摘要:
A tube joint is described which facilitates the connection of tubes having different internal diameters or calibers, simply by exchanging a nut member, an insert bush and a collar member for another nut member, another insert bush and another collar member, respectively, having sizes which are suitable for the tube which is to be connected to the tube joint, and in a state in which the joint body is connected to a fluid pressure apparatus.
摘要:
A suck back valve is proposed, comprising a suck back mechanism for sucking a coating liquid inside a fluid passage under a negative pressure action of a diaphragm displaced by a pilot pressure, an ON/OFF valve for opening and closing the fluid passage under action of the pilot pressure, and a flow amount control device for controlling the pilot pressure supplied to the ON/OFF valve.
摘要:
An insert section of an insert member is inserted into a tube member in a state in which the insert member is detached from a recess to form a diametrally expanded section on the tube member. Subsequently, the insert member is fitted to the recess to install the tube member to the recess. At this stage, an outer circumferential surface of an expanded section of the insert member tightly contacts with an inner circumferential surface of the recess to effect the sealing function. Subsequently, a tapered section and an outer circumferential surface of the tube member are resin-welded by using a welding material. Thus, the tube member is prevented from disengagement from a body.
摘要:
A suck back valve is proposed which prevents displacement of a diaphragm due to pressure of a supply fluid, together with alleviating concern of changes in the amount of supply fluid which is to be sucked, and enabling ease of installation by making compact the system which employs the suck back valve. A diaphragm is displaced in the direction of arrow A under an activation operation of a linear voice coil type luffing device. Compressed air is introduced into a chamber, wherein the diaphragm is supported under an applied pressure. A coating liquid which is introduced through a fluid passage is supplied onto a semiconductor wafer from a nozzle. When an ON/OFF valve is activated and supply of the coating liquid is prevented, together with activating the linear voice coil luffing device and causing displacement of a plunger in the direction of arrow B, a poppet valve is displaced so that compressed air inside the chamber is output from a fluid output passage. Upon further displacement of the plunger the diaphragm is displaced, whereby the coating liquid is sucked, and any coating liquid in the nozzle is returned in the direction of arrow D.
摘要:
A suck back valve is equipped with a coupling having a fluid passage with a first port formed in one end, and a second port formed in another end thereof, a suck back mechanism for sucking a pressurized fluid inside the fluid passage under a displacement action of a second diaphragm which is displaced by a pilot pressure, and an ON/OFF valve disposed coaxially with the second diaphragm for opening and closing the fluid passage by displacement and movement thereof with the second diaphragm.
摘要:
A suck back valve comprises a valve body including a fluid passage having a first port formed at one end and a second port formed at the other end, and an air supply port for introducing a pressurized fluid; a displacement mechanism provided displaceably at the inside of the valve body, for making displacement in accordance with an action of the pressurized fluid introduced from the air port; a first diaphragm coupled to the displacement mechanism, for making displacement integrally with the displacement mechanism; and a seat section provided to face to the fluid passage, for seating the first diaphragm or making separation from the first diaphragm.
摘要:
A suck back valve includes a fitting having a fluid passage formed with a first port at one end thereof and a second port at another end, a valve actuator having a suck back mechanism for sucking a fluid from inside the fluid passage according to a negative pressure action of a diaphragm displaced by a pilot pressure, and first and second electromagnetic valves which increase/reduce the pilot pressure supplied to a diaphragm chamber in accordance with supply and discharge actions. A controller is provided for energizing and deenergizing the first and second electromagnetic valves, wherein said fitting, said actuator and said controller are assembled together as an integral unit.
摘要:
A suck back valve is proposed, comprising a suck back mechanism for sucking a coating liquid inside a fluid passage under a negative pressure action of a third diaphragm displaced by a pilot pressure, an ON/OFF valve for opening and closing the fluid passage under action of the same pilot pressure which is supplied to the suck back mechanism, and a fluid passage switching element for switching the pilot pressure supplied respectively to the suck back mechanism and to the ON/OFF valve.
摘要:
A two-way valve has a poppet valve displaceably disposed in a bonnet for selectively opening and closing a communication passage between primary and secondary ports, and a resilient member disposed in a diaphragm chamber defined between the bonnet and the poppet valve and resiliently deformable for dampening a load applied to a diaphragm of the poppet valve which is exposed to the communication passage.
摘要:
When an insert member is inserted into a fluid passage of a fluid tube, the fluid tube is diametrically enlarged by a tapered section. When a female thread of a nut member is meshed with a male thread of a main body section, first and second edge sections are engaged so that they bite into the outer circumference of the fluid tube diametrally enlarged by the tapered section. Accordingly, various fluid tubes, which are identical in outer diameter size but which are slightly different in wall thickness, are reliably prevented from disengagement from a tube joint.