公开(公告)号：US07164482B2

公开(公告)日：2007-01-16

申请号：US10840812

申请日：2004-05-07

申请人： Ulrich Benner ,  Elmar Mayer ,  Wolfgang Holzapfel

发明人： Ulrich Benner ,  Elmar Mayer ,  Wolfgang Holzapfel

IPC分类号： G01B11/14

CPC分类号： G01D5/34715

摘要： A position measuring system that includes a scale having a measuring graduation extending along a first line and a scanning device. The scanning device includes a light source that transmits light beams that scan the measuring graduation, wherein the measuring graduation generates modified light from the transmitted light beams and a detector unit that receives the modified light from the measuring graduation. A lens arrangement, arranged between the scale and the detector unit, the lens arrangement generating a defined image of the measuring graduation on the, detector unit, wherein the defined image extends along a second line, whose curvature is different from a curvature of the first line.

摘要翻译： 一种位置测量系统，包括具有沿着第一线延伸的测量刻度的刻度和扫描装置。 扫描装置包括透射扫描测量刻度的光束的光源，其中测量刻度产生来自透射光束的修正光，以及从测量刻度接收修改光的检测器单元。 布置在刻度尺和检测器单元之间的透镜布置，透镜装置在检测器单元上产生测量刻度的定义图像，其中限定的图像沿着第二线延伸，其第二线的曲率不同于第一 线。

公开(公告)号：US08570621B2

公开(公告)日：2013-10-29

申请号：US12989691

申请日：2009-03-24

申请人： Jan Braasch ,  Wolfgang Holzapfel ,  Ulrich Benner ,  Gabriele Ehgartner ,  Robert Bernhard ,  Elmar Mayer ,  Martin Seichter

发明人： Jan Braasch ,  Wolfgang Holzapfel ,  Ulrich Benner ,  Gabriele Ehgartner ,  Robert Bernhard ,  Elmar Mayer ,  Martin Seichter

IPC分类号： H04N1/04

CPC分类号： G01D5/2454 ,  G01D5/2495 ,  G01D5/34792

摘要： A position measuring device including a code having a sequence of code elements of equal width B that is disposed in a measurement direction and includes a first property and a second property. The sequence of codes elements includes a first set of code elements having the first property and a second set of code elements having the second property, wherein the first and second sets of code elements are each being disposed aperiodically. The position measuring device further including a scanning unit having a plurality of detectors for scanning the code and obtaining scanning signals, wherein a code word defining an absolute position is defined from the scanning signals. The position measuring device including an arrangement for forming an incremental signal from the scanning signals, wherein the arrangement includes a converter device and a collection device arranged downstream of the converter device and wherein the collection device forms respective intermittently periodic partial signals from the scanning signals derived from scanning positions in a spacing matrix.

摘要翻译： 一种位置测量装置，包括具有沿测量方向设置的并且包括第一属性和第二属性的具有相等宽度B的代码元素序列的代码。 代码元素序列包括具有第一属性的第一组代码元素和具有第二属性的第二代码元素集合，其中第一和第二代码元素集合各自被非周期性地设置。 位置测量装置还包括扫描单元，该扫描单元具有用于扫描代码并获得扫描信号的多个检测器，其中根据扫描信号定义定义绝对位置的代码字。 所述位置测量装置包括用于根据扫描信号形成增量信号的装置，其中所述装置包括转换器装置和布置在所述转换器装置下游的收集装置，并且其中所述收集装置从衍生的扫描信号形成相应的间歇周期性部分信号 从间隔矩阵中的扫描位置。

公开(公告)号：US07230726B2

公开(公告)日：2007-06-12

申请号：US10821518

申请日：2004-04-09

申请人： Wolfgang Holzapfel ,  Elmar Mayer ,  Ulrich Benner

发明人： Wolfgang Holzapfel ,  Elmar Mayer ,  Ulrich Benner

IPC分类号： G01B11/14

CPC分类号： G01D5/34715

摘要： A scanning unit for a position measuring instrument for optical scanning of a measuring graduation. The scanning unit includes a light source that emits light in a direction towards a measuring graduation that generates modified light from the emitted light. A detector that receives the modified light. A lens array, disposed upstream of the detector and including a plurality of optical lenses, that generates a defined image of a region of the measuring graduation, scanned by the emitted light, on the detector, wherein an image magnification of the lens array is greater than 0 and less than or equal to 2.

摘要翻译： 用于测量刻度的光学扫描的位置测量仪的扫描单元。 扫描单元包括在朝向从发射光产生修正光的测量刻度的方向上发光的光源。 接收修改光的检测器。 一种透镜阵列，设置在检测器的上游并且包括多个光学透镜，其在检测器上产生由发射光扫描的测量刻度的区域的限定图像，其中透镜阵列的图像放大率更大 大于0且小于等于2。

公开(公告)号：US20110261422A1

公开(公告)日：2011-10-27

申请号：US12989691

申请日：2009-03-24

申请人： Jan Braasch ,  Wolfgang Holzapfel ,  Ulrich Benner ,  Gabriele Ehgartner ,  Robert Bernhard ,  Elmar Mayer ,  Martin Seichter

发明人： Jan Braasch ,  Wolfgang Holzapfel ,  Ulrich Benner ,  Gabriele Ehgartner ,  Robert Bernhard ,  Elmar Mayer ,  Martin Seichter

IPC分类号： H04N1/04

CPC分类号： G01D5/2454 ,  G01D5/2495 ,  G01D5/34792

摘要： A position measuring device including a code having a sequence of code elements of equal width B that is disposed in a measurement direction and includes a first property and a second property. The sequence of codes elements includes a first set of code elements having the first property and a second set of code elements having the second property, wherein the first and second sets of code elements are each being disposed aperiodically. The position measuring device further including a scanning unit having a plurality of detectors for scanning the code and obtaining scanning signals, wherein a code word defining an absolute position is defined from the scanning signals. The position measuring device including an arrangement for forming an incremental signal from the scanning signals, wherein the arrangement includes a converter device and a collection device arranged downstream of the converter device and wherein the collection device forms respective intermittently periodic partial signals from the scanning signals derived from scanning positions in a spacing matrix.

摘要翻译： 一种位置测量装置，包括具有沿测量方向设置的并且包括第一属性和第二属性的具有相等宽度B的代码元素序列的代码。 代码元素序列包括具有第一属性的第一组代码元素和具有第二属性的第二代码元素集合，其中第一和第二代码元素集合各自被非周期性地设置。 位置测量装置还包括扫描单元，该扫描单元具有用于扫描代码并获得扫描信号的多个检测器，其中根据扫描信号定义定义绝对位置的代码字。 所述位置测量装置包括用于根据扫描信号形成增量信号的装置，其中所述装置包括转换器装置和布置在所述转换器装置下游的收集装置，并且其中所述收集装置从衍生的扫描信号形成相应的间歇周期性部分信号 从间隔矩阵中的扫描位置。

公开(公告)号：US20050168757A1

公开(公告)日：2005-08-04

申请号：US10510868

申请日：2003-04-02

申请人： Ulrich Benner ,  Elmar Mayer

发明人： Ulrich Benner ,  Elmar Mayer

IPC分类号： G01D5/347 ,  G01D5/38 ,  G02B3/00 ,  G01B11/14

CPC分类号： G01D5/38 ,  G01D5/34715

摘要： An optical position measuring system including a periodic grating structure and a scanning unit. The scanning unit includes a light source that directs light towards the periodic grating structure and an optical lens device that receives light from the periodic grating structure and creates an image of the periodic grating structure in an image plane, the optical lens device having a periodic lens array with a grating period, AG (r) or the mutual distance between adjoining lenses of said lens array defined by the equation: wherein AG(r) is the A G ⁡ ( r ) =  β ⁡ ( r )  * [ t ⁡ ( r ) ⁢   * [ k + i + n ] + ψ ] (  β ⁡ ( r )  + 1 ) array, t(r) the period of the periodic grating structure, |β(r)| the absolute amount of the image scale β of the lens array ψ a presettable defined phase shift r the radius of the grating arrangement, wherein in the case of a linear grating r=∞, and AG, t and |β| are constants, i, k, n ε N, i.e. are natural numbers, including zero.

公开(公告)号：US06914235B2

公开(公告)日：2005-07-05

申请号：US10180916

申请日：2002-06-26

申请人： Ulrich Benner ,  Wolfgang Holzapfel

发明人： Ulrich Benner ,  Wolfgang Holzapfel

IPC分类号： G01D5/36 ,  G01D5/245 ,  G01D5/34

CPC分类号： G01D5/2457

摘要： A position measuring system that includes a scale having a first track with successive partial areas of differing reflectivity and a second track with successive partial areas of differing reflectivity. A scanning unit which moves relative to the scale in a measuring direction so that a first position dependent scanning signal and a second position dependent scanning signal are generated by scanning the first track and the second track by the scanning unit. The first position dependent scanning signal and the second position dependent scanning signals have a different pitch behavior in case of a pitch tilt of either the scanning unit or the scale to the effect, that in that case the first position dependent scanning signal indicates an erroneous position, while the second position dependent scanning signal continues to show a correct position. The scanning unit has a structure such that a third position dependent scanning signal is generated from the first track and has a different pitch behavior than the first position measuring scanning signal generated from the first track.

摘要翻译： 一种位置测量系统，其包括具有具有不同反射率的连续部分区域的第一轨道的刻度和具有不同反射率的连续部分区域的第二轨迹。 扫描单元，其在测量方向上相对于刻度移动，从而通过扫描单元扫描第一轨道和第二轨迹来产生第一位置相关扫描信号和第二位置相关扫描信号。 第一位置相关扫描信号和第二位置相关扫描信号在扫描单元或标尺的俯仰倾斜的情况下具有不同的俯仰行为，在这种情况下，第一位置相关扫描信号指示错误位置 而第二位置相关扫描信号继续显示正确​​的位置。 扫描单元具有这样的结构，使得从第一轨道产生第三位置相关扫描信号，并且具有与从第一轨迹产生的第一位置测量扫描信号不同的俯仰行为。

公开(公告)号：US07154609B2

公开(公告)日：2006-12-26

申请号：US10635422

申请日：2003-08-06

申请人： Wolfgang Holzapfel ,  Michael Hermann ,  Walter Huber ,  Völker Hofer ,  Ulrich Benner ,  Karsten Sändig

发明人： Wolfgang Holzapfel ,  Michael Hermann ,  Walter Huber ,  Völker Hofer ,  Ulrich Benner ,  Karsten Sändig

IPC分类号： G01B9/02

CPC分类号： G01D5/38

摘要： An interferential position measuring arrangement including a light source, which emits a beam of rays and an optical element, which converts the beam of rays emitted by the light source into an incoming beam of rays. A scale grating which splits the incoming beam of rays into a first partial beam of rays and a second partial beam of rays. A first scanning grating that causes splitting of the first partial beam of rays and a second scanning grating that causes splitting of the second partial beam of rays, wherein a periodically modulated interferential fringe pattern with definite spatial interferential fringe pattern period results in a detection plane. A detection arrangement which causes splitting of light entering through the detection arrangement into at least three different spatial directions and optoelectronic detector elements arranged in the at least three spatial directions for detecting phase-shifted scanning signal.

摘要翻译： 一种包括发射光束的光源和光学元件的干涉位置测量装置，其将由光源发射的光线转换成输入的光束。 将光束入射到第一部分射线束和第二部分射线束的刻度光栅。 使第一部分光束分裂的第一扫描光栅和引起第二部分光束分裂的第二扫描光栅，其中具有确定的空间干涉条纹图案周期的周期性调制的干涉条纹图案导致检测平面。 一种检测装置，其使通过检测装置进入的光分裂成至少三个不同的空间方向，并且在至少三个空间方向上布置的光电检测器元件用于检测相移的扫描信号。

公开(公告)号：US06963409B2

公开(公告)日：2005-11-08

申请号：US10510868

申请日：2003-04-02

申请人： Ulrich Benner ,  Elmar Mayer

发明人： Ulrich Benner ,  Elmar Mayer

IPC分类号： G01D5/347 ,  G01D5/38 ,  G02B3/00 ,  G01B11/14 ,  G01B11/02

CPC分类号： G01D5/38 ,  G01D5/34715

摘要： An optical position measuring system including a periodic grating structure and a scanning unit. The scanning unit includes a light source that directs light towards the periodic grating structure and an optical lens device that receives light from the periodic grating structure and creates an image of the periodic grating structure in an image plane, the optical lens device having a periodic lens array with a grating period, AG(r) or the mutual distance between adjoining lenses of said lens array defined by the equation: A G ⁡ ( r ) =  β ⁡ ( r )  * [ t ⁡ ( r ) * [ k + i + n ] + ψ ] (  β ⁡ ( r )  + 1 ) wherein AG(r) is the grating per t(r) the period of the periodic grating structure, |β(r)| the absolute amount of the image magnification factor β of the lens array Ψ a presettable defined phase shift r the radius of the grating arrangement, wherein in the case of a linear grating r=∞ and AG,t and |β| are constants, i, k, n ε N, i.e. are natural numbers, including zero.

公开(公告)号：US06742275B2

公开(公告)日：2004-06-01

申请号：US10345841

申请日：2003-01-16

申请人： Elmar Mayer ,  Ulrich Benner

发明人： Elmar Mayer ,  Ulrich Benner

IPC分类号： G01B500

CPC分类号： G01D5/34792 ,  G01D5/24461 ,  G01D5/2495 ,  G01D5/34776 ,  H03M1/0685 ,  H03M1/282

摘要： A scale which is suitable for an absolute position determination, the scale includes a track which extends in at least one measuring direction and in which graduation areas of identical width and different optical properties are alternatingly arranged. At least first, second and third graduation areas with different optical properties that are arranged in the track, wherein a first logical signal is unequivocally assigned to a first combination of two successive different graduation areas, and a second logical signal is unequivocally assigned to a second combination of two successive different graduation areas, and wherein the first and second combinations differ from each other.

摘要翻译： 适合于绝对位置确定的刻度尺，包括在至少一个测量方向上延伸的轨道，并且其中交替布置具有相同宽度和不同光学特性的刻度区域。 具有布置在轨道中的具有不同光学性质的至少第一，第二和第三刻度区域，其中第一逻辑信号被明确地分配给两个连续不同的刻度区域的第一组合，并且第二逻辑信号被明确地分配给第二逻辑信号 两个连续不同的刻度区域的组合，并且其中第一和第二组合彼此不同。

公开(公告)号：US07473886B2

公开(公告)日：2009-01-06

申请号：US11801057

申请日：2007-05-07

申请人： Ulrich Benner

发明人： Ulrich Benner

IPC分类号： G01D5/34

CPC分类号： G01D5/347

摘要： In a position-measuring device for acquiring the relative position of a scanning unit and a reflection measuring graduation movable relative thereto in at least one measuring direction, the scanning unit includes a light source and a detector arrangement in a detection plane. In a first variant of the scanning unit, at least one optical reflector element is positioned in the scanning beam path which has an optical effect on the scanning beam path to the effect that the distance between a virtual light source and the reflection measuring graduation on one hand, and the distance between the reflection measuring graduation and the detector arrangement/detection plane on the other hand are identical. In a second variant, in the scanning unit at least one optical transmission element is disposed in the scanning beam path which has an optical effect on the scanning beam path to the effect that the distance between the light source and the reflection measuring graduation on one hand, and the distance between the reflection measuring graduation and a detector arrangement in a virtual detection plane on the other hand are identical.

摘要翻译： 在用于获取扫描单元的相对位置的位置测量装置和在至少一个测量方向上可相对于其移动的反射测量刻度，扫描单元包括检测平面中的光源和检测器装置。 在扫描单元的第一变型中，至少一个光学反射器元件位于扫描光束路径中，其对扫描光束路径具有光学效应，使得虚拟光源与反射测量刻度之间的距离在一个 另一方面，反射测量刻度与检测器布置/检测平面之间的距离是相同的。 在第二种变型中，在扫描单元中，至少一个光传输元件被设置在扫描光束路径中，其具有对扫描光束路径的光学效应，使得一方面光源与反射测量刻度之间的距离 另一方面，虚拟检测平面中的反射测量刻度与检测器配置之间的距离相同。