公开(公告)号：US07440113B2

公开(公告)日：2008-10-21

申请号：US11316855

申请日：2005-12-23

申请人： William R Trutna, Jr. ,  Geraint Owen ,  Alan B Ray ,  James Prince ,  Eric Stephen Johnstone ,  Miao Zhu ,  Leonard S Cutler

发明人： William R Trutna, Jr. ,  Geraint Owen ,  Alan B Ray ,  James Prince ,  Eric Stephen Johnstone ,  Miao Zhu ,  Leonard S Cutler

IPC分类号： G01D5/36 ,  G01N11/02

CPC分类号： G01D5/266 ,  G01D5/38

摘要： An apparatus and method for measuring displacement includes a light beam directed to an interferometer core that splits the light beam into first and second component beams. The first component beam is directed to a diffraction grating at approximately a Littrow angle. A diffraction is received by the interferometer core and is combined with the second component beam. The combination of the first and second component beams is measured to determine displacement of the diffraction grating.

摘要翻译： 用于测量位移的装置和方法包括指向干涉仪芯的光束，其将光束分成第一和第二分量光束。 第一分量光束以大约Littrow角度被引导到衍射光栅。 衍射由干涉仪芯接收并与第二分量光束组合。 测量第一和第二分量光束的组合以确定衍射光栅的位移。

公开(公告)号：US07705994B2

公开(公告)日：2010-04-27

申请号：US11286817

申请日：2005-11-23

申请人： Alan B Ray

发明人： Alan B Ray

IPC分类号： G01B9/02

CPC分类号： G01B9/02067 ,  G01B9/02007 ,  G01B9/02051 ,  G01B2290/70

摘要： An interferometer and corresponding system are provided having several aspects. In a first aspect, there is provided an interferometer adapted to receive separate first and second beams f1 and f2 therein, the interferometer comprising substantially equivalent and separate first and second optical pathways for the first and second beams f1 and f2. In a second aspect, there is provided an interferometer adapted to receive as separate inputs therein first and second beams f1 and f2, where such beams are not mixed or combined until just prior to being output by the interferometer. In a third aspect, an interferometer is provided having one or more beam blockers for intercepting extraneous or undesired light, and keeping such light from contaminating or interfering with separate beams f1 and f2.

摘要翻译： 提供了具有几个方面的干涉仪和相应的系统。 在第一方面，提供了一种适于在其中接收单独的第一和第二光束f1和f2的干涉仪，所述干涉仪包括用于第一和第二光束f1和f2的基本相同且分离的第一和第二光学路径。 在第二方面，提供了一种适于在第一和第二光束f1和f2内作为单独输入接收的干涉仪，其中这些光束不被混合或组合直到刚好在由干涉仪输出之前。 在第三方面，提供一种具有一个或多个光束阻挡器的干涉仪，用于拦截外来或不期望的光，并且保持这种光不受污染或干扰分离的光束f1和f2。