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公开(公告)号：US11880213B2
公开(公告)日：2024-01-23
申请号：US17320733
申请日：2021-05-14
CPC分类号： G05D7/0635 , B05C11/1026 , H01L21/6708 , H01L21/67023 , H01L21/67253 , G01F1/661 , G01M3/38
摘要： A substrate liquid processing apparatus includes: at least one liquid pipe through which a processing liquid flows; a discharge nozzle configured to discharge the processing liquid supplied via the at least one liquid pipe; a valve mechanism configured to regulate a flow of the processing liquid in the at least one liquid pipe; and a liquid detection sensor configured to detect presence or absence of the processing liquid in the at least one liquid pipe, wherein in a state in which the valve mechanism is operating so that the processing liquid in the at least one liquid pipe is located at an upstream of a first pipe measurement site of the at least one liquid pipe, the liquid detection sensor detects the presence or absence of the processing liquid at the first pipe measurement site located at a first measurement point.
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2.发明公开公开(公告)号：US20240017285A1
公开(公告)日：2024-01-18
申请号：US18253247
申请日：2021-11-10
发明人： Martin Wiehe , Martin Eilts , Jan-Christian Walter
CPC分类号： B05C11/1026 , F16K31/0675 , B05C11/1034 , F16K37/0041
摘要： An application device for applying a flowable medium onto a substrate, having a discharge valve having a closure member which, in its open position, releases a metering opening of the discharge valve, such that the flowable medium can flow through the metering opening in the direction of the substrate, wherein the closure member is movable by an electromagnet of the discharge valve from a closing position, in which it closes the metering opening, to an open position, and having a main control unit, which is connected to the discharge valve, and which delivers electrical output voltage signals which moves and maintains the closure member to the open position. A modification unit is arranged between the main control unit and the discharge valve, which is configured such it receives output voltage signals from the main control unit, modifies these signals and relays the latter in a modified form to the electromagnet.
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公开(公告)号：US20230364635A1
公开(公告)日：2023-11-16
申请号：US17744245
申请日：2022-05-13
发明人： Lu-Min Chen , Tsung-Lin Tsai
IPC分类号： B05C11/10
CPC分类号： B05C11/1005 , B05C11/1026
摘要： A dual-valve automatic calibration system comprises a primary positioner, a first secondary positioner and a second secondary positioner: the first secondary positioner and the second secondary positioner are connected with a first fluid coating unit and a second fluid coating unit, respectively; the primary positioner comprises a primary X-axis positioner and a primary Y-axis positioner; both the first secondary positioner and the second secondary positioner are connected with the primary X-axis positioner. In contrast to the prior art that a secondary positioner is installed on a primary Z-axis positioner, a dual-valve automatic calibration system contributes to promotion of positioning precision on the Z-axis and reduction of a burden imposed on the Z-axis.
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公开(公告)号：US11745213B2
公开(公告)日：2023-09-05
申请号：US17068964
申请日：2020-10-13
发明人： Hidemasa Aratake , Osamu Kuroda , Kouzou Kanagawa
IPC分类号： B05C11/10 , H01L21/304 , H01L21/02 , H01L21/3213 , B08B3/04
CPC分类号： B05C11/1036 , B05C11/1026 , B08B3/04 , H01L21/02041 , H01L21/304 , H01L21/32133
摘要： A substrate processing apparatus includes a processing tub, a liquid recovery unit, a liquid recovery unit drain line, a storage, a first and a second liquid supply lines, a discharge line, a first and a second liquid flow rate controllers. The liquid recovery unit receives a processing liquid overflown from the processing tub. The liquid recovery unit drain line drains the processing liquid from the liquid recovery unit. The first and the second liquid supply lines supply a first and a second liquids, respectively. The cleaning liquid contains the first liquid and the second liquid, and removes a precipitate from the processing liquid. The discharge line discharges the cleaning liquid, the first liquid or the second liquid toward the liquid recovery unit. The first and the second liquid flow rate controllers are provided at the first and the second liquid supply lines, and adjust flow rates thereof, respectively.
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公开(公告)号：US09960065B2
公开(公告)日：2018-05-01
申请号：US14318333
申请日：2014-06-27
发明人： Junichi Kawasaki , Mitsuru Funakura
IPC分类号： H01L21/673 , H01L21/67 , B05C11/10 , H01L21/677
CPC分类号： H01L21/67393 , B05C11/1002 , B05C11/1026 , H01L21/67253 , H01L21/67288 , H01L21/67769 , H01L21/67775
摘要： Provided are a substrate processing apparatus, a method of manufacturing a semiconductor device, and a non-transitory computer-readable recording medium, which are capable of reducing an effect on a substrate, which is caused by a change in an atmosphere in a substrate storage container, by appropriately supplying an inert gas into the substrate storage container. The substrate processing apparatus includes a purge mechanism installed in at least one of a support unit and a receiving unit accommodating a substrate storage container, and configured to supply an inert gas into the substrate storage container; a monitoring unit configured to compare a flow rate of the predetermined gas supplied into the substrate storage container via the purge mechanism with a preset reference value and output a signal indicating a result of comparison between the flow rate of the predetermined gas and the preset reference value; and a management unit configured to manage use of the substrate storage container, based on the signal outputted from the monitoring unit.
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公开(公告)号：US09920222B2
公开(公告)日：2018-03-20
申请号：US14931355
申请日：2015-11-03
申请人： Nordson Corporation
IPC分类号： B67D7/80 , C09J5/00 , B05C11/10 , B65H49/26 , B65H51/10 , C09J175/04 , C09J153/02 , C09J153/00 , B29B13/02 , C09J177/00 , B05B9/00 , B05C5/02
CPC分类号： C09J5/00 , B05B9/002 , B05C5/0225 , B05C5/0279 , B05C11/1007 , B05C11/1013 , B05C11/1026 , B05C11/1042 , B29B13/022 , B65H49/26 , B65H51/10 , B65H2404/14 , B65H2515/40 , C09J153/00 , C09J153/02 , C09J175/04 , C09J177/00 , C09J2201/606 , C09J2201/61 , C09J2400/22 , C09J2453/00 , C09J2475/00
摘要： A system for dispensing hot melt adhesives, comprising an adhesive dispenser including a fluid passage leading to an outlet. The system further comprises a supply conduit fluidly connected to the fluid passage and a feeding mechanism configured to feed an elongate, flexible element of solid adhesive into the supply conduit. The system further comprises a first heating element positioned along at least a portion of the supply conduit to melt a portion of the elongate, flexible element being fed into the supply conduit and thereby form a supply of liquid adhesive within the supply conduit.
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公开(公告)号：US20160122592A1
公开(公告)日：2016-05-05
申请号：US14931355
申请日：2015-11-03
申请人： Nordson Corporation
IPC分类号： C09J5/00 , B65H49/26 , C09J153/00 , C09J175/04 , C09J153/02 , B05C11/10 , B65H51/10
CPC分类号： C09J5/00 , B05B9/002 , B05C5/0225 , B05C5/0279 , B05C11/1007 , B05C11/1013 , B05C11/1026 , B05C11/1042 , B29B13/022 , B65H49/26 , B65H51/10 , B65H2404/14 , B65H2515/40 , C09J153/00 , C09J153/02 , C09J175/04 , C09J177/00 , C09J2201/606 , C09J2201/61 , C09J2400/22 , C09J2453/00 , C09J2475/00
摘要： A system for dispensing hot melt adhesives, comprising an adhesive dispenser including a fluid passage leading to an outlet. The system further comprises a supply conduit fluidly connected to the fluid passage and a feeding mechanism configured to feed an elongate, flexible element of solid adhesive into the supply conduit. The system further comprises a first heating element positioned along at least a portion of the supply conduit to melt a portion of the elongate, flexible element being fed into the supply conduit and thereby form a supply of liquid adhesive within the supply conduit.
摘要翻译： 一种用于分配热熔粘合剂的系统，包括粘合剂分配器，其包括通向出口的流体通道。 该系统还包括流体连接到流体通道的供应管道和被配置为将细长的，固体粘合剂的柔性元件供给到供应管道中的进给机构。 该系统还包括沿着供应管道的至少一部分定位的第一加热元件，以熔化被供给到供应管道中的细长柔性元件的一部分，从而在供应管道内形成液体粘合剂供应。
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公开(公告)号：US09067236B2
公开(公告)日：2015-06-30
申请号：US13384785
申请日：2010-10-04
申请人： Mark A. Gould , Leslie J. Varga
发明人： Mark A. Gould , Leslie J. Varga
CPC分类号： B05C11/10 , B01F5/0615 , B01F5/0647 , B05C5/0216 , B05C5/0279 , B05C11/1026 , B05C11/1034 , B05C11/1036 , B05C11/1044 , B29B7/325
摘要： A liquid dispenser gun (14) for mixing first and second liquid components of a two-component mixture (11) and dispensing the two-component mixture (11) includes a gun body (78), a mixing manifold (82), and a nozzle plate (84). The gun body (78) includes a gun body fluid passage (94) in fluid communication with gun body inlets (38, 50, 56) and the mixing manifold (82). The gun body fluid passage (94) is a groove in a bottom surface (79) of the gun body (78) having a generally non-linear shape such that the second component has a generally laminar flow through the gun body fluid passage (94) while a flushing component may be introduced in the gun body fluid passage (94) in a manner to produce turbulence in the flushing component.
摘要翻译： 用于混合双组分混合物（11）的第一和第二液体组分并分配双组分混合物（11）的液体分配器枪（14）包括枪体（78），混合歧管（82）和 喷嘴板（84）。 枪体（78）包括与枪体入口（38,50,56）和混合歧管（82）流体连通的枪体流体通道（94）。 枪体流体通道（94）是枪主体（78）的底表面（79）中的凹槽，其具有大致非直线形状，使得第二部件通常穿过枪体流体通道（94） ），同时冲洗部件可以以在冲洗部件中产生湍流的方式引入枪体流体通道（94）中。
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公开(公告)号：US08439227B2
公开(公告)日：2013-05-14
申请号：US12595150
申请日：2008-04-10
申请人： Kazumasa Ikushima
发明人： Kazumasa Ikushima
CPC分类号： B05C5/0225 , B05C11/1026 , H01L21/67092
摘要： A viscous liquid material discharging method and apparatus can minimize the problem of wear of a sealing member due to friction, and minimize a rotational force required at the time of starting discharge of a highly-viscous liquid material. The apparatus includes a screw having a helical blade which is axially provided over a surface of a rod-like member, a rotation driving mechanism for rotating the screw, a main body having a screw insertion bore in which the screw is inserted, a liquid material supply port formed in a lateral side of the screw insertion bore, and a liquid material supply flow passage communicating with the liquid material supply port, a sealing member which is disposed in the screw insertion bore and through which the screw penetrates, and a nozzle mounted to the main body and communicating with the screw insertion bore.
摘要翻译： 粘性液体材料排出方法和装置可以最大限度地减少密封件由于摩擦而磨损的问题，并使开始排出高粘度液体材料时所需的旋转力最小化。 该装置包括螺杆，其具有轴向设置在杆状构件的表面上的螺旋叶片，用于旋转螺杆的旋转驱动机构，具有插入螺钉的螺钉插入孔的主体，液体材料 供给口形成在螺旋插入孔的侧面，以及与液体材料供给口连通的液体材料供给流路，设置在螺钉插入孔中并通过螺钉穿过的密封部件，以及安装有喷嘴的喷嘴 到主体并与螺钉插入孔连通。
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公开(公告)号：US20080142552A1
公开(公告)日：2008-06-19
申请号：US11722547
申请日：2005-12-27
申请人： Steven J. Hemsen , John P. Breault
发明人： Steven J. Hemsen , John P. Breault
CPC分类号： G01F11/021 , B05C11/1002 , B05C11/1026 , B05C11/1034 , B05C17/002 , B05C17/005 , B05C17/015
摘要： The subject invention is a system for dispensing a controlled amount of fluid product from a dispensing container which includes a pneumatically driven dispensing actuator. This actuator includes a dispensing cylinder and a movable dispensing piston. The dispensing piston is movable tinder pneumatic pressure within the cylinder, the cylinder including a volume of hydraulic fluid under the pneumatic pressure acting against the dispensing piston to selectively prevent movement of the dispensing piston. The invention further includes a means for selectively reducing the volume of the hydraulic fluid in the dispensing cylinder to allow the controlled movement of the dispensing piston. The controlled movement of the dispensing piston causes controlled displacement of the fluid product from the dispensing container. Advantageously, with the subject invention, a force may be generated and applied to a plunger, which can be accurately controlled. As will be recognized by those skilled in the art, the force results in movement of the plunger, which, in turn, translates into an accurate amount of fluid product being dispensed from the dispensing container.
摘要翻译： 本发明是一种用于从包括气动驱动的分配致动器的分配容器分配受控量的流体产品的系统。 该致动器包括分配缸和可移动分配活塞。 分配活塞是气缸内的活动调节器气动压力，气缸包括一定量的液压流体，气动压力作用在分配活塞上，以选择性地防止分配活塞的移动。 本发明还包括用于选择性地减小分配缸中的液压流体的容积以允许分配活塞受到控制的移动的装置。 分配活塞的受控运动引起流体产品从分配容器的受控位移。 有利地，利用本发明，可以产生力并将其施加到可精确控制的柱塞上。 如本领域技术人员将认识到的，该力导致柱塞的移动，其又转换成从分配容器分配的精确量的流体产品。
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