摘要:
A method and apparatus are described that use cell voltage and/or current as monitor to prevent electrochemical deposition (e.g., electroplating) tools from deplating wafers with no or poor metal (e.g., Cu) seed coverage.
摘要:
A method and apparatus are described that use cell voltage and/or current as monitor to prevent electrochemical deposition (e.g., electroplating) tools from deplating wafers with no or poor metal (e.g., Cu) seed coverage. In one embodiment, the voltage of a plating cell including a reference wafer which has substantially complete Cu seed coverage is measured. A reference resistance of the plating cell with the reference wafer is determined. The voltage of the plating cell including a calibration wafer which has no or insufficient seed coverage at its edge is measured. A calibration resistance of the plating cell with the calibration wafer is determined. An error trigger based on a comparison of the reference resistance with the calibration resistance is selected.
摘要:
A method and apparatus are described that use cell voltage and/or current as monitor to prevent electrochemical deposition (e.g., electroplating) tools from deplating wafers with no or poor metal (e.g., Cu) seed coverage.
摘要:
A method and apparatus are described that use cell voltage and/or current as monitor to prevent electrochemical deposition (e.g., electroplating) tools from deplating wafers with no or poor metal (e.g., Cu) seed coverage.
摘要:
An apparatus and associated method for enclosing an environment-sensitive component. An enclosure separates an interior environment inside the enclosure from an external environment outside the enclosure. The enclosure has an environmental control system that captures a contaminant from the internal environment to a filter via a first diffusion path, and captures the contaminant from the external environment to the same filter via a different second diffusion path, the diffusion paths providing substantially different flow resistances to fluids carrying the contaminants to the filter via the respective diffusion paths.
摘要:
The present invention discloses a communication antenna automatic orientation apparatus and method, wherein the apparatus comprises: a target base station geographical storage for storing the corresponding relation between the spatial location information on the air lane and the identifier of a target base station; a sensor for confirming current spatial location information of the aircraft; an aircraft spatial orientation sensor for confirming a current spatial orientation of the aircraft; a master controller for confirming a target direction of a directional antenna according to the current spatial location information, the corresponding relation and the current spatial orientation and sending an instruction carrying the target direction; an automatic antenna directional system for receiving the instruction and driving the directional antenna according to the target direction so as to enable the directional antenna to receive a signal from a ground base station in the target direction; a wide aperture antenna for receiving the signal from the ground base station in omni-direction; and a mobile communication terminal for processing the signal received by the wide aperture antenna and the signal received by the directional antenna.
摘要:
Image search techniques are described. In one or more implementations, images in a search result are ordered based at least in part on similarity of the images, one to another. The search result having the ordered images is provided in response to a search request.
摘要:
A method for customizing a mail history including generating a mail tree composed of all received mails belonging to a same topic; receiving a user input indicating a mail to be replied to and a mail to be referred to which are selected by the user, the mail to be replied to and the mail to be referred to being located on different branches of the mail tree; acquiring a first plurality of mails on a first path from a root mail of the mail tree to a child mail of the mail to be replied to, and a second plurality of mails on a second path from the root mail to a child mail of the mail to be referred to; and merging the first plurality of mails and the second plurality of mails to generate a merging result as the mail history.
摘要:
A system including a memory configured to store a plurality of initial frames of a video signal and a plurality of motion vectors; and a multi-frame interpolator coupled to the memory and including a first output port and a second output port, the frame interpolator configured to generate a first output frame and a second output frame from the initial frames and the motion vectors, to output the first output frame through the first output port and output the second output frame through the second output port.