Substrate support structure and method of forming the same

    公开(公告)号:US11483924B2

    公开(公告)日:2022-10-25

    申请号:US17318111

    申请日:2021-05-12

    IPC分类号: H05K1/02

    摘要: A substrate support structure includes: a substrate support including: a support body; and a protrusion including a base portion and a leading-end portion, the protrusion protruding from the support body; and a substrate having: a substrate body; a through hole provided at the substrate body; and a protruded portion surrounding the through hole, the protruded portion protruding from a first face of the substrate body, in which the base portion of the protrusion passes through the through hole, and the leading-end portion protrudes from the first face of the substrate body inside the protruded portion and engages with the substrate body such that the through hole is covered.