Plasma Etching Method
    1.
    发明申请
    Plasma Etching Method 审中-公开
    等离子蚀刻法

    公开(公告)号:US20080076259A1

    公开(公告)日:2008-03-27

    申请号:US11622525

    申请日:2007-01-12

    IPC分类号: H01L21/461 H01L21/302

    CPC分类号: H01L21/31116

    摘要: The invention provides a plasma etching method that does not create any difference in profile between sparse and dense portions of the mask pattern in processing a device having a space width equal to or smaller than 100 nm. An added gas having a high C/F ratio such as C4F8 gas capable of increasing the generation of CF2 radicals that may become sidewall protection film components having a small attachment coefficient is added to the etching gas in order to form sidewall protection films on dense pattern portions, and in addition, Xe gas is added in order to suppress dissociation effect by lowering the electron temperature.

    摘要翻译: 本发明提供一种等离子体蚀刻方法,其在处理具有等于或小于100nm的空间宽度的器件时,不会在掩模图案的稀疏部分和致密部分之间产生任何差异。 具有高C / F比例的添加气体,例如可以增加CF 2 N 2基团的产生的C 4 F 8 N 2气体,其可以变成 在蚀刻气体中添加具有小附着系数的侧壁保护膜成分,以在密集图案部分上形成侧壁保护膜,另外,为了通过降低电子温度来抑制解离效果,另外添加Xe气体。

    BASE STATION, COMMUNICATION SYSTEM, AND COMMUNICATION METHOD
    2.
    发明申请
    BASE STATION, COMMUNICATION SYSTEM, AND COMMUNICATION METHOD 审中-公开
    基站,通信系统和通信方法

    公开(公告)号:US20120258671A1

    公开(公告)日:2012-10-11

    申请号:US13431100

    申请日:2012-03-27

    申请人: Yoshiyuki OOTA

    发明人: Yoshiyuki OOTA

    IPC分类号: H04W88/02 H04W24/00

    CPC分类号: H04W84/047 H04W88/08

    摘要: A base station includes a first communication section configured to communicate a wireless signal with the mobile station and another base station, a second communication section configured to communicate a data signal with a core network being connected to the base station, a wireless relay function section configured to perform first control to relay the wireless signal to be communicated with the other base station between the other base station and the mobile station, a communication function section configured to perform second control to convert between a data signal and a wireless signal, and to transmit the converted data signal and the converted wireless signal, and a selection control section configured to select at least one of the first control and the second control to use for communication with the mobile station, based on a reception level of the wireless signal from the other base station.

    摘要翻译: 基站包括:第一通信部,被配置为与移动台和另一基站通信无线信号;第二通信部,被配置为与连接到基站的核心网络通信数据信号;无线中继功能部,被配置为 执行第一控制以中继在另一个基站和移动台之间与其他基站通信的无线信号;通信功能部分,被配置为执行第二控制以在数据信号和无线信号之间进行转换,并且发送 所转换的数据信号和转换的无线信号,以及选择控制部分,被配置为基于来自另一个的无线信号的接收电平来选择用于与移动台通信的第一控制和第二控制中的至少一个 基站。

    WIRELESS COMMUNICATION DEVICE AND METHOD
    3.
    发明申请
    WIRELESS COMMUNICATION DEVICE AND METHOD 有权
    无线通信设备和方法

    公开(公告)号:US20110319108A1

    公开(公告)日:2011-12-29

    申请号:US13161599

    申请日:2011-06-16

    申请人: Yoshiyuki OOTA

    发明人: Yoshiyuki OOTA

    IPC分类号: H04B7/24

    CPC分类号: H04B7/15507 H04B7/2606

    摘要: A wireless communication device includes an antenna unit that transmits and receives wireless signals, and one or more processors configured to conduct communication with a base station and control displacement of a service area of the base station and a service area of the wireless communication device in response to throughput characteristics of a cell formed by the base station.

    摘要翻译: 无线通信装置包括发送和接收无线信号的天线单元和被配置为与基站进行通信并控制基站的服务区域的位移和无线通信设备的服务区域的响应的一个或多个处理器 到由基站形成的小区的吞吐量特性。

    RADIO COMMUNICATION EQUIPMENT
    4.
    发明申请
    RADIO COMMUNICATION EQUIPMENT 失效
    无线电通信设备

    公开(公告)号:US20100067499A1

    公开(公告)日:2010-03-18

    申请号:US12491582

    申请日:2009-06-25

    申请人: Yoshiyuki OOTA

    发明人: Yoshiyuki OOTA

    IPC分类号: H04J3/00 H04J1/00 H04W72/00

    CPC分类号: H04W16/02 H04L5/0087

    摘要: Radio communication equipment performs radio communication with a first radio terminal group in a first period by using a frequency commonly for use by an adjacent base station, and with a second radio terminal group in a second period by using a frequency not commonly for use by the adjacent base station. The radio communication equipment includes a control unit to adjust time allocation of the first period and the second period; and a radio communication unit to perform radio communication with the first radio terminal group and the second radio terminal group according to the time allocation adjusted by the control unit.

    摘要翻译: 无线电通信设备通过使用通常由相邻基站使用的频率和第二时段中的第二无线电终端组在第一时段内与第一无线电终端组进行无线电通信,所述频率不是通常被使用的频率 相邻基站。 无线电通信设备包括:控制单元,用于调整第一周期和第二周期的时间分配; 以及无线通信单元,其根据由控制单元调整的时间分配与第一无线终端组和第二无线终端组进行无线通信。

    Wireless Terminal, Wireless Base Station, Wireless Communication Method, And Wireless Communication System
    5.
    发明申请
    Wireless Terminal, Wireless Base Station, Wireless Communication Method, And Wireless Communication System 审中-公开
    无线终端,无线基站,无线通信方式和无线通信系统

    公开(公告)号:US20100302962A1

    公开(公告)日:2010-12-02

    申请号:US12768906

    申请日:2010-04-28

    申请人: Yoshiyuki OOTA

    发明人: Yoshiyuki OOTA

    IPC分类号: H04W72/04 H04W24/00

    CPC分类号: H04W8/24 H04W24/10 H04W72/02

    摘要: A wireless communication method for performing wireless communications between a wireless terminal and a wireless base station during a first time period or a second time period includes determining whether the first time period or the second time period is assigned to the wireless terminal, measuring a quality of a signal to be transmitted during the determined first or second time period, selecting either the first time period or the second time period according to the measured quality of the signal, and reporting selection data indicating the selected first or second time period or reporting measurement data indicating the measured quality of the signal to the wireless base station.

    摘要翻译: 一种用于在第一时间段或第二时间段期间在无线终端和无线基站之间执行无线通信的无线通信方法包括确定第一时间段或第二时间段是否被分配给无线终端,测量质量 在确定的第一或第二时间段期间要发送的信号,根据测量的信号质量选择第一时间段或第二时间段,以及报告指示所选择的第一或第二时间段的选择数据或报告测量数据 指示测量到无线基站的信号质量。