VACUUM PUMP UNIT
    2.
    发明申请
    VACUUM PUMP UNIT 有权
    真空泵单元

    公开(公告)号:US20090047142A1

    公开(公告)日:2009-02-19

    申请号:US12158819

    申请日:2007-01-29

    IPC分类号: F04B25/00 F16M5/00

    摘要: The present invention relates to a dry vacuum pump unit capable of achieving ultimate pressure of about 1 Pa. The vacuum pump unit includes a main pump (15) disposed at an outside-pressure side, and a booster pump (16) disposed at a vacuum side. The booster pump (16) and the main pump (15) are coupled in series. The booster pump (16) has a higher pumping speed than that of the main pump (15). Each of the main pump (15) and the booster pump (16) includes a pair of pump rotors (52a and 52b), a casing (50) having an inlet port and an outlet port, and a pair of magnet rotors (54 and 54) rotatable with the pair of pump rotors.

    摘要翻译: 本发明涉及能够实现约1Pa的极限压力的干式真空泵单元,真空泵单元包括设置在外压侧的主泵(15)和设置在真空下的增压泵(16) 侧。 增压泵(16)和主泵(15)串联联接。 增压泵(16)的泵送速度高于主泵(15)的泵送速度。 主泵(15)和增压泵(16)中的每一个包括一对泵转子(52a和52b),具有入口和出口的壳体(50)和一对磁体转子(54和 54)可与一对泵转子一起旋转。

    Vacuum pump unit
    3.
    发明授权
    Vacuum pump unit 有权
    真空泵单元

    公开(公告)号:US08251678B2

    公开(公告)日:2012-08-28

    申请号:US12158819

    申请日:2007-01-29

    IPC分类号: F04B17/00

    摘要: The present invention relates to a dry vacuum pump unit capable of achieving ultimate pressure of about 1 Pa. The vacuum pump unit includes a main pump (15) disposed at an outside-pressure side, and a booster pump (16) disposed at a vacuum side. The booster pump (16) and the main pump (15) are coupled in series. The booster pump (16) has a higher pumping speed than that of the main pump (15). Each of the main pump (15) and the booster pump (16) includes a pair of pump rotors (52a and 52b), a casing (50) having an inlet port and an outlet port, and a pair of magnet rotors (54 and 54) rotatable with the pair of pump rotors.

    摘要翻译: 本发明涉及能够实现约1Pa的极限压力的干式真空泵单元,真空泵单元包括设置在外压侧的主泵(15)和设置在真空下的增压泵(16) 侧。 增压泵(16)和主泵(15)串联联接。 增压泵(16)的泵送速度高于主泵(15)的泵送速度。 主泵(15)和增压泵(16)中的每一个包括一对泵转子(52a和52b),具有入口和出口的壳体(50)和一对磁体转子(54和 54)可与一对泵转子一起旋转。