公开(公告)号：US06491381B2

公开(公告)日：2002-12-10

申请号：US09452207

申请日：1999-12-01

申请人： Muga Mochizuki ,  Ichiro Saito ,  Toshio Kashino ,  Yoshiyuki Imanaka ,  Teruo Ozaki ,  Masahiko Kubota

发明人： Muga Mochizuki ,  Ichiro Saito ,  Toshio Kashino ,  Yoshiyuki Imanaka ,  Teruo Ozaki ,  Masahiko Kubota

IPC分类号： B41J205

CPC分类号： B41J2/14056 ,  B41J2/14048 ,  B41J2/14072

摘要： In a liquid discharge head having an element substrate on the surface of which are provided in parallel a plurality of discharge energy generating elements generating heat energy for creating a bubble in liquid, a fixed portion provided on the element substrate so as to face the plurality of discharge energy generating elements, and fixed to the element substrate, and a plurality of movable members comprising a movable portion extending from the end portion of the fixed portion and displaced by the bubble, a fulcrum about which the movable portion is displaced is located on the movable portion other than a corner portion formed at the boundary between the movable portion and the fixed portion.

摘要翻译： 在具有其表面上的元件基板并排设置的多个排出能量产生元件的液体排出头中，产生用于在液体中产生气泡的热能的排出能量产生元件，设置在元件基板上以与多个 放电能量产生元件，并且固定到元件基板，以及多个可移动部件，包括从固定部分的端部延伸并被气泡移位的可移动部分，可移动部分位于其上的支点位于 除了形成在可动部和固定部之间的边界处的角部以外的可动部。

公开(公告)号：US06378993B1

公开(公告)日：2002-04-30

申请号：US09452184

申请日：1999-12-02

申请人： Teruo Ozaki ,  Ichiro Saito ,  Toshio Kashino ,  Yoshiyuki Imanaka ,  Masahiko Kubota ,  Muga Mochizuki ,  Yoshiaki Kurihara ,  Masashi Miyagawa ,  Shuji Koyama

发明人： Teruo Ozaki ,  Ichiro Saito ,  Toshio Kashino ,  Yoshiyuki Imanaka ,  Masahiko Kubota ,  Muga Mochizuki ,  Yoshiaki Kurihara ,  Masashi Miyagawa ,  Shuji Koyama

IPC分类号： B41J205

CPC分类号： B41J2/14048 ,  B41J2/055

摘要： There is provided a liquid discharge head provided with an element substrate and a ceiling plate fixed in a mutually opposed state, plural liquid path lateral walls provided between the ceiling plate and the element substrate and defining plural light flow paths, plural discharge energy generating elements arranged in parallel on the surface of the element substrate so as to be respectively positioned in the plural liquid paths, plural movable members in the form of a beam supported at an end, provided on the element substrate so as to be respectively opposed to the plural discharge energy generating elements and provided with fixed ends at the upstream side in the liquid flowing direction in the liquid paths and free ends at the downstream ends, and plural projections provided on the ceiling plate for respectively limiting the amount of displacement of the plural movable members, the element substrate and the ceiling plate being composed of similar materials, wherein the liquid path lateral walls are formed on the element substrate, and, on the ceiling plate, there is provided an engaging layer having recesses for fitting with the upper end faces of the liquid path lateral walls.

摘要翻译： 设置有设置有相互相对的状态的元件基板和顶板的液体排出头，设置在顶板与元件基板之间并限定多个光流路的多个液体流路侧壁，多个排出能量产生元件 在元件基板的表面上平行地分别设置在多个液体通道中的多个可移动部件，其形式为支撑在一端的梁，设置在元件基板上，以分别与多个放电 能量产生元件，并且在液体流道的上游侧和下游端的自由端处设置有固定端，并且在顶板上设置有分别限制多个可动构件的位移量的多个突起， 元件基板和顶板由类似的材料组成，其中液体路径1 在该元件基板上形成有一个隔壁，并且在顶板上设有一个接合层，该接合层具有用于与液体通道侧壁的上端面相配合的凹槽。

公开(公告)号：US06468437B1

公开(公告)日：2002-10-22

申请号：US09452182

申请日：1999-12-02

申请人： Toshio Kashino ,  Ichiro Saito ,  Yoshiyuki Imanaka ,  Teruo Ozaki ,  Masahiko Kubota ,  Muga Mochizuki

发明人： Toshio Kashino ,  Ichiro Saito ,  Yoshiyuki Imanaka ,  Teruo Ozaki ,  Masahiko Kubota ,  Muga Mochizuki

IPC分类号： B41J204

CPC分类号： B41J2/14048 ,  B41J2/14056 ,  B41J2/1604 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646

摘要： A method for producing a liquid discharge head provided with an element substrate and a ceiling plate which are fixed in a mutually opposed state, plural liquid path walls provided between said ceiling plate and said element substrate and defining plural liquid paths, plural discharge energy generating elements provided in parallel manner on the surface of said element substrate so as to be respectively positioned in said plural liquid paths, and plural movable members provided on said element substrate so as to respectively oppose said plural discharge energy generating elements and formed like a cantilever, fixed at the upstream ends in the flowing direction of the liquid in said liquid paths and having free ends at the downstream ends, the method comprising the steps of forming a gap forming member in a position, forming a first material layer, patterning an anti-etching protective film, forming a second material layer, removing a portion of said second material layer, cutting said element substrate, and removing said gap forming member.

摘要翻译： 一种液体排出头的制造方法，其具有固定在相互相对的状态的元件基板和顶板，设置在所述顶板与所述元件基板之间并限定多个液体通路的多个液体通道壁，多个排出能量产生元件 在所述元件基板的表面上平行设置以分别位于所述多个液体通道中，以及多个可移动部件，设置在所述元件基板上，以分别与所述多个排出能量产生元件相对并形成为类似悬臂，固定 在所述液体通道中的液体的流动方向的上游端处，并且在下游端具有自由端，所述方法包括以下步骤：在形成第一材料层的位置形成间隙形成构件，将抗蚀刻 保护膜，形成第二材料层，去除所述第二材料层的一部分，切割所述第二材料层 元件基板，并且移除所述间隙形成部件。

公开(公告)号：US06331259B1

公开(公告)日：2001-12-18

申请号：US09205172

申请日：1998-12-04

申请人： Teruo Ozaki ,  Masahiko Ogawa ,  Masami Ikeda ,  Ichiro Saito ,  Takayuki Yagi ,  Hiroyuki Ishinaga ,  Toshio Kashino ,  Tomoyuki Hiroki ,  Yoshiyuki Imanaka ,  Masahiko Kubota ,  Muga Mochizuki

发明人： Teruo Ozaki ,  Masahiko Ogawa ,  Masami Ikeda ,  Ichiro Saito ,  Takayuki Yagi ,  Hiroyuki Ishinaga ,  Toshio Kashino ,  Tomoyuki Hiroki ,  Yoshiyuki Imanaka ,  Masahiko Kubota ,  Muga Mochizuki

IPC分类号： G01D1520

CPC分类号： B41J2/1625 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2202/03 ,  B41J2202/13

摘要： A method for manufacturing ink jet recording heads includes the steps of forming a film of a first inorganic material in the form of ink flow path pattern using a soluble first inorganic material on the substrate having ink-discharge, pressure-generating elements formed thereon, forming a film of a second inorganic material becoming ink flow walls on the film of the first inorganic material using the second inorganic material, forming ink-discharge openings on the film of the second inorganic material above the ink-discharge, pressure-generating elements, and eluting the film of the first inorganic material. With this method, it becomes possible to set the ink-discharge, pressure-generating elements and the ink-discharge openings (ports) of each head with extremely high precision in a shorter distance with a good reproducibility to record images with higher quality and without any deformation of the head due to the applied heat, while providing a good resistance to ink and erosion, as well as a higher dimensional precision and reliability that may be affected otherwise by swelling or the like.

摘要翻译： 一种制造喷墨记录头的方法包括以下步骤：使用在其上形成有喷墨的基板上的可溶性第一无机材料形成油墨流路图案形式的第一无机材料的膜，在其上形成压力产生元件，形成 使用第二无机材料在第一无机材料的膜上变成油墨流动壁的第二无机材料的膜，在喷墨，压力产生元件上方的第二无机材料的膜上形成油墨排出口，以及 洗脱第一种无机材料的膜。 利用这种方法，可以以较高的重复性以较高的精度设置具有极高精度的每个头部的喷墨，发泡元件和排墨口（端口） 由于施加的热量，头部的任何变形，同时提供良好的耐油墨和侵蚀性，以及更高的尺寸精度和可靠性，否则可能由于膨胀等影响。

公开(公告)号：US06464342B1

公开(公告)日：2002-10-15

申请号：US09453813

申请日：1999-12-03

申请人： Masahiko Kubota ,  Ichiro Saito ,  Toshio Kashino ,  Yoshiyuki Imanaka ,  Teruo Ozaki ,  Muga Mochizuki

发明人： Masahiko Kubota ,  Ichiro Saito ,  Toshio Kashino ,  Yoshiyuki Imanaka ,  Teruo Ozaki ,  Muga Mochizuki

IPC分类号： B41J205

CPC分类号： B41J2/14129 ,  B41J2/14048 ,  B41J2/1604 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/14362 ,  B41J2202/13

摘要： A liquid discharge head at least comprises a discharge opening for discharging the liquid, a liquid flow channel in communication with the discharge opening and for supplying the liquid to the discharge opening, a substrate equipped with a heat generator for producing a bubble in the liquid that is filled in the liquid flow channel, and a movable plate supported and fixed onto the substrate at a position of the substrate opposed to the heat generator and with a gap from the substrate, with a free end on the discharge opening side. The liquid discharge head can discharge the liquid from the discharge openings by forcing the free end of the movable plate to be displaced toward the discharge opening around a fulcrum portion made near a support and fixing portion of the movable plate with the substrate due to pressure caused by produced bubble.

摘要翻译： 液体排出头至少包括用于排出液体的排出口，与排出口连通并用于将液体供给到排出口的液体流动通道，配备有用于在液体中产生气泡的热发生器的基板， 填充在液体流动通道中，以及可移动板，其在与发热体相对的基板的位置处支撑并固定到基板上，并且与基板具有间隙，在排出开口侧具有自由端。 液体排出头可以通过迫使可移动板的自由端围绕由于压力引起的可移动板的支撑和固定部分附近的支点部分的位置朝向排出口移动而从排出口排出液体 通过生产的泡沫。

公开(公告)号：US06299293B1

公开(公告)日：2001-10-09

申请号：US09451873

申请日：1999-12-01

申请人： Yoshiyuki Imanaka ,  Ichiro Saito ,  Toshio Kashino ,  Teruo Ozaki ,  Masahiko Kubota ,  Muga Mochizuki

发明人： Yoshiyuki Imanaka ,  Ichiro Saito ,  Toshio Kashino ,  Teruo Ozaki ,  Masahiko Kubota ,  Muga Mochizuki

IPC分类号： B41J205

CPC分类号： B41J2/14048 ,  B41J2/14056 ,  B41J2/14072

摘要： A substrate, for use in a liquid discharge head for discharging liquid by applying thermal energy thereto, is provided with a heat generating member for applying the thermal energy to the liquid and a movable member so positioned as to be opposed to the heat generating member, to be fixed at the upstream side in the flowing direction of the liquid and to have a free end at the downstream end. Two wiring layers for applying a voltage to the heat generating member are provided in a superposed manner with an interlayer insulation layer therebetween and are mutually connected electrically via a through-hole. The through-hole is provided in a position different from the boundary between a fixing portion and a movable portion of the movable member.

摘要翻译： 用于通过向其施加热能而向液体喷射液体的液体排出头的基板设置有用于向液体施加热能的发热部件和与发热部件相对定位的可动部件， 被固定在液体的流动方向的上游侧，并且在下游端具有自由端。 用于向发热元件施加电压的两个布线层以叠层的方式设置在其间的层间绝缘层，并且通过通孔相互连接。 通孔设置在与可动构件的固定部和可动部之间的边界不同的位置。

公开(公告)号：US06491834B1

公开(公告)日：2002-12-10

申请号：US09452210

申请日：1999-12-01

申请人： Masahiko Kubota ,  Ichiro Saito ,  Toshio Kashino ,  Yoshiyuki Imanaka ,  Teruo Ozaki ,  Muga Mochizuki

发明人： Masahiko Kubota ,  Ichiro Saito ,  Toshio Kashino ,  Yoshiyuki Imanaka ,  Teruo Ozaki ,  Muga Mochizuki

IPC分类号： B41J205

CPC分类号： B41J2/14048 ,  B41J2/1604 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2202/13

摘要： A method for manufacturing a liquid discharge head, which is provided with discharge ports for discharging liquid; liquid flow paths communicated with the discharge ports for supplying the liquid to the discharge ports; heat generating elements arranged in the liquid flow paths for creating bubbles in the liquid; an elemental substrate having the heat generating elements therefor; and movable members arranged for the elemental substrate having each free end thereof on the discharge port side with a gap with the elemental substrate in the position facing the heat generating element on the elemental substrate, each free end of the movable members being displaced on the discharge port side centering on the fulcrum structured near the supporting and fixing portion with the elemental substrate by the pressure exerted by the creation of the bubbles for discharging the liquid form the discharge ports, comprises the steps of forming gap formation members; forming the material film; pattering the material film; and forming the gap.

摘要翻译： 一种液体排出头的制造方法，其具有用于排出液体的排出口; 与用于将液体供给到排出口的排出口连通的液体流路; 布置在液体流动路径中用于在液体中产生气泡的发热元件; 具有发热元件的元素基板; 以及可移动部件，其布置成在基板上具有与元件基板的间隙与元件基板上的发热元件相对的位置的排出口侧的每个自由端的基本基板，可移动部件的每个自​​由端在放电 通过由产生用于将液体排出的气泡所产生的压力形成排出口的压力，以支撑固定部分靠近支撑和固定部分的支点为中心，包括形成间隙形成部件的步骤; 形成材料膜; 图案材料膜; 并形成差距。

公开(公告)号：US06834943B2

公开(公告)日：2004-12-28

申请号：US10071799

申请日：2002-02-11

申请人： Hiroaki Mihara ,  Masahiko Ogawa ,  Kazuaki Masuda ,  Masami Ikeda ,  Ichiro Saito ,  Hiroyuki Ishinaga ,  Toshio Kashino ,  Shuji Koyama ,  Tomoyuki Hiroki ,  Yoshiyuki Imanaka ,  Teruo Ozaki ,  Masahiko Kubota

发明人： Hiroaki Mihara ,  Masahiko Ogawa ,  Kazuaki Masuda ,  Masami Ikeda ,  Ichiro Saito ,  Hiroyuki Ishinaga ,  Toshio Kashino ,  Shuji Koyama ,  Tomoyuki Hiroki ,  Yoshiyuki Imanaka ,  Teruo Ozaki ,  Masahiko Kubota

IPC分类号： B41J205

CPC分类号： B41J2/14129 ,  B41J2/14024 ,  B41J2/14048 ,  B41J2/1604 ,  B41J2/1623 ,  B41J2/1625 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2202/03 ,  Y10S29/016 ,  Y10T29/49083 ,  Y10T29/49401

摘要： A liquid discharge head is provided with discharge ports for discharging liquid, liquid flow paths communicated with the discharge ports for supplying liquid to the discharge ports, a substrate having heat generating members for creating bubbles in the liquid, and movable members facing the heat generating members and being arranged in the liquid flow paths. The movable members have a free end on the discharge port side with a specific gap with respect to the heat generating members. The movable member is fixed to the substrate above the heat generating member on the substrate.

摘要翻译： 液体排出头设置有用于排出液体的排出口，与用于向排出口供给液体的排出口连通的液体流路，具有用于在液体中产生气泡的发热元件的基板，以及面向发热元件的可动件 并且布置在液体流动路径中。 可动构件在排出口侧具有相对于发热构件具有特定间隙的自由端。 可移动部件固定在基板上的发热部件上方的基板上。

公开(公告)号：US06491380B2

公开(公告)日：2002-12-10

申请号：US09204264

申请日：1998-12-03

申请人： Yoichi Taneya ,  Masahiko Ogawa ,  Masami Ikeda ,  Ichiro Saito ,  Hiroyuki Ishinaga ,  Toshio Kashino ,  Tomoyuki Hiroki ,  Yoshiyuki Imanaka ,  Teruo Ozaki ,  Masahiko Kubota ,  Aya Yoshihira ,  Kiyomitsu Kudo ,  Hiroyuki Sugiyama

发明人： Yoichi Taneya ,  Masahiko Ogawa ,  Masami Ikeda ,  Ichiro Saito ,  Hiroyuki Ishinaga ,  Toshio Kashino ,  Tomoyuki Hiroki ,  Yoshiyuki Imanaka ,  Teruo Ozaki ,  Masahiko Kubota ,  Aya Yoshihira ,  Kiyomitsu Kudo ,  Hiroyuki Sugiyama

IPC分类号： B41J205

CPC分类号： B41J2/14048 ,  B41J2/14056 ,  B41J2/14072 ,  B41J2/14129 ,  B41J2/1604 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1634 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2202/13

摘要： A liquid discharging head comprises a discharging port for discharging liquid, a liquid flow path communicated with said discharging port, a bubble generating region for causing the liquid to generate a bubble and a movable member having provided thereon a free end disposed facing to said bubble generating region, and on the downstream of said liquid flow path directed toward said discharging port. At least when said movable member is in stationary state, a side of said liquid flow path corresponding to said bubble generating region is substantially composed of all with a wall face and common communicating space for commonly communicating said liquid flow path with a neighboring liquid flow path is provided in the upward of a movable section of said movable member.

摘要翻译： 液体排放头包括用于排放液体的排出口，与所述排出口连通的液体流动通道，用于使液体产生气泡的气泡发生区域和设置在面向所述气泡生成的自由端的可动件 并且在所述液体流路的下游，朝向所述排出口。 至少当所述可移动部件处于静止状态时，所述液体流动通道对应于所述气泡发生区域的一侧基本上由所有的壁面和共同的连通空间构成，用于将所述液体流路与相邻的液体流路 设置在所述可动构件的可动部的上方。

公开(公告)号：US06374482B1

公开(公告)日：2002-04-23

申请号：US09128538

申请日：1998-08-04

申请人： Hiroaki Mihara ,  Masahiko Ogawa ,  Kazuaki Masuda ,  Masami Ikeda ,  Ichiro Saito ,  Hiroyuki Ishinaga ,  Toshio Kashino ,  Shuji Koyama ,  Tomoyuki Hiroki ,  Yoshiyuki Imanaka ,  Teruo Ozaki ,  Masahiko Kubota

发明人： Hiroaki Mihara ,  Masahiko Ogawa ,  Kazuaki Masuda ,  Masami Ikeda ,  Ichiro Saito ,  Hiroyuki Ishinaga ,  Toshio Kashino ,  Shuji Koyama ,  Tomoyuki Hiroki ,  Yoshiyuki Imanaka ,  Teruo Ozaki ,  Masahiko Kubota

IPC分类号： H05B310

CPC分类号： B41J2/14129 ,  B41J2/14024 ,  B41J2/14048 ,  B41J2/1604 ,  B41J2/1623 ,  B41J2/1625 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2202/03 ,  Y10S29/016 ,  Y10T29/49083 ,  Y10T29/49401

摘要： A method for manufacturing liquid discharge heads is provided with discharge ports for discharging liquid, liquid flow paths communicated with the discharge ports for supplying liquid to the discharge ports, a substrate having heat generating members for creating bubbles in liquid, and movable members facing the heat generating members, each being arranged in each liquid flow path, having the free end on the discharge port side with a specific gap with the heat generating member. This method comprises the steps of forming the boundary layer used for providing a gap between the movable member and the substrate above the heat generating member on the substrate, of laminating the movable member on the boundary layer so as to position the free end above the heat generating member, at the same time fixing the movable member on the substrate, and of forming the gap between the movable member and the heat generating member by use of the boundary layer. With the structure thus arranged, there is no need for the step to position the movable member with the substrate, and also, the movable portion of the movable member is separated from the substrate after the movable member is formed on the substrate and incorporated in the liquid discharge head so as to implement arranging the interior of each liquid flow path finer and more precisely.

摘要翻译： 一种液体排出头的制造方法，具有用于排出液体的排出口，与排出口连通的液体流路，用于向排出口供给液体，具有用于在液体中形成气泡的发热部件的基板，以及面向热量的活动部件 每个液体流路中的每一个都具有与发热元件具有特定间隙的排气口侧的自由端。 该方法包括以下步骤：形成边界层，用于在基板上的发热部件上方的可移动部件和基板之间提供间隙，将可动部件层压在边界层上，以将自由端定位在热 同时将可动构件固定在基板上，并且通过使用边界层在可动构件和发热构件之间形成间隙。 利用如此布置的结构，不需要用基板定位可移动部件的步骤，并且在可移动部件形成在基板上之后，可移动部件的可动部分也与基板分离， 液体排出头，从而更精细地布置每个液体流动通道的内部。