公开(公告)号：US20060018534A1

公开(公告)日：2006-01-26

申请号：US11152115

申请日：2005-06-15

申请人： Yasushi Nagata ,  Atsushi Imamura ,  Hiroshi Sano

发明人： Yasushi Nagata ,  Atsushi Imamura ,  Hiroshi Sano

IPC分类号： G06K9/34

CPC分类号： G06T7/001

摘要： The present invention provides a technique to prevent increase in defect detection processing volume due to the shape of an object subject to the defect detection. An image of an object under inspection with a plurality of color regions is divided into areas by area segmentation according to colors. From the result of the segmentation, an inspection image representing a shape of a specific region among the plurality of color regions is obtained. The inspection image and a comparison image which is comparable at least in part with the inspection image are then compared to detect defects relating to the specific region.

摘要翻译： 本发明提供一种防止由于缺陷检测对象的形状引起的缺陷检测处理量增加的技术。 用多个颜色区域检查的物体的图像根据颜色被划分为区域分割。 从分割结果可以得到表示多个颜色区域中特定区域的形状的检查图像。 然后将检查图像和至少部分与检查图像相当的比较图像进行比较，以检测与特定区域相关的缺陷。

公开(公告)号：US20050254700A1

公开(公告)日：2005-11-17

申请号：US11102770

申请日：2005-04-11

申请人： Yasushi Nagata ,  Hiroshi Sano ,  Atsushi Imamura ,  Eiji Nishihara

发明人： Yasushi Nagata ,  Hiroshi Sano ,  Atsushi Imamura ,  Eiji Nishihara

IPC分类号： G01B11/00 ,  G01N21/956 ,  G06K9/00 ,  G06T1/00 ,  G06T7/00

CPC分类号： G06T7/0004 ,  G06T2207/30141

摘要： A board (9) is placed on a stage part (20) so that the back surface of the board is opposed to the stage part (20). The stage part cuts off light entering a hole penetrating the board (9) from a side of its back surface which is a reverse surface with respect to its pattern formed surface and has a reflection property which is different from that of the pattern formed surface with respect to an illumination light, and the illumination light is emitted from a light source part (31) onto the pattern formed surface (9a). An image pickup part (33) receives light from the pattern formed surface to acquire an inspection image, and a hole-area specifying part implemented by a computer (4) specifies a hole area in the inspection image, which corresponds to a hole of the board (9), by using only the inspection image as image information, in accordance with criteria of pixel values affected by a reflection state of the illumination light entering a hole penetrating the board (9) and being reflected on the stage part (20). Thus, it is possible to detect an area of a hole on the board (9) by using only the inspection image acquired with a reflected light of the illumination light from the light source part (31).

摘要翻译： 板（9）放置在平台部分（20）上，使得板的后表面与平台部分（20）相对。 舞台部分从其背面的相对于其图案形成表面的反面的一侧切断穿入基板（9）的孔，并具有与图案形成面不同的反射特性， 相对于照明光，照明光从光源部（31）发射到图案形成面（9a）上。 图像拾取部分（33）从图案形成表面接收光以获取检查图像，并且由计算机（4）实现的孔区域指定部分指定检查图像中的与孔的区域相对应的孔面积 （9）中，仅通过仅使用检查图像作为图像信息，根据影响入射穿过基板（9）的孔的照明光的反射状态并被反射在台面部（20）上的像素值的标准， 。 因此，可以通过仅使用由来自光源部分（31）的照明光的反射光获取的检查图像来检测板（9）上的孔的区域。

公开(公告)号：US20050254699A1

公开(公告)日：2005-11-17

申请号：US11079659

申请日：2005-03-15

申请人： Hiroshi Sano ,  Eiji Nishihara ,  Yasushi Nagata ,  Atsushi Imamura

发明人： Hiroshi Sano ,  Eiji Nishihara ,  Yasushi Nagata ,  Atsushi Imamura

IPC分类号： G01B11/24 ,  G01N21/88 ,  G01N21/956 ,  G06K9/00 ,  G06T1/00 ,  G06T5/00 ,  G06T7/00 ,  H05K3/00

CPC分类号： G06T7/001 ,  G06T2207/30141

摘要： In a reference binary image representing a pattern including wires formed on a substrate, an erosion is performed on a specific area having the same pixel value as a pixel value corresponding to a wire area to acquire an eroded image and a dilation is performed on the specific area which remains in the eroded image to almost the same degree as the erosion to acquire an eroded and dilated image. Subsequently, a differential image between the eroded and dilated image and the reference binary image is generated as a wire image representing a wire area. It is thereby possible to easily extract a wire area which is a fine pattern area. By setting respective different defect detection sensitivities for the wire area and the other area on the basis of the wire image and detecting a defect in an inspection image in accordance with the defect detection sensitivities, it is possible to appropriately detect a defect in a pattern on a substrate.

摘要翻译： 在表示包括形成在基板上的线的图案的参考二进制图像中，对具有与对应于导线区域的像素值相同的像素值的特定区域进行侵蚀以获取侵蚀的图像，并且对特定的 保留在侵蚀图像中的区域几乎与侵蚀相同程度以获得侵蚀和扩张的图像。 随后，产生侵蚀和扩张的图像与参考二进制图像之间的差分图像作为表示导线区域的有线图像。 从而可以容易地提取作为精细图案区域的导线区域。 通过基于有线图像对线区域和其他区域设定不同的缺陷检测灵敏度，根据缺陷检测灵敏度检测检查图像中的缺陷，可以适当地检测图案上的缺陷 底物。

公开(公告)号：US20060018540A1

公开(公告)日：2006-01-26

申请号：US11152506

申请日：2005-06-15

申请人： Atsushi Imamura ,  Hiroshi Sano ,  Eiji Nishihara ,  Junichi Shiomi

发明人： Atsushi Imamura ,  Hiroshi Sano ,  Eiji Nishihara ,  Junichi Shiomi

IPC分类号： G06K9/34

CPC分类号： G06K9/2036 ,  G06T7/0006 ,  G06T7/90 ,  G06T2207/10152 ,  G06T2207/30141

摘要： The present invention provides a technique to identify layout of surface regions of an object by image area segmentation. A plurality of images is acquired by imaging an object under a plurality of mutually different illumination conditions. By performing area segmentation on this plurality of images, the layouts of the plurality of image areas which is different from the layout of the object surface regions is obtained. Then, the layout of the surface regions on the object is identified based on the layouts of the plurality of image areas.

公开(公告)号：US20050259874A1

公开(公告)日：2005-11-24

申请号：US11098388

申请日：2005-04-05

申请人： Hiroshi Sano ,  Yumi Hayakawa ,  Atsushi Imamura ,  Eiji Nishihara

发明人： Hiroshi Sano ,  Yumi Hayakawa ,  Atsushi Imamura ,  Eiji Nishihara

IPC分类号： G01N21/956 ,  G01B11/03 ,  G06K9/00 ,  G06K9/03 ,  G06K9/68 ,  G06T1/00 ,  G06T7/00 ,  G06T11/80

CPC分类号： G06T7/001 ,  G06K9/033 ,  G06T2207/30141

摘要： A pattern-element extractor (51), one of functions implemented by a computer, extracts a plurality of pattern elements from a reference image, a region of which is displayed on a display (45). An input part (46) accepts an operator's selection of one out of the plurality of pattern elements as a reference pattern element, and a distinguishability checker (52) checks whether the selected pattern element is distinguishable from the other pattern elements and usable as the reference pattern element for pattern matching. A result of the check is notified to the operator, and an appropriate one out of the pattern elements in the reference image can be selected as the reference pattern element, by referring to the result of the check made by the distinguishability checker (52). Thus, misrecognition of the reference pattern element used for detecting a position of a target image relative to the reference image in pattern matching is prevented.

摘要翻译： 由计算机实现的功能之一的图形元素提取器（51）从参考图像中提取多个图案元素，参考图像的区域显示在显示器（45）上。 输入部分（46）接受操作员对多个图案元素中的一个的选择作为参考图案元素，并且可区分性检查器（52）检查所选择的图案元素是否与其他图案元素区分开并可用作参考 图案元素用于模式匹配。 检查结果被通知给操作者，并且可以通过参考可区分性检查器（52）进行的检查的结果，将参考图像中的图案元素中的适当的一个选择为参考图案元素。 因此，防止在模式匹配中用于检测目标图像相对于参考图像的位置的参考图案元素的误识别。

公开(公告)号：US07463763B2

公开(公告)日：2008-12-09

申请号：US11098388

申请日：2005-04-05

申请人： Hiroshi Sano ,  Yumi Hayakawa ,  Atsushi Imamura ,  Eiji Nishihara

发明人： Hiroshi Sano ,  Yumi Hayakawa ,  Atsushi Imamura ,  Eiji Nishihara

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G06K9/033 ,  G06T2207/30141

摘要： A pattern-element extractor (51), one of functions implemented by a computer, extracts a plurality of pattern elements from a reference image, a region of which is displayed on a display (45). An input part (46) accepts an operator's selection of one out of the plurality of pattern elements as a reference pattern element, and a distinguishability checker (52) checks whether the selected pattern element is distinguishable from the other pattern elements and usable as the reference pattern element for pattern matching. A result of the check is notified to the operator, and an appropriate one out of the pattern elements in the reference image can be selected as the reference pattern element, by referring to the result of the check made by the distinguishability checker (52). Thus, misrecognition of the reference pattern element used for detecting a position of a target image relative to the reference image in pattern matching is prevented.

摘要翻译： 由计算机实现的功能之一的图形元素提取器（51）从参考图像中提取多个图案元素，参考图像的区域显示在显示器（45）上。 输入部分（46）接受操作员对多个图案元素中的一个的选择作为参考图案元素，并且可区分性检查器（52）检查所选择的图案元素是否与其他图案元素区分开并可用作参考 图案元素用于模式匹配。 检查结果被通知给操作者，并且可以通过参考可区分性检查器（52）进行的检查的结果，将参考图像中的图案元素中的适当的一个选择为参考图案元素。 因此，防止在模式匹配中用于检测目标图像相对于参考图像的位置的参考图案元素的误识别。

公开(公告)号：US07031510B2

公开(公告)日：2006-04-18

申请号：US10077962

申请日：2002-02-20

申请人： Atsushi Imamura ,  Hiroshi Sano ,  Junichi Shiomi

发明人： Atsushi Imamura ,  Hiroshi Sano ,  Junichi Shiomi

IPC分类号： G06K9/00

CPC分类号： G06K9/4652 ,  G06T7/11 ,  G06T7/90 ,  G06T2207/30141

摘要： A color image of a circuit board is divided into respective color regions. Plural representative colors are set, and angle indices and distance indices are calculated for each pixel color in the color image in a predetermined color space. The angle indices for a particular pixel color represent angles between an individual color vector representing the particular pixel color and plural representative color vectors of the plural representative colors. The distance indices for a particular pixel color represent distances between the particular pixel color and the plural representative colors. Composite distance indices are then calculated for each pixel color in the color image, based on the distance indices and the angle indices. Each pixel in the color image is classified into plural representative color regions associated with the plural representative colors according to the composite distance indices, thereby dividing the image region of the color image into the plural representative color regions.

公开(公告)号：US07480407B2

公开(公告)日：2009-01-20

申请号：US11152506

申请日：2005-06-15

申请人： Atsushi Imamura ,  Hiroshi Sano ,  Eiji Nishihara ,  Junichi Shiomi

发明人： Atsushi Imamura ,  Hiroshi Sano ,  Eiji Nishihara ,  Junichi Shiomi

IPC分类号： G06K9/34

CPC分类号： G06K9/2036 ,  G06T7/0006 ,  G06T7/90 ,  G06T2207/10152 ,  G06T2207/30141

摘要： The present invention provides a technique to identify layout of surface regions of an object by image area segmentation. A plurality of images is acquired by imaging an object under a plurality of mutually different illumination conditions. By performing area segmentation on this plurality of images, the layouts of the plurality of image areas which is different from the layout of the object surface regions is obtained. Then, the layout of the surface regions on the object is identified based on the layouts of the plurality of image areas.

摘要翻译： 本发明提供一种通过图像区域分割来识别对象的表面区域的布局的技术。 通过在多个相互不同的照明条件下成像物体来获取多个图像。 通过对该多个图像执行区域分割，获得与对象表面区域的布局不同的多个图像区域的布局。 然后，基于多个图像区域的布局来识别对象上的表面区域的布局。

公开(公告)号：US20120234735A1

公开(公告)日：2012-09-20

申请号：US13418970

申请日：2012-03-13

申请人： Hideo ICHIKAWA ,  Kaori Ozeki ,  Tatsushi Umayahara ,  Takashi Ono ,  Masayoshi Suzuki ,  Teruo Shibata ,  Keiichi Yano ,  Masato Suzuki ,  Eiichi Masushio ,  Hiroshi Sano ,  Yusuke Uchida ,  Junji Yamabe ,  Seiji Terazawa ,  Masashi Hasegawa

发明人： Hideo ICHIKAWA ,  Kaori Ozeki ,  Tatsushi Umayahara ,  Takashi Ono ,  Masayoshi Suzuki ,  Teruo Shibata ,  Keiichi Yano ,  Masato Suzuki ,  Eiichi Masushio ,  Hiroshi Sano ,  Yusuke Uchida ,  Junji Yamabe ,  Seiji Terazawa ,  Masashi Hasegawa

IPC分类号： B07B1/46

CPC分类号： B07B1/06 ,  B07B1/55 ,  B07B4/08 ,  B07B13/16 ,  B65G65/48 ,  B65G65/4809 ,  G03G9/08 ,  G03G9/0817

摘要： A sieving device including a hollow cylindrical body, a filter disposed at a bottom portion of the hollow cylindrical body, and a blade configured to rotate in close proximity to the filter around a rotation axis thereof crossing the filter to thereby stir powder supplied to the hollow cylindrical body.

摘要翻译： 一种筛分装置，包括中空圆柱体，设置在中空圆柱体的底部的过滤器和一个叶片，其构造成围绕过滤器的旋转轴线紧邻过滤器旋转，从而搅拌供应到中空的粉末 圆柱体。

公开(公告)号：US08000636B2

公开(公告)日：2011-08-16

申请号：US12018611

申请日：2008-01-23

申请人： Hiroshi Sano

发明人： Hiroshi Sano

IPC分类号： G03G15/08 ,  G03G15/00

CPC分类号： G03G15/0879 ,  G03G15/0855 ,  G03G15/0865 ,  G03G2215/0875

摘要： A particle supply apparatus for supplying particles to a supply destination is disclosed that includes a particle supply apparatus main frame, a particle accommodating unit that accommodates the particles, a gas spouting unit that is arranged at a bottom portion of the particle accommodating unit and is configured to spout gas toward the particles, and a conveying mechanism that applies suction to the particles accommodated in the particle accommodating unit and conveys the particles toward the supply destination. The particle accommodating unit is installed in the particle supply apparatus main frame and is arranged to rest on a face at the bottom portion side during operation, and the particle accommodating unit is detached from the particle supply apparatus main frame and is arranged to rest on a face other than the face at the bottom portion side during transportation.

摘要翻译： 公开了一种用于向供应目的地供应颗粒的颗粒供应装置，其包括颗粒供应装置主框架，容纳颗粒的颗粒容纳单元，布置在颗粒容纳单元的底部的气体喷射单元， 将气体喷射到颗粒，以及输送机构，其向容纳在颗粒容纳单元中的颗粒施加吸力，并将颗粒输送到供给目的地。 颗粒容纳单元安装在颗粒供应装置主框架中，并且被布置成在操作期间搁置在底部侧的表面上，并且颗粒容纳单元从颗粒供应装置主框架脱离并且被布置成搁置在 在运输过程中在底部侧的面以外的面。