-
公开(公告)号:US5774962A
公开(公告)日:1998-07-07
申请号:US676504
申请日:1996-07-08
申请人: Yoshio Satoh , Osamu Ikata , Hidema Uchishiba , Takashi Matsuda , Tokihiro Nishihara , Mitsuo Takanatsu , Hajime Taniguchi
发明人: Yoshio Satoh , Osamu Ikata , Hidema Uchishiba , Takashi Matsuda , Tokihiro Nishihara , Mitsuo Takanatsu , Hajime Taniguchi
CPC分类号: H03H3/08 , H03H9/14538 , Y10T29/42
摘要: This invention relates to a surface acoustic wave device and a production process thereof. An electrode is formed by alternately laminating a film of an aluminum alloy containing at least copper added thereto and a copper film on a piezoelectric substrate. While the particle size of the multi-layered electrode materials is kept small, the occurrence of voids in the film is prevented and life time of the surface acoustic wave device is elongated.
摘要翻译: 本发明涉及声表面波装置及其制造方法。 通过在压电基板上交替层叠至少含有铜的铝合金膜和铜膜而形成电极。 尽管多层电极材料的粒度保持较小,但是膜的空隙的发生被阻止,并且弹性表面波器件的寿命延长。
-
公开(公告)号:US5773917A
公开(公告)日:1998-06-30
申请号:US863026
申请日:1997-05-23
申请人: Yoshio Satoh , Osamu Ikata , Hidema Uchishiba , Takashi Matsuda , Tokihiro Nishihara , Mitsuo Takanatsu , Hajime Taniguchi
发明人: Yoshio Satoh , Osamu Ikata , Hidema Uchishiba , Takashi Matsuda , Tokihiro Nishihara , Mitsuo Takanatsu , Hajime Taniguchi
CPC分类号: H03H3/08 , H03H9/14538 , Y10T29/42
摘要: This invention relates to a surface acoustic wave device and a production process thereof. An electrode is formed by alternately laminating a film of an aluminum alloy containing at least copper added thereto and a copper film on a piezoelectric substrate. While the particle size of the multi-layered electrode materials is kept small, the occurrence of voids in the film is prevented and life time of the surface acoustic wave device is elongated.
摘要翻译: 本发明涉及声表面波装置及其制造方法。 通过在压电基板上交替层叠至少含有铜的铝合金膜和铜膜而形成电极。 尽管多层电极材料的粒度保持较小,但是膜的空隙的发生被阻止,并且弹性表面波器件的寿命延长。
-