摘要:
The invention provides a plasma etching method that does not create any difference in profile between sparse and dense portions of the mask pattern in processing a device having a space width equal to or smaller than 100 nm. An added gas having a high C/F ratio such as C4F8 gas capable of increasing the generation of CF2 radicals that may become sidewall protection film components having a small attachment coefficient is added to the etching gas in order to form sidewall protection films on dense pattern portions, and in addition, Xe gas is added in order to suppress dissociation effect by lowering the electron temperature.
摘要翻译:本发明提供一种等离子体蚀刻方法,其在处理具有等于或小于100nm的空间宽度的器件时,不会在掩模图案的稀疏部分和致密部分之间产生任何差异。 具有高C / F比例的添加气体,例如可以增加CF 2 N 2基团的产生的C 4 F 8 N 2气体,其可以变成 在蚀刻气体中添加具有小附着系数的侧壁保护膜成分,以在密集图案部分上形成侧壁保护膜,另外,为了通过降低电子温度来抑制解离效果,另外添加Xe气体。
摘要:
A base station includes a first communication section configured to communicate a wireless signal with the mobile station and another base station, a second communication section configured to communicate a data signal with a core network being connected to the base station, a wireless relay function section configured to perform first control to relay the wireless signal to be communicated with the other base station between the other base station and the mobile station, a communication function section configured to perform second control to convert between a data signal and a wireless signal, and to transmit the converted data signal and the converted wireless signal, and a selection control section configured to select at least one of the first control and the second control to use for communication with the mobile station, based on a reception level of the wireless signal from the other base station.
摘要:
A wireless communication device includes an antenna unit that transmits and receives wireless signals, and one or more processors configured to conduct communication with a base station and control displacement of a service area of the base station and a service area of the wireless communication device in response to throughput characteristics of a cell formed by the base station.
摘要:
Radio communication equipment performs radio communication with a first radio terminal group in a first period by using a frequency commonly for use by an adjacent base station, and with a second radio terminal group in a second period by using a frequency not commonly for use by the adjacent base station. The radio communication equipment includes a control unit to adjust time allocation of the first period and the second period; and a radio communication unit to perform radio communication with the first radio terminal group and the second radio terminal group according to the time allocation adjusted by the control unit.
摘要:
A wireless communication method for performing wireless communications between a wireless terminal and a wireless base station during a first time period or a second time period includes determining whether the first time period or the second time period is assigned to the wireless terminal, measuring a quality of a signal to be transmitted during the determined first or second time period, selecting either the first time period or the second time period according to the measured quality of the signal, and reporting selection data indicating the selected first or second time period or reporting measurement data indicating the measured quality of the signal to the wireless base station.