公开(公告)号：US4758086A

公开(公告)日：1988-07-19

申请号：US7350

申请日：1987-01-27

申请人： Youji Sonobe ,  Seiichi Ishigaki ,  Tomoyuki Kikugawa

发明人： Youji Sonobe ,  Seiichi Ishigaki ,  Tomoyuki Kikugawa

IPC分类号： G01J1/02 ,  G01J1/42 ,  G01J3/12 ,  G01J3/18 ,  G01J3/28 ,  G01J3/30 ,  G01J3/36 ,  G01J3/447

CPC分类号： G01J3/447 ,  G01J1/4257 ,  G01J3/1256 ,  G01J3/18 ,  G01J3/36

摘要： In an optical measuring apparatus, a laser beam is transferred to a diffraction grating so that the laser beam is spectrally separated into respective wavelength components. The wavelength components are sequentially guided into a polarizing optical element in which the respective wavelength component are separated into S and P polarized components, when the diffraction grating is rotated. The S and P polarized components of the respective wavelengths are detected by photodetectors and electrical signals from the photodetectors are supplied to a signal processing unit. In the signal processing unit, the electrical signals corresponding to the P and S components are corrected with a spectral efficiency characteristic of the grating, a percent loss characteristic of the polarizing element and photoelectro conversion characteristics of the photodetectors and the corrected signals are analyzed to obtain an absolute value of the laser energy for the respective wavelength.

摘要翻译： 在光学测量装置中，将激光束转移到衍射光栅，使得激光束被光谱分离成各个波长分量。 当衍射光栅旋转时，波长分量被顺序地引导到偏振光学元件中，其中各个波长分量被分离成S和P偏振分量。 各波长的S和P偏振分量由光检测器检测，并且来自光电检测器的电信号被提供给信号处理单元。 在信号处理单元中，用光栅的光谱效率特性校正与P和S分量相对应的电信号，分析偏振元件的百分比损耗特性和光电检测器的光电转换特性和校正信号，以获得 相应波长的激光能量的绝对值。