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103 条记录 (耗时 0.048 秒)

    Plasma Etching Method
    1.
    发明申请
    Plasma Etching Method 审中-公开
    等离子蚀刻法

    公开(公告)号：US20080076259A1

    公开(公告)日：2008-03-27

    申请号：US11622525

    申请日：2007-01-12

    申请人： Yoshiyuki OOTA ,  Tsuyoshi Yoshida ,  Eiji Ikegami ,  Kenji Imamoto ,  Jyunji Adachi

    发明人： Yoshiyuki OOTA ,  Tsuyoshi Yoshida ,  Eiji Ikegami ,  Kenji Imamoto ,  Jyunji Adachi

    IPC分类号： H01L21/461 ,  H01L21/302

    CPC分类号： H01L21/31116

    摘要： The invention provides a plasma etching method that does not create any difference in profile between sparse and dense portions of the mask pattern in processing a device having a space width equal to or smaller than 100 nm. An added gas having a high C/F ratio such as C4F8 gas capable of increasing the generation of CF2 radicals that may become sidewall protection film components having a small attachment coefficient is added to the etching gas in order to form sidewall protection films on dense pattern portions, and in addition, Xe gas is added in order to suppress dissociation effect by lowering the electron temperature.

    摘要翻译： 本发明提供一种等离子体蚀刻方法，其在处理具有等于或小于100nm的空间宽度的器件时，不会在掩模图案的稀疏部分和致密部分之间产生任何差异。 具有高C / F比例的添加气体，例如可以增加CF 2 N 2基团的产生的C 4 F 8 N 2气体，其可以变成 在蚀刻气体中添加具有小附着系数的侧壁保护膜成分，以在密集图案部分上形成侧壁保护膜，另外，为了通过降低电子温度来抑制解离效果，另外添加Xe气体。

    LSI device etching method and apparatus thereof
    3.
    发明申请
    LSI device etching method and apparatus thereof 失效
    LSI器件蚀刻方法及其装置

    公开(公告)号：US20050026431A1

    公开(公告)日：2005-02-03

    申请号：US10780670

    申请日：2004-02-19

    申请人： Hideyuki Kazumi ,  Tsuyoshi Yoshida ,  Eiji Ikegami ,  Kouichi Nakaune ,  Masamichi Sakaguchi ,  Yasuyuki Miyamoto ,  Akihiro Sano

    发明人： Hideyuki Kazumi ,  Tsuyoshi Yoshida ,  Eiji Ikegami ,  Kouichi Nakaune ,  Masamichi Sakaguchi ,  Yasuyuki Miyamoto ,  Akihiro Sano

    IPC分类号： H01L21/3065 ,  H01L21/311 ,  H01L21/3213 ,  H01L21/44

    CPC分类号： H01L21/31116

    摘要： An apparatus for performing a plasma-etching of a LSI device including a Cu interconnection, a low-k film, and a diffusion prevention film has a treatment chamber, into which an etching gas is introduced, and a support table which is equipped with electrodes and on which said LSI device is placed. In this apparatus, the etching gasses are turned into plasma by supplying radio frequency power to electrodes provided within the treatment chamber, so that the LSI device is etched with ions of the plasma. In this apparatus, a sulfur-containing gas and a fluorine-containing gas are mixed to the etching gasses, so that the diffusion prevention film is selectively etched against the low-k film.

    摘要翻译： 用于进行包括Cu互连，低k膜和防扩散膜的LSI器件的等离子体蚀刻的设备具有其中引入蚀刻气体的处理室和配备有电极的支撑台 并在其上放置所述LSI器件。 在该装置中，通过向设置在处理室内的电极提供射频功率使蚀刻气体变成等离子体，从而利用等离子体的离子蚀刻LSI器件。 在该装置中，将含硫气体和含氟气体混合到蚀刻气体中，使得防扩散膜针对低k膜选择性地蚀刻。

    OPTICAL TRANSFER SYSTEM, OPTICAL TRANSMISSION DEVICE, AND OPTICAL RECEPTION DEVICE
    4.
    发明申请
    OPTICAL TRANSFER SYSTEM, OPTICAL TRANSMISSION DEVICE, AND OPTICAL RECEPTION DEVICE 有权
    光传输系统，光传输设备和光接收设备

    公开(公告)号：US20130136451A1

    公开(公告)日：2013-05-30

    申请号：US13814617

    申请日：2011-09-30

    申请人： Tsuyoshi Yoshida ,  Takashi Sugihara ,  Kazuyuki Ishida ,  Takashi Mizuochi

    发明人： Tsuyoshi Yoshida ,  Takashi Sugihara ,  Kazuyuki Ishida ,  Takashi Mizuochi

    IPC分类号： H04J14/06

    CPC分类号： H04J14/06 ,  H04B10/5053 ,  H04B10/532 ,  H04B10/616 ,  H04J14/002

    摘要： In an optical transfer system, an optical transmission unit generates an optical signal in which respective polarization components are alternately present on a time axis, a time period during which the respective polarization components are simultaneously present on the time axis is substantially zero, and a symbol repetition cycle of optical signals of the respective polarization components becomes Ts, an optical reception unit causes an interference between local oscillation light and a received optical signal and converts an interfered optical signal to an electric signal, and a received electric-signal processing unit performs analog-digital conversion of an electric signal, elimination of a delay difference of Ts/2 between the respective polarized signal components, and adaptive equalization of a distortion other than the delay difference.

    摘要翻译： 在光传输系统中，光传输单元产生在时间轴上交替存在各偏振分量的光信号，时间轴上同时存在各偏振分量的时间段基本上为零，以及符号 各个偏振分量的光信号的重复周期变为Ts，光接收单元引起局部振荡光和接收到的光信号之间的干扰，并将干扰的光信号转换为电信号，并且接收的电信号处理单元执行模拟 电信号的数字转换，消除各极化信号分量之间的Ts / 2的延迟差，以及除了延迟差之外的失真的自适应均衡。

    OPTICAL TRANSMITTER
    6.
    发明申请
    OPTICAL TRANSMITTER 审中-公开
    光学发射器

    公开(公告)号：US20120288284A1

    公开(公告)日：2012-11-15

    申请号：US13576276

    申请日：2010-02-25

    申请人： Tsuyoshi Yoshida ,  Takashi Sugihara

    发明人： Tsuyoshi Yoshida ,  Takashi Sugihara

    IPC分类号： H04B10/04

    CPC分类号： H04B10/50575 ,  H04B10/5053 ,  H04B10/50595

    摘要： An optical transmitter generating an arbitrary optical waveform including an analog optical waveform, which is capable of controlling a bias to a Null point easily. The optical transmitter modulates light from a light source by an optical modulator with use of a data sequence being an electric signal, to thereby generate the arbitrary optical waveform, and includes: a light intensity detector detecting intensity of output light of the optical modulator; a data signal generator generating the data sequence; an average modulation degree calculator calculating an average modulation degree of the data sequence based on the data sequence; and a bias controller performing bias control on the optical modulator based on the intensity of the output light detected by the light intensity detector and the average modulation degree of the data sequence calculated by the average modulation degree calculator.

    摘要翻译： 产生包括模拟光波形的任意光波形的光发射机，其能够容易地将偏压控制到空点。 光发射机通过光调制器利用作为电信号的数据序列来调制来自光源的光，从而产生任意的光波形，并且包括：光强检测器，检测光调制器的输出光的强度; 产生数据序列的数据信号发生器; 平均调制度计算器，基于所述数据序列计算所述数据序列的平均调制度; 以及偏置控制器，基于由光强度检测器检测的输出光的强度和由平均调制度计算器计算的数据序列的平均调制度，对光调制器进行偏置控制。

    RUNNING DEVICE FOR TRACK-LAYING VEHICLE
    7.
    发明申请
    RUNNING DEVICE FOR TRACK-LAYING VEHICLE 有权
    轨道车辆运行装置

    公开(公告)号：US20100244554A1

    公开(公告)日：2010-09-30

    申请号：US12714269

    申请日：2010-02-26

    申请人： Tsuyoshi Yoshida ,  Shinji Mitsuta ,  Shinya Nakamura ,  Souichi Tsumura ,  Tetsunori Yamashita

    发明人： Tsuyoshi Yoshida ,  Shinji Mitsuta ,  Shinya Nakamura ,  Souichi Tsumura ,  Tetsunori Yamashita

    IPC分类号： B62D55/10 ,  B62D55/06 ,  B62D55/104 ,  B62D55/18

    CPC分类号： B62D55/21 ,  B62D55/104 ,  B62D55/14

    摘要： There is provided a running device for track-laying vehicle, which can resolve a feeling of fear of falling height in a leading end portion of a crawler while relax a large impact when the crawler runs over a raised contact area. The running device includes a spring constant equalizing unit that equalizes an apparent spring constant of a second arm of lower track roller bogie device over a total length. The apparent spring constant is generated in maximum reverse camber of the crawler. The spring constant equalizing unit increases an oscillation angle α of the second arm that can abut on the first arm in the maximum reverse camber of the crawler such that the oscillation angle α of the second arm is larger than a crossing angle β of the connecting link. Desirably the increased maximum oscillation angle of the second arm is 1.3-2.0 times the crossing angle β.

    摘要翻译： 提供了一种用于履带铺设车辆的运行装置，其可以在履带运行在凸起的接触区域上的同时放松大的冲击力的同时，消除履带的前端部的下降高度的恐惧感。 运行装置包括弹簧常数均衡单元，其在总长度上均衡下轨道滚子转向架装置的第二臂的表观弹簧常数。 表观弹簧常数是在履带的最大反向弯度中产生的。 弹簧常数均衡单元增加了能够抵靠履带的最大反向弧度中的第一臂上的第二臂的摆动角度α，使得第二臂的摆动角α大于交叉角度＆amp; bgr; 的连接链接。 理想地，第二臂的最大振荡角增加是交叉角度的1.3-2.0倍。

    Equalizer bar for a track-type vehicle
    8.
    发明授权
    Equalizer bar for a track-type vehicle 失效
    轨道式车辆的均衡杆

    公开(公告)号：US07108085B2

    公开(公告)日：2006-09-19

    申请号：US10699914

    申请日：2003-11-04

    申请人： Tsuyoshi Yoshida ,  Teiji Yamamoto

    发明人： Tsuyoshi Yoshida ,  Teiji Yamamoto

    IPC分类号： B62D55/108

    CPC分类号： B60G21/0551 ,  B60G2202/135 ,  B60G2204/1222 ,  B60G2204/1224 ,  B60G2204/418 ,  B60G2204/421 ,  B60G2300/32 ,  B62D55/0842

    摘要： An equalizer bar itself serving as a suspension device of a track-type vehicle has spring effects imparted through torsional deformation relative to vertical oscillatory movements of track frames. Arm portions are fixed in directions opposite to each other in two ends of an equalizer bar main body. Free end portions of the arm portions are individually supported in the track frames to be rotatable in directions opposite to each other. The track frames are therefore regulated in the magnitudes of oscillatory movements according to the spring effects of the equalizer bar main body, whereby travel-time oscillations, oscillatory movements, and/or the like of the vehicle body are sufficiently restrained.

    摘要翻译： 作为轨道式车辆的悬挂装置的均衡杆本身具有通过相对于轨道框架的垂直振荡运动的扭转变形而赋予的弹簧效应。 臂部在均衡棒主体的两端彼此相反的方向固定。 臂部的自由端部分别支撑在轨道框架中，以能够相互相反的方向转动。 因此，根据平衡棒主体的弹簧效应，轨道框架以振荡运动的大小进行调节，从而足够地抑制车体的行进时间振荡，振荡运动等。

    Package for electric apparatus
    9.
    发明申请
    Package for electric apparatus 审中-公开
    电器包装

    公开(公告)号：US20060113214A1

    公开(公告)日：2006-06-01

    申请号：US11287230

    申请日：2005-11-28

    申请人： Daisuke Shimizu ,  Hidenobu Mukougawa ,  Takayuki Horie ,  Yasuo Mitomori ,  Tsuyoshi Yoshida

    发明人： Daisuke Shimizu ,  Hidenobu Mukougawa ,  Takayuki Horie ,  Yasuo Mitomori ,  Tsuyoshi Yoshida

    IPC分类号： B65D71/00 ,  B65D85/00 ,  B65D81/02

    CPC分类号： B65D81/107

    摘要： To provide a package for an electric apparatus which allows a power cord to be efficiently housed when an electric apparatus is packed and which enables the power supply cord to be appropriately held in a packaging box. A power supply plug holding member 50 is formed by creating a cut-in portion 52 through which a power supply plug 611 is inserted, in a foldable packaging material such as a corrugated fiberboard and then folding the packaging material into a general U shape. The power supply plug 611 of an electric apparatus 61 is locked in the cut-in portion 52 in the power supply plug holding member 50, which is then housed between a packaging box 62 and the electric apparatus 61.

    摘要翻译： 提供一种用于电气设备的包装，其允许在电气设备被包装时有效地容纳电源线，并且使电源线能够适当地保持在包装盒中。 电源插头保持构件50通过在诸如瓦楞纸板的可折叠包装材料中产生插入电源插头611的切入部分52形成，然后将包装材料折叠成U形。 电气设备61的电源插头611被锁定在电源插头保持构件50中的切入部分52中，然后容纳在包装盒62和电气设备61之间。