公开(公告)号：US20240229221A1

公开(公告)日：2024-07-11

申请号：US18559576

申请日：2022-05-12

Applicant: YEDA RESEARCH AND DEVELOPMENT CO. LTD.

Inventor： Igor LUBOMIRSKY ,  David EHRE ,  Asaf COHEN

IPC: C23C14/06 ,  C23C14/00 ,  C23C14/02 ,  H10N30/06 ,  H10N30/076 ,  H10N30/079 ,  H10N30/20

CPC classification number: C23C14/0617 ,  C23C14/0036 ,  C23C14/021 ,  C23C14/025 ,  H10N30/06 ,  H10N30/076 ,  H10N30/079 ,  H10N30/2042

Abstract: This invention provides a process for the preparation of aluminum scandium nitride films. This invention further provides Caluminum scandium nitride films and layers, and devices and systems comprising aluminum scandium nitride films.