公开(公告)号：US20140197712A1

公开(公告)日：2014-07-17

申请号：US14153325

申请日：2014-01-13

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Takashi YOSHIDA ,  Shigeto IWAI ,  Yoshitaka SASAKI

IPC: H02N11/00

CPC classification number: H02N11/00 ,  H03H3/0072 ,  H03H9/2463 ,  Y10T29/49007

Abstract: A resonant transducer includes a resonator, a resonator electrodes connected to an end part of the resonator, at least one fixed electrode arranged in the vicinity of the resonator, and a buried part formed between the fixed electrode and the resonator electrode. The resonator, the resonator electrodes and the fixed electrode are formed by the same active layer on a substrate.

Abstract translation: 谐振换能器包括谐振器，连接到谐振器的端部的谐振器电极，布置在谐振器附近的至少一个固定电极，以及形成在固定电极和谐振器电极之间的掩埋部分。 谐振器，谐振器电极和固定电极由衬底上相同的有源层形成。