公开(公告)号：US06572935B1

公开(公告)日：2003-06-03

申请号：US09428269

申请日：1999-10-27

申请人： Xiao-Ming He ,  Deok-Hyung Lee ,  Michael A. Nastasi ,  Kevin C. Walter ,  Michel G. Tuszewski

发明人： Xiao-Ming He ,  Deok-Hyung Lee ,  Michael A. Nastasi ,  Kevin C. Walter ,  Michel G. Tuszewski

IPC分类号： C23C1627

CPC分类号： C23C16/26 ,  H01J37/32412 ,  Y10S427/103 ,  Y10S427/104

摘要： A plasma-based method for the deposition of diamond-like carbon (DLC) coatings is described. The process uses a radio-frequency inductively coupled discharge to generate a plasma at relatively low gas pressures. The deposition process is environmentally friendly and scaleable to large areas, and components that have geometrically complicated surfaces can be processed. The method has been used to deposit adherent 100-400 nm thick DLC coatings on metals, glass, and polymers. These coatings are between three and four times harder than steel and are therefore scratch resistant, and transparent to visible light. Boron and silicon doping of the DLC coatings have produced coatings having improved optical properties and lower coating stress levels, but with slightly lower hardness.

摘要翻译： 描述了用于沉积类金刚石（DLC）涂层的基于等离子体的方法。 该过程使用射频感应耦合放电在相对低的气体压力下产生等离子体。 沉积工艺对于大面积的环境友好和可扩展，并且可以处理具有几何复杂表面的部件。 该方法已用于在金属，玻璃和聚合物上沉积100-400nm厚的DLC涂层。 这些涂层比钢硬三至四倍，因此具有耐划伤性，对可见光透明。 DLC涂层的硼和硅掺杂已经产生具有改善的光学性能和较低涂层应力水平但具有稍低的硬度的涂层。

公开(公告)号：US5650618A

公开(公告)日：1997-07-22

申请号：US568899

申请日：1995-11-30

申请人： Michel G. Tuszewski

发明人： Michel G. Tuszewski

IPC分类号： H01J49/30 ,  H01J49/40

CPC分类号： H01J49/30

摘要： A mass spectrometer and methods for mass spectrometry which are useful in characterizing a plasma. This mass spectrometer for determining type and quantity of ions present in a plasma is simple, compact, and inexpensive. It accomplishes mass analysis in a single step, rather than the usual two-step process comprised of ion extraction followed by mass filtering. Ions are captured by a measuring element placed in a plasma and accelerated by a known applied voltage. Captured ions are bent into near-circular orbits by a magnetic field such that they strike a collector, producing an electric current. Ion orbits vary with applied voltage and proton mass ratio of the ions, so that ion species may be identified. Current flow provides an indication of quantity of ions striking the collector.

摘要翻译： 用于表征等离子体的质谱仪和质谱法。 用于确定存在于等离子体中的离子的类型和数量的该质谱仪是简单，紧凑且便宜的。 它在一个步骤中完成质量分析，而不是通常的两步法，其中包括离子提取，然后是质量过滤。 离子被放置在等离子体中的测量元件捕获并通过已知的施加电压加速。 捕获的离子通过磁场弯曲成近圆形轨道，使得它们撞击集电器，产生电流。 离子轨道随着离子的施加电压和质子质量比而变化，从而可以鉴定离子种类。 电流提供了暴露于收集器的离子数量的指示。

公开(公告)号：US6153852A

公开(公告)日：2000-11-28

申请号：US249657

申请日：1999-02-12

申请人： Andreas S. Blutke ,  Edward M. Bohn ,  Robert S. Ottinger ,  Michel G. Tuszewski ,  John S. Vavruska

发明人： Andreas S. Blutke ,  Edward M. Bohn ,  Robert S. Ottinger ,  Michel G. Tuszewski ,  John S. Vavruska

IPC分类号： F23G5/08 ,  H05H1/30 ,  B23K10/00

CPC分类号： F23G5/085 ,  H05H1/30 ,  F23G2204/201 ,  F23G2209/102 ,  F23G2209/142

摘要： A method for optimizing the efficiency of an inductively coupled plasma (ICP) torch by varying at least one of a plasma gas flow rate and a power level applied to energize the ICP torch, and method and apparatus for efficiently using a CO.sub.2 feed as both a reactant and for generating a thermal plasma to produce high value chemical feed stocks, such as a synthesis gas or carbon monoxide from low value feedstocks, such as methane or carbon.

摘要翻译： 一种用于通过改变等离子体气体流量和施加于ICP喷灯的功率水平中的至少一个来优化感应耦合等离子体（ICP）手电筒的效率的方法，以及用于有效地使用CO 2进料作为两者的方法和装置 并且用于产生热等离子体以产生高价值的化学原料，例如来自低价值原料如甲烷或碳的合成气或一氧化碳。