Eddy current based method for coating thickness measurement
    1.
    发明授权
    Eddy current based method for coating thickness measurement 有权
    基于涡流的涂层厚度测量方法

    公开(公告)号:US09377287B2

    公开(公告)日:2016-06-28

    申请号:US13298887

    申请日:2011-11-17

    摘要: A method of configuring an eddy current detector to measure a thickness of a coating on a substrate includes measuring an impedance of the coated substrate, and establishing an impedance plane plot using a computer. The method may also include determining a rotation angle. The rotation angle may be an angle of rotation of the impedance plane plot that will make the inductive reactance component of the impedance substantially insensitive to substrate electrical conductivity within a coating thickness range. The method may further include establishing a calibration curve that is substantially insensitive to substrate electrical conductivity using the rotation angle. The calibration curve may be a curve that relates the inductive reactance component of the impedance to coating thickness.

    摘要翻译: 配置涡电流检测器以测量衬底上的涂层的厚度的方法包括测量涂覆的衬底的阻抗,以及使用计算机建立阻抗平面图。 该方法还可以包括确定旋转角度。 旋转角度可以是阻抗平面图的旋转角度,其将使得阻抗的感抗分量对涂层厚度范围内的基板导电性基本上不敏感。 该方法可以进一步包括使用旋转角度建立对衬底导电性基本上不敏感的校准曲线。 校准曲线可以是将阻抗的感抗分量与涂层厚度相关联的曲线。