公开(公告)号：US07230726B2

公开(公告)日：2007-06-12

申请号：US10821518

申请日：2004-04-09

申请人： Wolfgang Holzapfel ,  Elmar Mayer ,  Ulrich Benner

发明人： Wolfgang Holzapfel ,  Elmar Mayer ,  Ulrich Benner

IPC分类号： G01B11/14

CPC分类号： G01D5/34715

摘要： A scanning unit for a position measuring instrument for optical scanning of a measuring graduation. The scanning unit includes a light source that emits light in a direction towards a measuring graduation that generates modified light from the emitted light. A detector that receives the modified light. A lens array, disposed upstream of the detector and including a plurality of optical lenses, that generates a defined image of a region of the measuring graduation, scanned by the emitted light, on the detector, wherein an image magnification of the lens array is greater than 0 and less than or equal to 2.

摘要翻译： 用于测量刻度的光学扫描的位置测量仪的扫描单元。 扫描单元包括在朝向从发射光产生修正光的测量刻度的方向上发光的光源。 接收修改光的检测器。 一种透镜阵列，设置在检测器的上游并且包括多个光学透镜，其在检测器上产生由发射光扫描的测量刻度的区域的限定图像，其中透镜阵列的图像放大率更大 大于0且小于等于2。

公开(公告)号：US07164482B2

公开(公告)日：2007-01-16

申请号：US10840812

申请日：2004-05-07

申请人： Ulrich Benner ,  Elmar Mayer ,  Wolfgang Holzapfel

发明人： Ulrich Benner ,  Elmar Mayer ,  Wolfgang Holzapfel

IPC分类号： G01B11/14

CPC分类号： G01D5/34715

摘要： A position measuring system that includes a scale having a measuring graduation extending along a first line and a scanning device. The scanning device includes a light source that transmits light beams that scan the measuring graduation, wherein the measuring graduation generates modified light from the transmitted light beams and a detector unit that receives the modified light from the measuring graduation. A lens arrangement, arranged between the scale and the detector unit, the lens arrangement generating a defined image of the measuring graduation on the, detector unit, wherein the defined image extends along a second line, whose curvature is different from a curvature of the first line.

摘要翻译： 一种位置测量系统，包括具有沿着第一线延伸的测量刻度的刻度和扫描装置。 扫描装置包括透射扫描测量刻度的光束的光源，其中测量刻度产生来自透射光束的修正光，以及从测量刻度接收修改光的检测器单元。 布置在刻度尺和检测器单元之间的透镜布置，透镜装置在检测器单元上产生测量刻度的定义图像，其中限定的图像沿着第二线延伸，其第二线的曲率不同于第一 线。

公开(公告)号：US06603114B1

公开(公告)日：2003-08-05

申请号：US09471454

申请日：1999-12-23

申请人： Wolfgang Holzapfel ,  Elmar Mayer

发明人： Wolfgang Holzapfel ,  Elmar Mayer

IPC分类号： G01D534

CPC分类号： G01D5/34715 ,  H01L2224/48091 ,  H01L2924/00014

摘要： A scanning head is described, having on a side facing a scale at least one patterned photodetector, which is realized in a semiconductor substrate. The semiconductor substrate has an anisotropic blind hole that is symmetrical to the several photodetectors, and a light source arranged on a base plate in the blind hole. The transmitting grating for the light source is formed either in a metallization layer on the semiconductor substrate or, in the form of bars of the semiconductor substrate that have not been etched away. The distance between the scale and the transmitting grating as well as the distances between the scale and the patterned photodetector are essentially the same.

摘要翻译： 描述了一种在半导体衬底中实现的具有至少一个图案化光电检测器的刻度的一侧的扫描头。 半导体衬底具有与几个光电检测器对称的各向异性盲孔，以及布置在盲孔中的基板上的光源。 用于光源的发射光栅形成在半导体衬底上的金属化层中，或者形成为未蚀刻掉的半导体衬底的棒状。 刻度尺和发射光栅之间的距离以及刻度尺和图案光电检测器之间的距离基本相同。

公开(公告)号：US06198534B1

公开(公告)日：2001-03-06

申请号：US09130702

申请日：1998-08-07

申请人： Volker Höfer ,  Wolfgang Holzapfel ,  Walter Huber ,  Elmar Mayer

发明人： Volker Höfer ,  Wolfgang Holzapfel ,  Walter Huber ,  Elmar Mayer

IPC分类号： G01N1100

CPC分类号： G01D5/366 ,  G01D5/2457

摘要： A scanning unit for an optical position measuring system is disclosed which, besides periodic incremental signals, also provides at least one reference pulse signal at a defined reference position of a scale and a scanning unit which is movable relative to it. For scanning a reference mark on the scale, the scanning unit comprises a scanning plate with at least one reference mark scanning field and/or at least one reference pulse detector element. A filtering effect results either from the design of the reference mark scanning field or by the design of one or several reference mark detector elements in such a way that the periodic incremental signal portion of the reference pulse signal next to the reference position can be eliminated to a great extent.

摘要翻译： 公开了一种用于光学位置测量系统的扫描单元，除了周期性增量信号之外，还提供了在刻度的限定的参考位置处的至少一个参考脉冲信号和可相对于其移动的扫描单元。 为了扫描标尺上的参考标记，扫描单元包括具有至少一个参考标记扫描场的扫描板和/或至少一个参考脉冲检测器元件。 滤波效果可以从参考标记扫描场的设计或一个或几个参考标记检测器元件的设计得到，使得可以消除与参考位置相邻的参考脉冲信号的周期性增量信号部分到 在很大程度上

公开(公告)号：US06794637B1

公开(公告)日：2004-09-21

申请号：US09937757

申请日：2002-01-25

申请人： Wolfgang Holzapfel ,  Elmar Mayer

发明人： Wolfgang Holzapfel ,  Elmar Mayer

IPC分类号： G01D534

CPC分类号： G01D5/38 ,  G01D5/34715

摘要： An optical position measuring device that includes a measuring graduation and a scanning unit, which moves relative to the measuring graduation along a measuring direction. The scanning unit includes a light source, a transmitting graduation with a graduation period PAT, on which a periodic strip pattern with a strip pattern period PSM results in case of a relative movement between the scanning unit and the measuring graduation. A detector arrangement arranged at a distance DDET from the scanning graduation with a plurality of blocks of individual detector elements, wherein the plurality of blocks are arranged periodically with a detector period PDET in the measuring direction. The transmitting graduation is at the distance u from the measuring graduation, the scanning graduation is at a distance v from the measuring graduation, and the detector period PDET has been selected in accordance with the equation PDET=m*1*Pv, wherein m=(1+DDET/(u+v+DLQ)) and 1=1, 2, 3, . . . and 1/Pv=|1/PSM−1/PAT|.

摘要翻译： 一种光学位置测量装置，包括测量刻度和扫描单元，其沿着测量方向相对于测量刻度移动。 扫描单元包括光源，具有刻度周期PAT的发射刻度，其上具有带状图案周期PSM的周期条带图案导致扫描单元和测量刻度之间的相对运动的情况。 一种检测器装置，其布置有与扫描刻度距离为DDET的多个单独的检测器元件块，其中多个块周期性地布置有在测量方向上的检测器周期PDET。 发射刻度与测量刻度的距离为u，扫描刻度与测量刻度处于距离v，检测器周期PDET根据其中的方程选择，

公开(公告)号：US06519044B1

公开(公告)日：2003-02-11

申请号：US09251066

申请日：1999-02-18

申请人： Wolfgang Holzapfel ,  Elmar Mayer ,  Siegfried Reichhuber

发明人： Wolfgang Holzapfel ,  Elmar Mayer ,  Siegfried Reichhuber

IPC分类号： G01B1114

CPC分类号： G01D5/34715 ,  H01L2224/48091 ,  H01L2924/00014

摘要： A scanning unit for an optical position measuring device, which is suited for optically scanning a scale graduation, to produce positionally dependent scanning signals on the basis of scale graduation. The scanning unit includes a carrier element, at least one optoelectronic component, which is arranged on the carrier element, a radiation-sensitive or a radiation-emitting surface region of the component being oriented to face away from the carrier element. Provision is also made for at least one electrically conductive connector lead between the carrier element and a contacting region of the component. An at least semi-transparent cover element is arranged directly on the radiation-sensitive and/or radiation-emitting surface region of the component. In this case, the cover element is arranged in such a way with respect to the component that the contacting region of the component is not covered by it and, in addition, the thickness of the cover element is selected so as to ensure that the top side of the cover element exceeds the height of the connector lead in the contacting region.

公开(公告)号：US08570621B2

公开(公告)日：2013-10-29

申请号：US12989691

申请日：2009-03-24

申请人： Jan Braasch ,  Wolfgang Holzapfel ,  Ulrich Benner ,  Gabriele Ehgartner ,  Robert Bernhard ,  Elmar Mayer ,  Martin Seichter

发明人： Jan Braasch ,  Wolfgang Holzapfel ,  Ulrich Benner ,  Gabriele Ehgartner ,  Robert Bernhard ,  Elmar Mayer ,  Martin Seichter

IPC分类号： H04N1/04

CPC分类号： G01D5/2454 ,  G01D5/2495 ,  G01D5/34792

摘要： A position measuring device including a code having a sequence of code elements of equal width B that is disposed in a measurement direction and includes a first property and a second property. The sequence of codes elements includes a first set of code elements having the first property and a second set of code elements having the second property, wherein the first and second sets of code elements are each being disposed aperiodically. The position measuring device further including a scanning unit having a plurality of detectors for scanning the code and obtaining scanning signals, wherein a code word defining an absolute position is defined from the scanning signals. The position measuring device including an arrangement for forming an incremental signal from the scanning signals, wherein the arrangement includes a converter device and a collection device arranged downstream of the converter device and wherein the collection device forms respective intermittently periodic partial signals from the scanning signals derived from scanning positions in a spacing matrix.

摘要翻译： 一种位置测量装置，包括具有沿测量方向设置的并且包括第一属性和第二属性的具有相等宽度B的代码元素序列的代码。 代码元素序列包括具有第一属性的第一组代码元素和具有第二属性的第二代码元素集合，其中第一和第二代码元素集合各自被非周期性地设置。 位置测量装置还包括扫描单元，该扫描单元具有用于扫描代码并获得扫描信号的多个检测器，其中根据扫描信号定义定义绝对位置的代码字。 所述位置测量装置包括用于根据扫描信号形成增量信号的装置，其中所述装置包括转换器装置和布置在所述转换器装置下游的收集装置，并且其中所述收集装置从衍生的扫描信号形成相应的间歇周期性部分信号 从间隔矩阵中的扫描位置。

公开(公告)号：USRE40676E1

公开(公告)日：2009-03-24

申请号：US11057106

申请日：2005-02-11

申请人： Wolfgang Holzapfel ,  Elmar Mayer ,  Siegfried Reichhuber

发明人： Wolfgang Holzapfel ,  Elmar Mayer ,  Siegfried Reichhuber

IPC分类号： G02B11/14 ,  H01J5/16

CPC分类号： G01D5/34715 ,  H01L2224/48091 ,  H01L2924/00014

摘要： A scanning unit for an optical position measuring device, which is suited for optically scanning a scale graduation, to produce positionally dependent scanning signals on the basis of scale graduation. The scanning unit includes a carrier element, at least one optoelectronic component, which is arranged on the carrier element, a radiation-sensitive or a radiation-emitting surface region of the component being oriented to face away from the carrier element. Provision is also made for at least one electrically conductive connector lead between the carrier element and a contacting region of the component. An at least semi-transparent cover element is arranged directly on the radiation-sensitive and/or radiation-emitting surface region of the component. In this case, the cover element is arranged in such a way with respect to the component that the contacting region of the component is not covered by it and, in addition, the thickness of the cover element is selected so as to ensure that the top side of the cover element exceeds the height of the connector lead in the contacting region.

摘要翻译： 用于光学位置测量装置的扫描单元，其适于光刻扫描刻度，以基于刻度刻度产生位置依赖的扫描信号。 扫描单元包括载体元件，布置在载体元件上的至少一个光电子元件，该元件的辐射敏感或辐射发射表面区域被定向为远离载体元件。 还提供了在载体元件和部件的接触区域之间的至少一个导电连接器引线。 至少半透明覆盖元件直接布置在部件的辐射敏感和/或辐射发射表面区域上。 在这种情况下，盖部件相对于部件的接触区域不被其覆盖的部件配置，另外，选择盖元件的厚度，以确保顶部 盖元件的一侧超过接触区域中连接器引线的高度。

公开(公告)号：US20110261422A1

公开(公告)日：2011-10-27

申请号：US12989691

申请日：2009-03-24

申请人： Jan Braasch ,  Wolfgang Holzapfel ,  Ulrich Benner ,  Gabriele Ehgartner ,  Robert Bernhard ,  Elmar Mayer ,  Martin Seichter

发明人： Jan Braasch ,  Wolfgang Holzapfel ,  Ulrich Benner ,  Gabriele Ehgartner ,  Robert Bernhard ,  Elmar Mayer ,  Martin Seichter

IPC分类号： H04N1/04

CPC分类号： G01D5/2454 ,  G01D5/2495 ,  G01D5/34792

摘要： A position measuring device including a code having a sequence of code elements of equal width B that is disposed in a measurement direction and includes a first property and a second property. The sequence of codes elements includes a first set of code elements having the first property and a second set of code elements having the second property, wherein the first and second sets of code elements are each being disposed aperiodically. The position measuring device further including a scanning unit having a plurality of detectors for scanning the code and obtaining scanning signals, wherein a code word defining an absolute position is defined from the scanning signals. The position measuring device including an arrangement for forming an incremental signal from the scanning signals, wherein the arrangement includes a converter device and a collection device arranged downstream of the converter device and wherein the collection device forms respective intermittently periodic partial signals from the scanning signals derived from scanning positions in a spacing matrix.

摘要翻译： 一种位置测量装置，包括具有沿测量方向设置的并且包括第一属性和第二属性的具有相等宽度B的代码元素序列的代码。 代码元素序列包括具有第一属性的第一组代码元素和具有第二属性的第二代码元素集合，其中第一和第二代码元素集合各自被非周期性地设置。 位置测量装置还包括扫描单元，该扫描单元具有用于扫描代码并获得扫描信号的多个检测器，其中根据扫描信号定义定义绝对位置的代码字。 所述位置测量装置包括用于根据扫描信号形成增量信号的装置，其中所述装置包括转换器装置和布置在所述转换器装置下游的收集装置，并且其中所述收集装置从衍生的扫描信号形成相应的间歇周期性部分信号 从间隔矩阵中的扫描位置。

公开(公告)号：US06472658B2

公开(公告)日：2002-10-29

申请号：US09832358

申请日：2001-04-09

申请人： Elmar Mayer ,  Wolfgang Holzapfel ,  Andreas Franz

发明人： Elmar Mayer ,  Wolfgang Holzapfel ,  Andreas Franz

IPC分类号： H01J314

CPC分类号： G01D5/2457 ,  G01D5/366 ,  G01D5/38

摘要： An incremental position measuring system in the form of a three-grating sensor is optimized in such a way, that the degree of modulation (M) of the incremental scanning device, as well as the intensity (I) of a reference marker signal are relatively strong. To this end, a phase grating with an effective phase deviation of &lgr;/4 is embodied on a scale 2, as well as a reference marker (R) in the form of an amplitude structure. A compact structure is achieved by the divergent illumination of the grating located in front of the scale.

摘要翻译： 以三光栅传感器形式的增量位置测量系统以这样的方式被优化：增量扫描装置的调制度（M）以及参考标记信号的强度（I）是相对的 强大。 为此，具有有效相位偏移lambd / 4的相位光栅被体现在刻度2上，以及以振幅结构形式的参考标记（R）。 通过位于刻度前方的光栅的发散照明来实现紧凑的结构。