公开(公告)号：US20050157295A1

公开(公告)日：2005-07-21

申请号：US10927929

申请日：2004-08-27

申请人： Won Chegal ,  Hyun Cho ,  Yong Cho ,  Yun Lee

发明人： Won Chegal ,  Hyun Cho ,  Yong Cho ,  Yun Lee

IPC分类号： G01J3/447 ,  G01J4/00 ,  G01J4/04 ,  G01N21/21

CPC分类号： G01J3/447 ,  G01J4/04 ,  G01N21/211

摘要： An ellipsometry system and method using spectral imaging are provided. The ellipsometry system includes a light source group for projecting a white light collimated to a multi-point region defined on the surface of a sample, a light analysis group for polarizing a reflected white light to analyze it, and a spectral imaging group for dispersing and imaging the polarized white light. The white light collimated to the multi-point region is input to the spectral imaging group and dispersed by a light dispersing means by wavelengths such that the dispersed lights are imaged on one axis of an imaging plane by the points forming the multi-point region and imaged on the other axis of the imaging plane by wavelengths, to obtain optical data having information about the physical property of the points and wavelengths. Accordingly, a large amount of data can be obtained by wavelengths and points to improve rapidity and reliability of measurement.

摘要翻译： 提供了使用光谱成像的椭偏仪系统和方法。 椭圆测量系统包括一个光源组，用于将准直的白光投射到在样品表面上限定的多点区域;光分析组，用于偏振反射白光进行分析;以及光谱成像组，用于分散和 成像偏振白光。 准直到多点区域的白光被输入到光谱成像组，并且通过波长使光散射装置分散，使得分散的光在形成多点区域的点上成像在成像平面的一个轴上， 通过波长在成像平面的另一轴上成像，以获得具有关于点和波长的物理性质的信息的光学数据。 因此，可以通过波长和点获得大量的数据，以提高测量的快速性和可靠性。

公开(公告)号：US20120057146A1

公开(公告)日：2012-03-08

申请号：US13121079

申请日：2009-11-30

申请人： Hyun Mo Cho ,  Yong Jai Cho ,  Won Chegal

发明人： Hyun Mo Cho ,  Yong Jai Cho ,  Won Chegal

IPC分类号： G01N21/21 ,  G01N21/55

CPC分类号： G01N21/553 ,  G01N2021/212

摘要： Provided is a multi-channel surface plasmon resonance sensor using beam profile ellipsometry; and, more particularly, to a high sensitive measuring technology, which is coupled with a vertical illumination type focused-beam ellipsometer using a multi-incident angle measurement method, and a surface plasmon resonance (SPR) sensing part deposited with a metal thin film. The multi-channel surface plasmon resonance sensor includes a vertical illumination type focused-beam ellipsometer, in which light is polarized; a surface plasmon resonance (SPR) sensing part which is provided at the objective lens part of the focused-beam ellipsometer so as to generate SPR according to an angle change of the polarized light; and a flow unit which supplies a buffer solution containing a bio material binding to or dissociation from the metal thin film generating surface plasmon, wherein the SPR and the ellipsometric phase change by change in an angle and a wavelength are simultaneously detected.

摘要翻译： 提供了使用光束轮廓椭偏仪的多通道表面等离子体共振传感器; 更具体地说，涉及一种高灵敏度测量技术，其与使用多入射角测量方法的垂直照明型聚焦光束椭偏仪和沉积有金属薄膜的表面等离子体共振（SPR）感测部件相结合。 多通道表面等离子体共振传感器包括其中光被极化的垂直照明型聚焦光束椭偏仪; 表面等离子体共振（SPR）感测部，其设置在聚焦光束椭偏仪的物镜部分，以便根据偏振光的角度变化产生SPR; 以及流量单元，其提供包含与金属薄膜产生表面等离子体激元结合或解离的生物材料的缓冲溶液，其中同时检测SPR和椭偏相位随角度和波长的变化而改变。

公开(公告)号：US08009292B2

公开(公告)日：2011-08-30

申请号：US12666159

申请日：2008-11-11

申请人： Yong Jai Choi ,  Won Chegal ,  Hyun Mo Cho

发明人： Yong Jai Choi ,  Won Chegal ,  Hyun Mo Cho

IPC分类号： G01J4/00

CPC分类号： G01B11/0641 ,  G01N21/211 ,  G01N2021/213

摘要： The present invention relates to a single-polarizer focused-beam ellipsometer. An ellipsometer according to the present invention includes a light source (210); a beam splitting part (220) for splitting a light generated in the light source (210) into a polarized light; an objective lens (230) for concentrately irradiating some of light split by the beam splitting part (220) onto a specimen (240); a photodetector (250) for detecting the light passed through the objective lens 230 and the beam splitting part (220) after reflected from the specimen (240) with unit cells; and a central processing unit (260) for correcting the intensity of the light detected by the photodetector (250) into a value corresponding to the unit cell of the photodetector (250) along multiple incidence plane passage of 360° with respect to respective incidence angles and processing the corrected value.

摘要翻译： 本发明涉及单偏振器聚焦光束椭偏仪。 根据本发明的椭偏仪包括光源（210）; 用于将在光源（210）中产生的光分解成偏振光的分束部分（220）; 用于将通过分束部分（220）分裂的一些光集中照射到样本（240）上的物镜（230）; 用于在从单元电池从样品（240）反射之后检测通过物镜230和分束部分（220）的光的光电检测器（250） 以及中央处理单元（260），用于相对于各个入射角将由光电检测器（250）检测的光的强度校正为与多个入射平面通过360°的光电检测器（250）的单元电池相对应的值 并处理校正值。

公开(公告)号：US08300221B2

公开(公告)日：2012-10-30

申请号：US12666064

申请日：2008-11-11

申请人： Yong Jai Cho ,  Won Chegal ,  Hyun Mo Cho

发明人： Yong Jai Cho ,  Won Chegal ,  Hyun Mo Cho

IPC分类号： G01J4/00

CPC分类号： G01B11/06 ,  G01Q30/02

摘要： The present invention relates to a minute measuring instrument for high speed and large area and a method thereof, and more particularly, to a minute measuring instrument for high speed and large area which measures properties of a specimen in high speed by a focused-beam ellipsometric part and then minutely remeasures the position showing a singular point by a minute measuring part and a method thereof.

摘要翻译： 本发明涉及一种高速大面积的微小测量仪器及其方法，更具体地说，涉及一种高速大面积的微小测量仪器，其通过聚焦光椭圆测量仪测量高速样品的性能 然后通过微小的测量部分及其方法精细地重新显示奇点的位置。

公开(公告)号：US20100045985A1

公开(公告)日：2010-02-25

申请号：US12308662

申请日：2007-06-20

申请人： Joong Whan Lee ,  Young June Ko ,  Young Sun Park ,  Yoon Jong Park ,  Chi Woon Jeong ,  Sang Heon Ye ,  Yong Jai Cho ,  Hyun Mo Cho ,  Won Chegal

发明人： Joong Whan Lee ,  Young June Ko ,  Young Sun Park ,  Yoon Jong Park ,  Chi Woon Jeong ,  Sang Heon Ye ,  Yong Jai Cho ,  Hyun Mo Cho ,  Won Chegal

IPC分类号： G01J4/00

CPC分类号： G01N21/211

摘要： The present invention relates to an ellipsometer, and more particularly, to an ellipsometer to find out the optical properties of the sample by analyzing the variation of the polarization of a light which has specific polarisation then reflected on a surface of the sample.

摘要翻译： 本发明涉及一种椭偏仪，更具体地说，涉及通过分析具有特定偏振光然后在样品表面反射的光的偏振变化来找出样品的光学特性的椭偏仪。

公开(公告)号：US08004677B2

公开(公告)日：2011-08-23

申请号：US12308662

申请日：2007-06-20

申请人： Joong Whan Lee ,  Young June Ko ,  Young Sun Park ,  Yoon Jong Park ,  Chi Woon Jeong ,  Sang Heon Ye ,  Yong Jai Cho ,  Hyun Mo Cho ,  Won Chegal

发明人： Joong Whan Lee ,  Young June Ko ,  Young Sun Park ,  Yoon Jong Park ,  Chi Woon Jeong ,  Sang Heon Ye ,  Yong Jai Cho ,  Hyun Mo Cho ,  Won Chegal

IPC分类号： G01J4/00

CPC分类号： G01N21/211

摘要： The present invention relates to an ellipsometer, and more particularly, to an ellipsometer to find out the optical properties of the sample by analyzing the variation of the polarization of a light which has specific polarisation then reflected on a surface of the sample.

摘要翻译： 本发明涉及一种椭偏仪，更具体地说，涉及通过分析具有特定偏振光然后在样品表面反射的光的偏振变化来找出样品的光学特性的椭偏仪。

公开(公告)号：US20100321693A1

公开(公告)日：2010-12-23

申请号：US12666064

申请日：2008-11-11

申请人： Yong Jai Cho ,  Won Chegal ,  Hyun Mo Cho

发明人： Yong Jai Cho ,  Won Chegal ,  Hyun Mo Cho

IPC分类号： G01J4/00

CPC分类号： G01B11/06 ,  G01Q30/02

摘要： The present invention relates to a minute measuring instrument for high speed and large area and a method thereof, and more particularly, to a minute measuring instrument for high speed and large area which measures properties of a specimen in high speed by a focused-beam ellipsometric part and then minutely remeasures the position showing a singular point by a minute measuring part and a method thereof.

摘要翻译： 本发明涉及一种高速大面积的微小测量仪器及其方法，更具体地说，涉及一种高速大面积的微小测量仪器，其通过聚焦光椭圆测量仪测量高速样品的性能 然后通过微小的测量部分及其方法精细地重新显示奇点的位置。

公开(公告)号：US08705039B2

公开(公告)日：2014-04-22

申请号：US13121079

申请日：2009-11-30

申请人： Hyun Mo Cho ,  Yong Jai Cho ,  Won Chegal

发明人： Hyun Mo Cho ,  Yong Jai Cho ,  Won Chegal

IPC分类号： G01N21/55

CPC分类号： G01N21/553 ,  G01N2021/212

摘要： Provided is a multi-channel surface plasmon resonance sensor using beam profile ellipsometry; and, more particularly, to a high sensitive measuring technology, which is coupled with a vertical illumination type focused-beam ellipsometer using a multi-incident angle measurement method, and a surface plasmon resonance (SPR) sensing part deposited with a metal thin film. The multi-channel surface plasmon resonance sensor includes a vertical illumination type focused-beam ellipsometer, in which light is polarized; a surface plasmon resonance (SPR) sensing part which is provided at the objective lens part of the focused-beam ellipsometer so as to generate SPR according to an angle change of the polarized light; and a flow unit which supplies a buffer solution containing a bio material binding to or dissociation from the metal thin film generating surface plasmon, wherein the SPR and the ellipsometric phase change by change in an angle and a wavelength are simultaneously detected.

摘要翻译： 提供了使用光束轮廓椭偏仪的多通道表面等离子体共振传感器; 更具体地说，涉及一种高灵敏度测量技术，其与使用多入射角测量方法的垂直照明型聚焦光束椭偏仪和沉积有金属薄膜的表面等离子体共振（SPR）感测部件相结合。 多通道表面等离子体共振传感器包括其中光被极化的垂直照明型聚焦光束椭偏仪; 表面等离子体共振（SPR）感测部，其设置在聚焦光束椭偏仪的物镜部分，以便根据偏振光的角度变化产生SPR; 以及流量单元，其提供包含与金属薄膜产生表面等离子体激元结合或解离的生物材料的缓冲溶液，其中同时检测SPR和椭偏相位随角度和波长的变化而改变。

公开(公告)号：US08705033B2

公开(公告)日：2014-04-22

申请号：US13128090

申请日：2009-11-30

申请人： Hyun Mo Cho ,  Yong Jai Cho ,  Won Chegal

发明人： Hyun Mo Cho ,  Yong Jai Cho ,  Won Chegal

IPC分类号： G01J4/00 ,  G01N21/55

CPC分类号： G01N21/553 ,  G01N2021/212

摘要： Provided is a multi-channel surface plasmon resonance sensor using beam profile ellipsometry; and, more particularly, to a high sensitive measuring technology, which is coupled with a vertical illumination type focused-beam ellipsometer using a multi-incident angle measurement method, and a surface plasmon resonance (SPR) sensing part deposited with a metal thin film. The multi-channel surface plasmon resonance sensor includes a vertical illumination type focused-beam ellipsometer in which light is polarized; a surface plasmon resonance (SPR) sensing part which is provided at the objective lens part of the focused-beam ellipsometer; and a multi-channel flow unit which supplies a buffer solution containing a bio material binding to or dissociation from a metal thin film generating surface plasmon.

摘要翻译： 提供了使用光束轮廓椭偏仪的多通道表面等离子体共振传感器; 更具体地说，涉及一种高灵敏度测量技术，其与使用多入射角测量方法的垂直照明型聚焦光束椭偏仪和沉积有金属薄膜的表面等离子体共振（SPR）感测部件相结合。 多通道表面等离子体共振传感器包括其中光被极化的垂直照明型聚焦光束椭偏仪; 设置在聚焦光束椭偏仪的物镜部分的表面等离子体共振（SPR）感测部分; 以及多通道流动单​​元，其提供包含与金属薄膜产生表面等离子体激元结合或解离的生物材料的缓冲溶液。

公开(公告)号：US08447546B2

公开(公告)日：2013-05-21

申请号：US12840849

申请日：2010-07-21

申请人： Yong Jai Cho ,  Won Chegal ,  Hyun Mo Cho

发明人： Yong Jai Cho ,  Won Chegal ,  Hyun Mo Cho

IPC分类号： G01R13/00

CPC分类号： G01J1/42 ,  G01J4/00 ,  G01N21/211

摘要： Provided is a measurement method of Fourier coefficients using an integrating photometric detector, wherein, when measuring an exposure (Sj) with a predetermined time interval during a predetermined time period using an integrating photometric detector with respect to light of which amplitude varies with the time period, normalized Fourier coefficients (α′2n, β′2n) for a waveform of an intensity of the light is determined by carrying out a discrete Fourier transform with respect to an equation for the measured exposure (Sj).

摘要翻译： 提供了一种使用积分光度检测器的傅立叶系数的测量方法，其中，当使用积分测光检测器相对于其幅度随时间变化的光在测量预定时间段期间以预定时间间隔的曝光（Sj）时 通过对于测量的曝光（Sj）执行离散傅立叶变换来确定用于光强度的波形的归一化傅里叶系数（α'2n，β'2n）。