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1.发明授权Ion-plating apparatus having an h.f. electrode for providing an h.f. glow discharge region 失效具有h.f.的离子镀设备 用于提供h.f.的电极 辉光放电区域
公开(公告)号：US3962988A
公开(公告)日：1976-06-15
申请号：US447260
申请日：1974-03-01
CPC分类号： C23C14/32
摘要： Apparatus for coating a substrate with a material comprises means for providing an h.f. glow discharge region adjacent to a source for the material. The h.f. glow discharge ionizes the particles of the material of the source evaporated therefrom, instead of a conventional d.c. discharge produced by a d.c. electric field provided between the source and substrate. The h.f. glow discharge region providing means may comprise an h.f. electrode disposed in a gas-filled space of the apparatus between the evaporation source and the substrate and means for applying an h.f. electric voltage between the h.f. electrode and the evaporation source.
摘要翻译： 用于用材料涂覆基材的装置包括用于提供h.f.的装置。 与源材料相邻的辉光放电区域。 h.f. 辉光放电使从其中蒸发的源的材料的颗粒电离，而不是常规的直流。 由直流电产生的放电 源极和衬底之间提供电场。 h.f. 辉光放电区域提供装置可包括h.f. 设置在蒸发源和衬底之间的设备的气体填充空间中的电极以及用于施加h.f.的装置。 h.f.之间的电压 电极和蒸发源。
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公开(公告)号：US5258886A
公开(公告)日：1993-11-02
申请号：US900372
申请日：1992-06-18
CPC分类号： H01G4/206 , Y10T29/435
摘要： A thin film capacitor composed of a hybrid dielectric thin film that is sandwiched by a pair of electrodes. The hybrid dielectric thin film is obtained by complexing or accumulating first and second regions. The first region is derived from an ion plating source and the second region is derived from another ion plating source containing an auxiliary material to be coupled with the first region, both being obtained through an ion plating process. The use of the auxiliary material ensures a pinhole-free hybrid dielectric thin film.
摘要翻译： 由由一对电极夹持的混合电介质薄膜构成的薄膜电容器。 混合电介质薄膜通过使第一和第二区域络合或累积来获得。 第一区域源自离子电镀源，第二区域源自含有与第一区域耦合的辅助材料的另一个离子电镀源，两者均通过离子电镀工艺获得。 辅助材料的使用确保了无针孔的混合电介质薄膜。
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