公开(公告)号：US20060018540A1

公开(公告)日：2006-01-26

申请号：US11152506

申请日：2005-06-15

申请人： Atsushi Imamura ,  Hiroshi Sano ,  Eiji Nishihara ,  Junichi Shiomi

发明人： Atsushi Imamura ,  Hiroshi Sano ,  Eiji Nishihara ,  Junichi Shiomi

IPC分类号： G06K9/34

CPC分类号： G06K9/2036 ,  G06T7/0006 ,  G06T7/90 ,  G06T2207/10152 ,  G06T2207/30141

摘要： The present invention provides a technique to identify layout of surface regions of an object by image area segmentation. A plurality of images is acquired by imaging an object under a plurality of mutually different illumination conditions. By performing area segmentation on this plurality of images, the layouts of the plurality of image areas which is different from the layout of the object surface regions is obtained. Then, the layout of the surface regions on the object is identified based on the layouts of the plurality of image areas.

公开(公告)号：US07480407B2

公开(公告)日：2009-01-20

申请号：US11152506

申请日：2005-06-15

申请人： Atsushi Imamura ,  Hiroshi Sano ,  Eiji Nishihara ,  Junichi Shiomi

发明人： Atsushi Imamura ,  Hiroshi Sano ,  Eiji Nishihara ,  Junichi Shiomi

IPC分类号： G06K9/34

CPC分类号： G06K9/2036 ,  G06T7/0006 ,  G06T7/90 ,  G06T2207/10152 ,  G06T2207/30141

摘要： The present invention provides a technique to identify layout of surface regions of an object by image area segmentation. A plurality of images is acquired by imaging an object under a plurality of mutually different illumination conditions. By performing area segmentation on this plurality of images, the layouts of the plurality of image areas which is different from the layout of the object surface regions is obtained. Then, the layout of the surface regions on the object is identified based on the layouts of the plurality of image areas.

摘要翻译： 本发明提供一种通过图像区域分割来识别对象的表面区域的布局的技术。 通过在多个相互不同的照明条件下成像物体来获取多个图像。 通过对该多个图像执行区域分割，获得与对象表面区域的布局不同的多个图像区域的布局。 然后，基于多个图像区域的布局来识别对象上的表面区域的布局。

公开(公告)号：US07003148B2

公开(公告)日：2006-02-21

申请号：US10086877

申请日：2002-03-04

申请人： Junichi Shiomi ,  Hiroki Fujimoto ,  Eiji Nishihara ,  Atsushi Imamura

发明人： Junichi Shiomi ,  Hiroki Fujimoto ,  Eiji Nishihara ,  Atsushi Imamura

IPC分类号： G06K9/00

CPC分类号： G06T7/40 ,  G06T7/0002 ,  G06T7/0004 ,  G06T7/41 ,  G06T2207/30148 ,  Y10S438/959

摘要： A two-dimensional image of a substrate surface targeted for polishing is periodically picked up, and the image is analyzed to obtain an entropy H1, H2 of the two-dimensional image. An end point of polishing is then determined according to the entropy H1, H2. Alternatively, other image characteristic value such as a difference statistic of the image may be employed instead of the entropy H1, H2.

摘要翻译： 周期性地拾取用于抛光的基板表面的二维图像，并分析图像以获得二维图像的熵H 1，H 2。 然后根据熵H 1，H 2确定抛光的终点。 或者，可以使用诸如图像的差异统计量的其他图像特征值来代替熵H 1，H 2。

公开(公告)号：US07463763B2

公开(公告)日：2008-12-09

申请号：US11098388

申请日：2005-04-05

申请人： Hiroshi Sano ,  Yumi Hayakawa ,  Atsushi Imamura ,  Eiji Nishihara

发明人： Hiroshi Sano ,  Yumi Hayakawa ,  Atsushi Imamura ,  Eiji Nishihara

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G06K9/033 ,  G06T2207/30141

摘要： A pattern-element extractor (51), one of functions implemented by a computer, extracts a plurality of pattern elements from a reference image, a region of which is displayed on a display (45). An input part (46) accepts an operator's selection of one out of the plurality of pattern elements as a reference pattern element, and a distinguishability checker (52) checks whether the selected pattern element is distinguishable from the other pattern elements and usable as the reference pattern element for pattern matching. A result of the check is notified to the operator, and an appropriate one out of the pattern elements in the reference image can be selected as the reference pattern element, by referring to the result of the check made by the distinguishability checker (52). Thus, misrecognition of the reference pattern element used for detecting a position of a target image relative to the reference image in pattern matching is prevented.

摘要翻译： 由计算机实现的功能之一的图形元素提取器（51）从参考图像中提取多个图案元素，参考图像的区域显示在显示器（45）上。 输入部分（46）接受操作员对多个图案元素中的一个的选择作为参考图案元素，并且可区分性检查器（52）检查所选择的图案元素是否与其他图案元素区分开并可用作参考 图案元素用于模式匹配。 检查结果被通知给操作者，并且可以通过参考可区分性检查器（52）进行的检查的结果，将参考图像中的图案元素中的适当的一个选择为参考图案元素。 因此，防止在模式匹配中用于检测目标图像相对于参考图像的位置的参考图案元素的误识别。

公开(公告)号：US20050259874A1

公开(公告)日：2005-11-24

申请号：US11098388

申请日：2005-04-05

申请人： Hiroshi Sano ,  Yumi Hayakawa ,  Atsushi Imamura ,  Eiji Nishihara

发明人： Hiroshi Sano ,  Yumi Hayakawa ,  Atsushi Imamura ,  Eiji Nishihara

IPC分类号： G01N21/956 ,  G01B11/03 ,  G06K9/00 ,  G06K9/03 ,  G06K9/68 ,  G06T1/00 ,  G06T7/00 ,  G06T11/80

CPC分类号： G06T7/001 ,  G06K9/033 ,  G06T2207/30141

摘要： A pattern-element extractor (51), one of functions implemented by a computer, extracts a plurality of pattern elements from a reference image, a region of which is displayed on a display (45). An input part (46) accepts an operator's selection of one out of the plurality of pattern elements as a reference pattern element, and a distinguishability checker (52) checks whether the selected pattern element is distinguishable from the other pattern elements and usable as the reference pattern element for pattern matching. A result of the check is notified to the operator, and an appropriate one out of the pattern elements in the reference image can be selected as the reference pattern element, by referring to the result of the check made by the distinguishability checker (52). Thus, misrecognition of the reference pattern element used for detecting a position of a target image relative to the reference image in pattern matching is prevented.

摘要翻译： 由计算机实现的功能之一的图形元素提取器（51）从参考图像中提取多个图案元素，参考图像的区域显示在显示器（45）上。 输入部分（46）接受操作员对多个图案元素中的一个的选择作为参考图案元素，并且可区分性检查器（52）检查所选择的图案元素是否与其他图案元素区分开并可用作参考 图案元素用于模式匹配。 检查结果被通知给操作者，并且可以通过参考可区分性检查器（52）进行的检查的结果，将参考图像中的图案元素中的适当的一个选择为参考图案元素。 因此，防止在模式匹配中用于检测目标图像相对于参考图像的位置的参考图案元素的误识别。

公开(公告)号：US20050254700A1

公开(公告)日：2005-11-17

申请号：US11102770

申请日：2005-04-11

申请人： Yasushi Nagata ,  Hiroshi Sano ,  Atsushi Imamura ,  Eiji Nishihara

发明人： Yasushi Nagata ,  Hiroshi Sano ,  Atsushi Imamura ,  Eiji Nishihara

IPC分类号： G01B11/00 ,  G01N21/956 ,  G06K9/00 ,  G06T1/00 ,  G06T7/00

CPC分类号： G06T7/0004 ,  G06T2207/30141

摘要： A board (9) is placed on a stage part (20) so that the back surface of the board is opposed to the stage part (20). The stage part cuts off light entering a hole penetrating the board (9) from a side of its back surface which is a reverse surface with respect to its pattern formed surface and has a reflection property which is different from that of the pattern formed surface with respect to an illumination light, and the illumination light is emitted from a light source part (31) onto the pattern formed surface (9a). An image pickup part (33) receives light from the pattern formed surface to acquire an inspection image, and a hole-area specifying part implemented by a computer (4) specifies a hole area in the inspection image, which corresponds to a hole of the board (9), by using only the inspection image as image information, in accordance with criteria of pixel values affected by a reflection state of the illumination light entering a hole penetrating the board (9) and being reflected on the stage part (20). Thus, it is possible to detect an area of a hole on the board (9) by using only the inspection image acquired with a reflected light of the illumination light from the light source part (31).

摘要翻译： 板（9）放置在平台部分（20）上，使得板的后表面与平台部分（20）相对。 舞台部分从其背面的相对于其图案形成表面的反面的一侧切断穿入基板（9）的孔，并具有与图案形成面不同的反射特性， 相对于照明光，照明光从光源部（31）发射到图案形成面（9a）上。 图像拾取部分（33）从图案形成表面接收光以获取检查图像，并且由计算机（4）实现的孔区域指定部分指定检查图像中的与孔的区域相对应的孔面积 （9）中，仅通过仅使用检查图像作为图像信息，根据影响入射穿过基板（9）的孔的照明光的反射状态并被反射在台面部（20）上的像素值的标准， 。 因此，可以通过仅使用由来自光源部分（31）的照明光的反射光获取的检查图像来检测板（9）上的孔的区域。

公开(公告)号：US20050254699A1

公开(公告)日：2005-11-17

申请号：US11079659

申请日：2005-03-15

申请人： Hiroshi Sano ,  Eiji Nishihara ,  Yasushi Nagata ,  Atsushi Imamura

发明人： Hiroshi Sano ,  Eiji Nishihara ,  Yasushi Nagata ,  Atsushi Imamura

IPC分类号： G01B11/24 ,  G01N21/88 ,  G01N21/956 ,  G06K9/00 ,  G06T1/00 ,  G06T5/00 ,  G06T7/00 ,  H05K3/00

CPC分类号： G06T7/001 ,  G06T2207/30141

摘要： In a reference binary image representing a pattern including wires formed on a substrate, an erosion is performed on a specific area having the same pixel value as a pixel value corresponding to a wire area to acquire an eroded image and a dilation is performed on the specific area which remains in the eroded image to almost the same degree as the erosion to acquire an eroded and dilated image. Subsequently, a differential image between the eroded and dilated image and the reference binary image is generated as a wire image representing a wire area. It is thereby possible to easily extract a wire area which is a fine pattern area. By setting respective different defect detection sensitivities for the wire area and the other area on the basis of the wire image and detecting a defect in an inspection image in accordance with the defect detection sensitivities, it is possible to appropriately detect a defect in a pattern on a substrate.

摘要翻译： 在表示包括形成在基板上的线的图案的参考二进制图像中，对具有与对应于导线区域的像素值相同的像素值的特定区域进行侵蚀以获取侵蚀的图像，并且对特定的 保留在侵蚀图像中的区域几乎与侵蚀相同程度以获得侵蚀和扩张的图像。 随后，产生侵蚀和扩张的图像与参考二进制图像之间的差分图像作为表示导线区域的有线图像。 从而可以容易地提取作为精细图案区域的导线区域。 通过基于有线图像对线区域和其他区域设定不同的缺陷检测灵敏度，根据缺陷检测灵敏度检测检查图像中的缺陷，可以适当地检测图案上的缺陷 底物。

公开(公告)号：US20050206907A1

公开(公告)日：2005-09-22

申请号：US11057216

申请日：2005-02-15

申请人： Hiroki Fujimoto ,  Noriyuki Kondo ,  Eiji Nishihara

发明人： Hiroki Fujimoto ,  Noriyuki Kondo ,  Eiji Nishihara

IPC分类号： G01B9/02 ,  G01B11/06 ,  G01N21/27

CPC分类号： G01B11/0625

摘要： A film thickness measurement apparatus has an image pickup part (32) for acquiring a plurality of single-band images corresponding to a plurality of wavelengths, and the image pickup part (32) acquires a plurality of reference single-band images representing a pattern on a reference substrate. A correction factor setting part (51) performs setting of a plurality of correction factors in accordance with distances from a specified pixel by using a plurality of reference single-band images. Subsequently, the image pickup part (32) acquires a plurality of measurement single-band images representing a pattern on an objective substrate and corrects a value of the specified pixel for each of a plurality of measurement single-band images by using the value of the specified pixel and values of pixels surrounding the specified pixel and the correction factors. A spectral reflectance calculation part (52) thereby calculates a reflectance at a measurement point on the objective substrate which corresponds to the specified pixel on the basis of the corrected value of the specified pixel with high accuracy.

摘要翻译： 膜厚测量装置具有用于获取对应于多个波长的多个单频带图像的图像拾取部分（32），并且图像拾取部分（32）获取表示图案上的多个参考单带图像 参考基板。 校正因子设定部（51）通过使用多个基准单频带图像，根据与指定像素的距离来进行多个校正因子的设定。 随后，图像拾取部分（32）获取表示目标基板上的图案的多个测量单波段图像，并通过使用该多个测量单波段图像的值来校正每个测量单波段图像的指定像素的值 指定的像素和指定像素周围的像素的值以及校正因子。 光谱反射率计算部件（52）由此基于指定像素的校正值高精度地计算对应于指定像素的物镜基板上的测量点的反射率。

公开(公告)号：US07206074B2

公开(公告)日：2007-04-17

申请号：US11057216

申请日：2005-02-15

申请人： Hiroki Fujimoto ,  Noriyuki Kondo ,  Eiji Nishihara

发明人： Hiroki Fujimoto ,  Noriyuki Kondo ,  Eiji Nishihara

IPC分类号： G01B9/02 ,  G01B11/02 ,  G01B11/06 ,  G01J3/45

CPC分类号： G01B11/0625

摘要： A film thickness measurement apparatus has an image pickup part (32) for acquiring a plurality of single-band images corresponding to a plurality of wavelengths, and the image pickup part (32) acquires a plurality of reference single-band images representing a pattern on a reference substrate. A correction factor setting part (51) performs setting of a plurality of correction factors in accordance with distances from a specified pixel by using a plurality of reference single-band images. Subsequently, the image pickup part (32) acquires a plurality of measurement single-band images representing a pattern on an objective substrate and corrects a value of the specified pixel for each of a plurality of measurement single-band images by using the value of the specified pixel and values of pixels surrounding the specified pixel and the correction factors. A spectral reflectance calculation part (52) thereby calculates a reflectance at a measurement point on the objective substrate which corresponds to the specified pixel on the basis of the corrected value of the specified pixel with high accuracy.

摘要翻译： 膜厚测量装置具有用于获取对应于多个波长的多个单频带图像的图像拾取部分（32），并且图像拾取部分（32）获取表示图案上的多个参考单带图像 参考基板。 校正因子设定部（51）通过使用多个基准单频带图像，根据与指定像素的距离来进行多个校正因子的设定。 随后，图像拾取部分（32）获取表示目标基板上的图案的多个测量单波段图像，并通过使用该多个测量单波段图像的值来校正每个测量单波段图像的指定像素的值 指定的像素和指定像素周围的像素的值以及校正因子。 光谱反射率计算部件（52）由此基于指定像素的校正值高精度地计算对应于指定像素的物镜基板上的测量点的反射率。