公开(公告)号：US11839075B2

公开(公告)日：2023-12-05

申请号：US17685786

申请日：2022-03-03

Applicant: Winbond Electronics Corp.

Inventor： Chih-Jung Ni ,  Chuan-Chi Chou ,  Yao-Ting Tsai

IPC: H10B41/30 ,  G11C5/06 ,  H10B41/40

CPC classification number: H10B41/30 ,  G11C5/063 ,  H10B41/40

Abstract: A semiconductor structure is provided. The semiconductor structure includes a substrate, a gate structure, and a first spacer. The gate structure includes a floating gate structure disposed on the substrate, an inter-gate dielectric layer disposed on the floating gate structure, and a control gate structure disposed on the inter-gate dielectric layer. The control gate structure includes an electrode layer disposed on the inter-gate dielectric layer, a contact layer disposed on the electrode layer, and a cap layer disposed on the contact layer. The first spacer is disposed on a sidewall of the control gate structure and covering the electrode, the contact layer and the cap layer. A bottom surface of the first spacer is positioned between a bottom surface and a top surface of the electrode layer.

公开(公告)号：US11302705B2

公开(公告)日：2022-04-12

申请号：US16555736

申请日：2019-08-29

Applicant: Winbond Electronics Corp.

Inventor： Chih-Jung Ni ,  Chuan-Chi Chou ,  Yao-Ting Tsai

IPC: H01L27/11521 ,  H01L27/11526 ,  G11C5/06

Abstract: The present invention includes a semiconductor structure having a substrate, a gate structure, and a first spacer. The gate structure includes a floating gate structure, an inter-gate dielectric layer, and a control gate structure. The floating gate structure is disposed on the substrate. The inter-gate dielectric layer is disposed on the floating gate structure. The control gate structure is deposited on the inter-gate dielectric layer and includes an electrode layer, a contact layer and a cap layer. The electrode layer is disposed on the inter-gate dielectric layer. The contact layer is disposed on the electrode layer. The cap layer is disposed on the contact layer. The first spacer is disposed on sidewalls of the control gate structure and covers the electrode layer, the contact layer, and the cap layer. Furthermore, the bottom surface of the first spacer is disposed between the bottom surface and the top surface of the electrode layer.