公开(公告)号：US20070295129A1

公开(公告)日：2007-12-27

申请号：US11762417

申请日：2007-06-13

申请人： Yasuaki SUZUKI ,  Nobuhiko Takeda ,  Kouji Hirao

发明人： Yasuaki SUZUKI ,  Nobuhiko Takeda ,  Kouji Hirao

IPC分类号： F16H55/12 ,  F16H55/22

CPC分类号： F16H55/22 ,  F16H55/06 ,  F16H2055/065 ,  Y10T74/19633 ,  Y10T74/19828 ,  Y10T74/19949 ,  Y10T74/19953

摘要： A resin worm wheel is formed by injection molding and includes a first end and a second end. The worm wheel is adapted to be driven by a worm. The worm wheel further includes: an engaging portion including a plurality of teeth engageable with the worm and a tooth space formed between the neighboring teeth; a first non-engaging portion adjacent to the engaging portion at the first end of the worm wheel and not engaging with the worm; and a first cutout portion formed at the first non-engaging portion continuously from the tooth space, the first cutout portion extending axially.

摘要翻译： 树脂蜗轮通过注射成型形成，并且包括第一端和第二端。 蜗轮适合由蜗杆驱动。 蜗轮还包括：接合部分，其包括可与蜗杆啮合的多个齿和形成在相邻齿之间的齿形空间; 在蜗轮的第一端处与接合部相邻并且不与蜗杆接合的第一非接合部; 以及第一切口部，其从所述齿部空间连续地形成在所述第一非接合部，所述第一切口部沿轴向延伸。

公开(公告)号：US20090056627A1

公开(公告)日：2009-03-05

申请号：US11847962

申请日：2007-08-30

申请人： Mitsutoshi SHUTO ,  Yasushi FUKASAWA ,  Yasuaki SUZUKI

发明人： Mitsutoshi SHUTO ,  Yasushi FUKASAWA ,  Yasuaki SUZUKI

IPC分类号： B05C11/00 ,  G01N27/66 ,  G01R29/12

CPC分类号： C23C16/52 ,  H01L22/20 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method for monitoring plasma-induced damage to a substrate while being processed in a plasma CVD apparatus includes: measuring DC floating potential of the substrate using a detection electrode in contact with the substrate while the substrate is processed in the apparatus; and detecting abnormality as plasma-induced damage based on the measured DC floating potential.

摘要翻译： 一种用于在等离子体CVD装置中处理等离子体对衬底的损伤的监视方法包括：在设备中处理衬底的同时，使用与衬底接触的检测电极测量衬底的DC浮动电位; 并且基于所测量的DC浮动电位来检测作为等离子体引起的损伤的异常。