摘要:
A method of fabricating a magnetic device is described. A mask removing layer is formed on a layered sensing stack and a hard mask layer is formed on the mask removing layer. A first reactive ion etch is performed with a non-oxygen-based chemistry to define the hard mask layer using an imaged layer formed on the hard mask layer as a mask. A second reactive ion etch is performed with an oxygen-based chemistry to define the mask removing stop layer using the defined hard mask layer as a mask. A third reactive ion etch is performed to define the layered sensing stack using the hard mask layer as a mask. The third reactive ion etch includes an etching chemistry that performs at a lower etching rate on the hard mask layer than on the layered sensing stack.
摘要:
A method of fabricating a magnetic device is described. A mask removing layer is formed on a layered sensing stack and a hard mask layer is formed on the mask removing layer. A first reactive ion etch is performed with a non-oxygen-based chemistry to define the hard mask layer using an imaged layer formed on the hard mask layer as a mask. A second reactive ion etch is performed with an oxygen-based chemistry to define the mask removing stop layer using the defined hard mask layer as a mask. A third reactive ion etch is performed to define the layered sensing stack using the hard mask layer as a mask. The third reactive ion etch includes an etching chemistry that performs at a lower etching rate on the hard mask layer than on the layered sensing stack.
摘要:
An apparatus includes a waveguide having a core layer, a near field transducer having an end positioned adjacent to a first surface, a first magnetic pole having an end positioned adjacent to the first surface, and a side lobe blocker adjacent to the first surface and having portions on opposite sides of the first magnetic pole and the near field transducer, wherein the side lobe blocker forms an aperture at an end of the core layer adjacent to the first surface.
摘要:
A slider may have a first surface on an air bearing surface (ABS) and a laser recess formed in a second surface of the slider, opposite the first surface. A laser can then be positioned in the laser recess with the laser extending from the slider to a top plane. A stud may be formed adjacent to and separated from the laser on the second surface of the slider with the stud extending from the second surface of the slider to the top plane.
摘要:
An apparatus includes a near field transducer positioned adjacent to an air bearing surface, a first magnetic pole, a heat sink positioned between the first magnetic pole and the near field transducer, and a diffusion barrier positioned between the near field transducer and the first magnetic pole. The diffusion barrier can be positioned adjacent to the magnetic pole or the near field transducer.
摘要:
An apparatus includes a waveguide having a core layer, a near field transducer having an end positioned adjacent to a first surface, a first magnetic pole having an end positioned adjacent to the first surface, and a side lobe blocker adjacent to the first surface and having portions on opposite sides of the first magnetic pole and the near field transducer, wherein the side lobe blocker forms an aperture at an end of the core layer adjacent to the first surface.
摘要:
A slider may have a first surface on an air bearing surface (ABS) and a laser recess formed in a second surface of the slider, opposite the first surface. A laser can then be positioned in the laser recess with the laser extending from the slider to a top plane. A stud may be formed adjacent to and separated from the laser on the second surface of the slider with the stud extending from the second surface of the slider to the top plane.
摘要:
An apparatus includes a near field transducer positioned adjacent to an air bearing surface, a first magnetic pole, a heat sink positioned between the first magnetic pole and the near field transducer, and a diffusion barrier positioned between the near field transducer and the first magnetic pole. The diffusion barrier can be positioned adjacent to the magnetic pole or the near field transducer.