or gasses from between the pod and port doors and from within the interior volume of the pod door.
摘要翻译： 公开了一种系统，用于将荚门保持在装载端口的端口门上，并且用于从荚果舱和门口表面之间以及从荚果门的内部除去污染物，微粒和/或气体。 根据本发明的优选实施例，真空源可以设置在处理工具内，邻近或远离处理工具，该真空源连接到端口门的前表面中的真空端口。 提供真空以在端口和荚门的并置表面之间产生负压。 负压完成两项功能。 首先，负压用于将荚门牢固地保持在端口门上，以防止荚门相对于端口门的振动，倾斜和/或移动，同时荚和端口门被收纳在处理工具内。 第二，负压用于从荚果和舷门之间以及荚果门的内部容积内除去微粒，污染物和/或气体。
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公开(公告)号：US6056026A
公开(公告)日：2000-05-02
申请号：US204320
申请日：1998-12-02
IPC分类号： B65G49/00 , F16K51/02 , H01L21/677 , B65B1/04
CPC分类号： H01L21/67393 , F16K51/02
摘要： A valve seated within a SMIF pod support platform is disclosed for activating and deactivating the flow of gas to a pod on the platform. In preferred embodiments, the valve includes a central poppet capable of moving between a first, closed position where the poppet blocks the flow of gas through the valve, and a second, open position where the poppet allows gas flow through the valve. In the absence of a pod on the support platform, pressurized gas from the gas source downstream of the valve biases the poppet into the first position to thereby block gas flow. In this first position, a top portion of the poppet extends slightly above the upper surface of the pod support platform. When a pod is seated on the support platform, the weight of the pod moves the poppet from its first position to its second position where gas is allowed to flow through the valve and into the pod to allow purging of the pod.
摘要翻译： 公开了一种坐在SMIF荚支架平台内的阀门，用于启动和停用气体流到平台上的吊舱。 在优选实施例中，阀包括能够在提升阀阻挡通过阀的气体流动的第一关闭位置与提升阀允许气体流过阀的第二打开位置之间移动的中心提升阀。 在支撑平台上没有荚的情况下，来自阀门下游气体源的加压气体将提升阀偏压到第一位置，从而阻止气体流动。 在该第一位置，提升阀的顶部稍微延伸到荚式支架平台的上表面之上。 当荚座位于支撑平台上时，荚的重量将提升阀从其第一位置移动到其第二位置，在该位置允许气体流过阀并进入荚，以允许荚的吹扫。
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公开(公告)号：US06612797B1
公开(公告)日：2003-09-02
申请号：US09313945
申请日：1999-05-18
IPC分类号： B65G4907
CPC分类号： G03F7/70541 , G03F7/70741 , G03F7/7075 , H01L21/67769 , H01L21/67772 , H01L21/67775 , Y10S414/14
摘要： A SMIF interface is disclosed for buffering one or more cassettes within a minienvironment affixed to a process tool. The interface includes a load port formed of a port door and a port plate circumjacent thereabout, and a minienvironment mounted to port plate. The SMIF interface and/or process tool includes at least one shelf for storing a cassette after the load port separates the cassette from its transport pod. In operation, while a first cassette is located within the process tool, a second pod is seated on the load port, the cassette is separated from the pod and the cassette is stored on a storage shelf. When processing on the first cassette is completed, the second cassette is loaded into the processing tool. The first cassette is returned to the pod and removed from the load port. A cassette from a new pod is then seated on the load port, separated from its pod and stored on the storage shelf. This process continues until processing on each scheduled wafer lot is completed. By providing a buffer of cassettes within the minienvironment of the SMIF interface, the processing tool is no longer dependent on timely delivery of pods to the interface to ensure that the process tool does not sit idle.
摘要翻译： 公开了一种SMIF接口，用于在附加到处理工具的微小环境内缓冲一个或多个盒。 该接口包括由端口门和其周围的端口板形成的负载端口，以及安装到端口板的小型环境。 SMIF接口和/或处理工具包括至少一个搁架，用于在装载端口将盒与其传送盒分离之后存储盒。 在操作中，当第一盒位于处理工具内时，第二盒位于装载端口上，盒与盒分离，盒被存储在存放架上。 当在第一盒上的处理完成时，第二盒装载到处理工具中。 第一个盒子返回到盒子并从装载端口移除。 然后将来自新容器的盒子放置在装载端口上，与其容器分离并存储在存储架上。 这个过程一直持续到每个预定的晶圆批次的处理完成。 通过在SMIF界面的微型环境中提供盒式磁带缓冲区，处理工具不再依赖于将端口及时传送到界面，以确保处理工具不会闲置。
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公开(公告)号：US06364595B1
公开(公告)日：2002-04-02
申请号：US09247695
申请日：1999-02-10
IPC分类号： B65B6900
CPC分类号： G03F7/70741 , H01L21/67778 , H01L21/68707 , Y10S414/137 , Y10S414/141
摘要： A reticle transfer system is disclosed for transferring reticles between a reticle-carrying SMIF container and a process tool. The reticle transfer system according to the present invention includes an arm assembly having a transfer arm and a gripping mechanism affixed to the end of the transfer arm. Once the container carrying the reticle has been opened, the gripping mechanism is rotated and translated to a position adjacent the reticle so that it may access the reticle and transfer it into the minienvironment through an access port in the minienvironment. In order to precisely, easily and repeatedly position the gripping mechanism in the desired location to grip and transfer the reticle, the gripping mechanism includes four downwardly extending posts spaced apart from each other so as to contact an outer rim of the container door as the gripping mechanism is lowered into position to grip and transfer the reticle. Once the four posts are seated in contact with the outer rim of the container door, the gripping mechanism is fixed in the proper position so that a pair of grippers within the gripping mechanism may rotate inward and grip the reticle. The posts also allow proper positioning of the gripping mechanism with respect to the container door and support platform within the minienvironment when returning the reticle to the container door or depositing the reticle on the minienvironment support platform.
摘要翻译： 公开了一种用于在标线片承载的SMIF容器和加工工具之间传送掩模版的掩模版传送系统。 根据本发明的掩模版传送系统包括具有传送臂和固定到传送臂的端部的夹持机构的臂组件。 一旦携带标线的容器已经打开，夹持机构就被旋转并转移到与掩模版相邻的位置，使得它可以进入掩模版并通过微型环境中的进入口将其传送到环境中。 为了精确地，容易地和重复地将夹持机构定位在期望的位置以夹持和传送掩模版，夹持机构包括彼此间隔开的四个向下延伸的柱，以便与容器门的外边缘接触，作为抓握 机构被降低到抓地力并传递标线的位置。 一旦四个柱子与容器门的外缘接触就位，夹持机构被固定在适当的位置，使得夹持机构内的一对夹具可以向内旋转并夹紧掩模版。 当将掩模版返回到容器门或将掩模版放置在微型环境支撑平台上时，柱还允许抓握机构相对于容器门和支撑平台在微型环境中的适当定位。
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公开(公告)号：US6164664A
公开(公告)日：2000-12-26
申请号：US49330
申请日：1998-03-27
CPC分类号： F16J15/025
摘要： An interface seal between a gas flow line within a support surface for a pod and a flow valve mounted within the pod. The kinematic coupling between a pod and support surface aligns a pair of inlet and outlet valves on a bottom surface of the pod with a corresponding pair of inlet and outlet holes in the support surface, through which gas may be injected into and removed from the pod, respectively. The interface according to the various embodiments of the invention provides a durable seal substantially preventing leakage between the pod and support surface while at the same time being compatible with kinematic couplings. In embodiments of the invention, the seal is thin and flexible, and expands into engagement with the pod to establish the seal. This type of interface seal will not interfere with the proper seating of the pod on the kinematic pins. Moreover, in a relaxed state, embodiments of the interface seal extend only a small distance above the support surface, and have no edges that are capable of catching on the pod as the pod is loaded or removed at low angles.
摘要翻译： 在用于荚的支撑表面内的气体流动线和安装在荚内的流动阀之间的界面密封。 荚和支撑表面之间的运动学耦合使一对入口和出口阀在荚的底部表面上与支撑表面中的相应的一对入口孔和出口孔对准，气体可通过该入口和出口孔被注入并从容器中移出 ， 分别。 根据本发明的各种实施例的界面提供了一种耐用的密封件，其基本上防止了荚和支撑表面之间的泄漏，同时与运动耦合兼容。 在本发明的实施例中，密封件是薄且柔性的并且膨胀成与荚接合以建立密封。 这种类型的接口密封不会妨碍运动销上荚的正确安装。 此外，在松弛状态下，接口密封件的实施例在支撑表面上方仅延伸一小段距离，并且当荚状物以低角度被装载或移除时，没有能够在荚上捕获的边缘。
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公开(公告)号：US06520727B1
公开(公告)日：2003-02-18
申请号：US09547829
申请日：2000-04-12
IPC分类号： B65G4907
CPC分类号： H01L21/67271 , H01L21/67775 , H01L21/67778 , Y10S414/139
摘要： A modular sorter is disclosed in which modular sections maybe easily added and removed to add and remove load port assemblies as required by a particular wafer fabrication run. In one embodiment, a modular sorter according to the present invention include a two-wide modular section defining a minienvironment for the sorter, a wafer handling robot a pair of aligners and a centralized controller. The modular section of this embodiment includes a pair of side-by-side load port assemblies for receiving a container or open cassette and presenting the cassette to the minienvironment of the sorter for processing of the wafers therein. The present invention further includes a removable end panel. When it is desired to add additional modular sections to the sorter, the end panel is removed and replaced by a connector frame. The connector frame allows additional modular sections, including either one load port assembly or two load port assemblies, to be attached to the original modular section. All of the power and control components for the modular sections are preferably located in the centralized controller. Upon attachment of the additional modular section, the power and signal connections for the additional section are plugged into the controller. The controller then recognizes the additional section and changes the overall operation scheme to now operate as a three-wide sorter or a four-wide sorter.
摘要翻译： 公开了一种模块化分选机，其中可以容易地添加和移除模块化部分，以根据特定的晶片制造运行的要求添加和移除负载端口组件。 在一个实施例中，根据本发明的模块化分拣机包括限定分拣机的微型环境的双宽模块部分，晶片处理机器人，一对对准器和集中式控制器。 该实施例的模块化部分包括一对并排负载端口组件，用于接收容器或打开的盒，并将盒呈现到分类器的最小环境中，用于处理其中的晶片。 本发明还包括可移除端板。 当需要向分拣机添加额外的模块化部分时，端面板被移除并由连接器框架代替。 连接器框架允许附加模块化部分，包括一个装载端口组件或两个装载端口组件，以连接到原始模块化部分。 模块化部件的所有功率和控制部件优选地位于集中式控制器中。 在附加模块化部分的附件中，附加部分的电源和信号连接插入控制器。 然后，控制器识别附加部分，并将整体操作方案改变为现在作为三宽分选机或四宽分选机运行。
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公开(公告)号：US5653565A
公开(公告)日：1997-08-05
申请号：US498455
申请日：1995-07-05
IPC分类号： H01L21/677 , B65B69/00
CPC分类号： H01L21/67772 , Y10S414/14
摘要： An adaptor plate for allowing 200 mm SMIF pods carrying one or more semiconductor wafers to be used on an access port of a wafer processing station configured to accept a 300 mm SMIF pod. The adaptor plate has a substantially circular outer circumference conforming substantially in size and shape to the outer circumference of a conventional 300 mm SMIF pod, and a central opening conforming substantially in size and shape to a conventional rectangular 200 mm SMIF pod. The one or more semiconductor wafers are supported on pod door of the pod, and the semiconductor wafers and pod door are lowered through the central opening in the adaptor plate into the wafer processing station. With the adaptor plate supported on the access port, and a cover of the 200 mm SMIF pod supported around the central opening, the access port is entirely covered and entry of contaminants into the processing station through the access port is prevented.
摘要翻译： 用于允许携带一个或多个半导体晶片的200mm SMIF盒的适配器板被用于被配置为接受300mm SMIF盒的晶片处理站的访问端口。 适配器板具有基本上圆形的外圆周，其尺寸和形状基本上与传统的300mm SMIF荚的外圆周相符合，并且基本上具有尺寸和形状的中心开口，与传统的矩形200mm SMIF荚一致。 一个或多个半导体晶片被支撑在容器的荚门上，并且半导体晶片和荚门通过适配器板中的中心开口下降到晶片处理台中。 在适配板支撑在进出口上，并且200 mm SMIF吊舱的盖子围绕中央开口支撑，进入口完全被覆盖，并且防止污染物通过入口进入加工站。
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公开(公告)号：US06398032B2
公开(公告)日：2002-06-04
申请号：US09073101
申请日：1998-05-05
IPC分类号： B65D8530
CPC分类号： G03F7/7075 , H01L21/67379 , H01L21/67383 , H01L21/67386
摘要： A SMIF pod capable of supporting a cassette at points in the pod located directly over or near a kinematic coupling between the pod and a surface on which the pod is supported. Even if the pod shell warps or otherwise deforms, the three points of contact between the pod and the support surface at the kinematic couplings will always remain at a fixed, controllable and repeatable position. The present invention makes use of this fact by supporting the cassette at or near the three kinematic coupling points. Moreover, the support structure is not affixed to the top or sides of the pod shell. Thus, the position of the cassette, and wafers supported therein, will similarly remain at a fixed, controllable and repeatable position, substantially unaffected by any pod shell deformation which may occur.
摘要翻译： SMIF荚能够在荚果中的点处直接位于或接近荚果与支持荚的表面之间的运动耦合处支撑盒子。 即使荚壳翘曲或其他变形，在运动耦合时，荚和支撑表面之间的三个接触点将始终保持固定，可控和可重复的位置。 本发明通过在三个运动耦合点处或附近支撑盒来利用这一事实。 此外，支撑结构没有固定到荚壳的顶部或侧面。 因此，盒和其中支撑的晶片的位置将类似地保持在固定的，可控制和可重复的位置，基本上不受可能发生的任何荚壳变形的影响。
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公开(公告)号：US5980183A
公开(公告)日：1999-11-09
申请号：US843245
申请日：1997-04-14
申请人： William J. Fosnight
发明人： William J. Fosnight
IPC分类号： B65G1/00 , B65G49/07 , H01L21/00 , H01L21/677
CPC分类号： H01L21/67769 , H01L21/67727 , H01L21/67733 , H01L21/67736 , Y10S414/14
摘要： An integrated intrabay buffer, delivery, and stocker system including a pair of shuttles, capable, by themselves, of transferring a pod in an X-Z plane between the interbay transport system, the I/O ports of various process tools and a plurality of storage shelves provided along the wall of the tool bay. Advantageously, the present invention integrates together the process tools within a tool bay by providing a single transport mechanism shared by each tool, and by providing a single, large storage and buffer area for pods that is shared by each tool. This increases reliability and flexibility, and simplifies the hardware and software control. Additionally, the storage shelves may be provided above some or all of the process tools within the tool bay. Such an arrangement offers a substantially greater number of spaces to store a pod as compared to conventional tool bays. Moreover, as the space above processing tools is currently unused, in part because a clear, unobstructed path above the I/O ports of the processing tools must be available in conventional systems, the increased storage capacity according to the present invention may be provided without increasing the footprint of conventional tool bays.
摘要翻译： 一种集成的内部缓冲器，输送和储料器系统，包括一对梭子，它们本身能够在间隔运输系统，各种加工工具的I / O端口和多个储存架之间的XZ平面中传送荚 沿着工具托架的墙壁提供。 有利地，本发明通过提供由每个工具共享的单个传送机构以及通过为每个工具共享的荚提供单一的大型存储和缓冲区域来将工具箱内的处理工具集成在一起。 这增加了可靠性和灵活性，并简化了硬件和软件控制。 此外，可以在工具托架内部的一些或全部加工工具上提供储存架。 与常规工具架相比，这种布置提供了大量存储容器的空间。 此外，由于当前未使用处理工具的空间，部分原因在于在常规系统中必须能够获得处理工具的I / O端口之上的清晰，无阻碍的路径，所以根据本发明的增加的存储容量可以在没有 增加常规工具托架的占地面积。
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