公开(公告)号：US20150069667A1

公开(公告)日：2015-03-12

申请号：US13987879

申请日：2013-09-12

申请人： Yi Li ,  Jieran Li ,  Wen Lu

发明人： Yi Li ,  Jieran Li ,  Wen Lu

IPC分类号： C23C14/46 ,  C23C14/08 ,  C23C14/14 ,  C23C14/00

CPC分类号： C23C14/0005 ,  C23C14/024

摘要： Embodiments of present invention provide a method of forming nano-parts through vacuum coating technology. The method includes creating a set of openings in a substrate, the set of openings having a set of shapes that are complimentary to shapes of a set of nano-parts and the nano-parts having a size between 1 nm and 1000 nm; lining the set of openings with a thin layer of oleic acid of a single molecule thickness; depositing a metal-oxide material inside the set of openings to form the set of nano-parts; immersing the substrate together with the set of nano-parts in a solution; applying a supersonic vibration to the substrate via the solution causing the set of nano-parts to detach from the substrate; and separating the set of nano-parts from the substrate.

摘要翻译： 本发明的实施例提供了一种通过真空镀膜技术形成纳米零件的方法。 该方法包括在基底中形成一组开口，该组开口具有与一组纳米部分的形状互补的一组形状，并且纳米部分的尺寸在1nm和1000nm之间; 用单分子厚度的薄层油酸衬套该组开口; 在该组开口内沉积金属氧化物材料以形成该组纳米零件; 将衬底与该组纳米零件一起浸入溶液中; 通过溶液对衬底施加超音速振动，使得该组纳米部分与衬底分离; 并将该组纳米部分与基底分离。