公开(公告)号：US08198785B2

公开(公告)日：2012-06-12

申请号：US13007017

申请日：2011-01-14

申请人： Young-tack Hong ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

发明人： Young-tack Hong ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

IPC分类号： H01L41/00

CPC分类号： B41J2/04581 ,  B41J2/04541

摘要： A Micro Electro Mechanical System (MEMS) switch includes a substrate, a fixed signal line formed on the substrate, a movable signal line spaced apart from one of an upper surface and a lower surface of the fixed signal line, and at least one piezoelectric actuator connected to a first end of the movable signal line so as to bring or separate the movable signal line in contact with or from the fixed signal line. The piezoelectric actuator includes a first electrode, a piezoelectric layer formed on the first electrode, a second electrode formed on the piezoelectric layer, and a connecting layer formed on the second electrode and connected with the movable signal line.

摘要翻译： 微机电系统（MEMS）开关包括基板，形成在基板上的固定信号线，与固定信号线的上表面和下表面之一间隔开的可移动信号线，以及至少一个压电致动器 连接到可移动信号线的第一端，以使可移动信号线与固定信号线接触或分离。 压电致动器包括第一电极，形成在第一电极上的压电层，形成在压电层上的第二电极，以及形成在第二电极上并与可移动信号线连接的连接层。

公开(公告)号：US20070024403A1

公开(公告)日：2007-02-01

申请号：US11439144

申请日：2006-05-24

申请人： Sang-wook Kwon ,  Jun-o Kim ,  In-sang Song ,  Sang-hun Lee ,  Dong-kyun Kim ,  Hee-moon Jeong ,  Young-tack Hong ,  Jong-seok Kim ,  Che-heung Kim

发明人： Sang-wook Kwon ,  Jun-o Kim ,  In-sang Song ,  Sang-hun Lee ,  Dong-kyun Kim ,  Hee-moon Jeong ,  Young-tack Hong ,  Jong-seok Kim ,  Che-heung Kim

IPC分类号： H01H51/22

CPC分类号： H01H59/0009 ,  H01H2057/006

摘要： A MEMS (Micro Electro Mechanical Systems) switch actuated by electrostatic and piezoelectric forces, includes a substrate; a first contact point positioned in a predetermined first area on an upper surface of the substrate; a support layer suspended at a predetermined distance from the upper surface of the substrate; a second contact point formed on a lower surface of the support layer; a first actuator operative to move the support layer in a predetermined direction using an electrostatic force; and a second actuator operative to move the support layer in a predetermined direction using a piezoelectric force. The first actuator is used to turn on the MEMS switch. The second actuator can be used together with the first actuator to turn on the MEMS switch or can be separately used to turn off the MEMS switch. As a result, a stiction can be prevented from occurring between contact points.

摘要翻译： 由静电和压电力驱动的MEMS（微机电系统）开关包括基板; 位于所述基板的上表面上的预定第一区域中的第一接触点; 从衬底的上表面预定距离悬挂的支撑层; 形成在所述支撑层的下表面上的第二接触点; 第一致动器，用于使用静电力使支撑层沿预定方向移动; 以及第二致动器，其用于使用压电力使支撑层沿预定方向移动。 第一个致动器用于打开MEMS开关。 第二致动器可以与第一致动器一起使用以打开MEMS开关，或者可以单独使用来关闭MEMS开关。 结果，可以防止在接触点之间发生静电。

公开(公告)号：US20110108400A1

公开(公告)日：2011-05-12

申请号：US13007017

申请日：2011-01-14

申请人： Young-tack HONG ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

发明人： Young-tack HONG ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

IPC分类号： H01H57/00

CPC分类号： B41J2/04581 ,  B41J2/04541

摘要： A Micro Electro Mechanical System (MEMS) switch includes a substrate, a fixed signal line formed on the substrate, a movable signal line spaced apart from one of an upper surface and a lower surface of the fixed signal line, and at least one piezoelectric actuator connected to a first end of the movable signal line so as to bring or separate the movable signal line in contact with or from the fixed signal line. The piezoelectric actuator includes a first electrode, a piezoelectric layer formed on the first electrode, a second electrode formed on the piezoelectric layer, and a connecting layer formed on the second electrode and connected with the movable signal line.

摘要翻译： 微机电系统（MEMS）开关包括基板，形成在基板上的固定信号线，与固定信号线的上表面和下表面之一间隔开的可移动信号线，以及至少一个压电致动器 连接到可移动信号线的第一端，以使可移动信号线与固定信号线接触或分离。 压电致动器包括第一电极，形成在第一电极上的压电层，形成在压电层上的第二电极，以及形成在第二电极上并与可移动信号线连接的连接层。

公开(公告)号：US07759591B2

公开(公告)日：2010-07-20

申请号：US11513036

申请日：2006-08-31

申请人： Che-heung Kim ,  Hyung Choi ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Dong-kyun Kim ,  Young-tack Hong ,  Jong-seok Kim ,  Chang-seung Lee

发明人： Che-heung Kim ,  Hyung Choi ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Dong-kyun Kim ,  Young-tack Hong ,  Jong-seok Kim ,  Chang-seung Lee

IPC分类号： H01H57/00

CPC分类号： H01H59/0009 ,  H01H35/346 ,  H01H2221/02

摘要： A pneumatic micro electro mechanical system switch includes a substrate, a pneumatic actuating unit disposed on the substrate; the pneumatic actuating unit having a plurality of variable air cavities communicating such that when one of the plurality of variable air cavities is compressed, the rest are expanded; a signal line having a plurality of switching lines, each of which passes through a corresponding one of the plurality of variable air cavities and has switching ends disposed in a spaced-apart relation with each other in the corresponding one of the plurality of variable air cavities; a movable switching unit to connect the first and the second switching ends of each of the plurality of switching lines if one of the plurality of variable air cavities is compressed; and a driving unit to drive the pneumatic actuating unit so as to selectively compress the plurality of variable air cavities.

摘要翻译： 气动微机电系统开关包括基板，设置在基板上的气动执行单元; 所述气动致动单元具有多个可变空气腔，所述多个可变空气腔连通，使得当所述多个可变空气腔中的一个被压缩时，其余部分被膨胀; 信号线具有多个切换线，每个切换线通过多个可变空气腔中的相应一个，并且具有相互间隔开的多个可变空气腔中相应的一个中的彼此间隔开的切换端 ; 如果多个可变空气腔中的一个被压缩，则可移动切换单元连接多个切换线中的每一个的第一和第二切换端; 以及驱动单元以驱动气动致动单元，以选择性地压缩多个可变空气腔。

公开(公告)号：US20070140614A1

公开(公告)日：2007-06-21

申请号：US11513036

申请日：2006-08-31

申请人： Che-heung Kim ,  Hyung Choi ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Dong-Kyun Kim ,  Young-tack Hong ,  Jong-seok Kim

发明人： Che-heung Kim ,  Hyung Choi ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Dong-Kyun Kim ,  Young-tack Hong ,  Jong-seok Kim

IPC分类号： G02B6/26

CPC分类号： H01H59/0009 ,  H01H35/346 ,  H01H2221/02

摘要： A pneumatic micro electro mechanical system switch includes a substrate, a pneumatic actuating unit disposed on the substrate; the pneumatic actuating unit having a plurality of variable air cavities communicating such that when one of the plurality of variable air cavities is compressed, the rest are expanded; a signal line having a plurality of switching lines, each of which passes through a corresponding one of the plurality of variable air cavities and has switching ends disposed in a spaced-apart relation with each other in the corresponding one of the plurality of variable air cavities; a movable switching unit to connect the first and the second switching ends of each of the plurality of switching lines if one of the plurality of variable air cavities is compressed; and a driving unit to drive the pneumatic actuating unit so as to selectively compress the plurality of variable air cavities.

摘要翻译： 气动微机电系统开关包括基板，设置在基板上的气动执行单元; 所述气动致动单元具有多个可变空气腔，所述多个可变空气腔连通，使得当所述多个可变空气腔中的一个被压缩时，其余部分被膨胀; 信号线具有多个切换线，每个切换线通过多个可变空气腔中的相应一个，并且具有相互间隔开的多个可变空气腔中相应的一个中的彼此间隔开的切换端 ; 如果多个可变空气腔中的一个被压缩，则可移动切换单元连接多个切换线中的每一个的第一和第二切换端; 以及驱动单元以驱动气动致动单元，以选择性地压缩多个可变空气腔。

公开(公告)号：US07919903B2

公开(公告)日：2011-04-05

申请号：US11540655

申请日：2006-10-02

申请人： Young-tack Hong ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

发明人： Young-tack Hong ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

IPC分类号： H01L41/00

CPC分类号： B41J2/04581 ,  B41J2/04541

摘要： A Micro Electro Mechanical System (MEMS) switch includes a substrate, a fixed signal line formed on the substrate, a movable signal line spaced apart from one of an upper surface and a lower surface of the fixed signal line, and at least one piezoelectric actuator connected to a first end of the movable signal line so as to bring or separate the movable signal line in contact with or from the fixed signal line. The piezoelectric actuator includes a first electrode, a piezoelectric layer formed on the first electrode, a second electrode formed on the piezoelectric layer, and a connecting layer formed on the second electrode and connected with the movable signal line.

摘要翻译： 微机电系统（MEMS）开关包括基板，形成在基板上的固定信号线，与固定信号线的上表面和下表面之一间隔开的可移动信号线，以及至少一个压电致动器 连接到可移动信号线的第一端，以使可移动信号线与固定信号线接触或分离。 压电致动器包括第一电极，形成在第一电极上的压电层，形成在压电层上的第二电极，以及形成在第二电极上并与可移动信号线连接的连接层。

公开(公告)号：US20070159510A1

公开(公告)日：2007-07-12

申请号：US11540655

申请日：2006-10-02

申请人： Young-tack Hong ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

发明人： Young-tack Hong ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

IPC分类号： B41J2/04

CPC分类号： B41J2/04581 ,  B41J2/04541

摘要： A Micro Electro Mechanical System (MEMS) switch includes a substrate, a fixed signal line formed on the substrate, a movable signal line spaced apart from one of an upper surface and a lower surface of the fixed signal line, and at least one piezoelectric actuator connected to a first end of the movable signal line so as to bring or separate the movable signal line in contact with or from the fixed signal line. The piezoelectric actuator includes a first electrode, a piezoelectric layer formed on the first electrode, a second electrode formed on the piezoelectric layer, and a connecting layer formed on the second electrode and connected with the movable signal line.

摘要翻译： 微机电系统（MEMS）开关包括基板，形成在基板上的固定信号线，与固定信号线的上表面和下表面之一间隔开的可移动信号线，以及至少一个压电致动器 连接到可移动信号线的第一端，以使可移动信号线与固定信号线接触或分离。 压电致动器包括第一电极，形成在第一电极上的压电层，形成在压电层上的第二电极，以及形成在第二电极上并与可移动信号线连接的连接层。

公开(公告)号：US07501911B2

公开(公告)日：2009-03-10

申请号：US11417242

申请日：2006-05-04

申请人： Young-tack Hong ,  Seok-chul Yun ,  Seok-mo Chang ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Hee-moon Jeong ,  Sang-hun Lee ,  Jun-o Kim ,  In-sang Song

发明人： Young-tack Hong ,  Seok-chul Yun ,  Seok-mo Chang ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Hee-moon Jeong ,  Sang-hun Lee ,  Jun-o Kim ,  In-sang Song

IPC分类号： H01P1/15

CPC分类号： H01H59/0009

摘要： A vertical comb actuator radio frequency (RF) micro-electro-mechanical system (MEMS) switch. The RF MEMS switch includes a substrate; first and second signal lines spaced at a predetermined interval from each other and deposited on an upper surface of the substrate; an actuator positioned over the first and second signal lines when viewed from the upper surface of the substrate and spaced at a predetermined interval from the first and second signal lines; and a fixing portion positioned over the actuator when viewed from the upper surface of the substrate, wherein the fixing portion permits the actuator to come in contact with the first and second signal lines when a predetermined driving voltage is applied. Thus, it is possible to prevent the actuator from sticking to the substrate. In addition, the RF MEMS switch can be operated with a low voltage and insertion loss and power loss can be reduced.

摘要翻译： 立式梳子致动器射频（RF）微机电系统（MEMS）开关。 RF MEMS开关包括基板; 第一和第二信号线以预定间隔彼此间隔开并沉积在基板的上表面上; 当从所述基板的上表面观察并且以与所述第一信号线和所述第二信号线预定的间隔隔开时，致动器定位在所述第一和第二信号线上方; 以及当从基板的上表面观察时定位在致动器上方的固定部分，其中当施加预定的驱动电压时，固定部分允许致动器与第一和第二信号线接触。 因此，可以防止致动器粘附到基板。 此外，RF MEMS开关可以在低电压和插入损耗下工作，并且可以降低功率损耗。

公开(公告)号：US20080001691A1

公开(公告)日：2008-01-03

申请号：US11585235

申请日：2006-10-24

申请人： Young-tack Hong ,  Jong-seok Kim ,  In-sang Song ,  Sang-wook Kwon ,  Sang-hun Lee ,  Che-heung Kim

发明人： Young-tack Hong ,  Jong-seok Kim ,  In-sang Song ,  Sang-wook Kwon ,  Sang-hun Lee ,  Che-heung Kim

IPC分类号： H01F7/08

CPC分类号： H01H59/0009 ,  B81B3/001 ,  B81B2201/014 ,  B81B2201/016

摘要： A MEMS switch includes a substrate, at least one signal line and at least one electrode formed on the substrate, and a moving beam disposed in a spaced-apart relation with respect to the substrate above the substrate so as to be connected with or disconnected from the signal line according to an operation of the electrode. The moving beam includes at least one body, and at least one support to support the body. The body has a modulus of elasticity larger than that of the support. The MEMS switch prevents the moving beam from being stuck and increases a contact force generating between the moving beam and the signal line, thereby enabling a signal to be stably transmitted.

摘要翻译： MEMS开关包括衬底，至少一个信号线和形成在衬底上的至少一个电极以及相对于衬底在衬底上间隔开的关系设置的移动束，以便与衬底连接或断开 根据电极的操作的信号线。 移动梁包括至少一个主体和至少一个支撑体以支撑身体。 身体的弹性模量大于支撑体的弹性模量。 MEMS开关防止移动光束被卡住，并增加在移动光束和信号线之间产生的接触力，从而使信号能够稳定地传输。

公开(公告)号：US20070231065A1

公开(公告)日：2007-10-04

申请号：US11515717

申请日：2006-09-06

申请人： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Hong ,  Che-heung Kim

发明人： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Hong ,  Che-heung Kim

IPC分类号： B25G3/28

CPC分类号： H01H57/00 ,  H01H2057/006 ,  Y10T403/7026

摘要： A piezoelectric Micro Electro Mechanical System (MEMS) switch includes a substrate, first and second fixed signal lines symmetrically formed in a spaced-apart relation to each other on the substrate to have a predetermined gap therebetween, a piezoelectric actuator disposed in alignment with the first and the second fixed signal lines in the predetermined gap, and having a first end supported on the substrate to allow the piezoelectric actuator to be movable up and down, and a movable signal line having a first end connected to one of the first and the second fixed signal lines, and a second end configured to be in contact with, or separate from the other of the first and second fixed signal lines, the movable signal line at least one side thereof being connected to an upper surface of the piezoelectric actuator.

摘要翻译： 一种压电微电子机械系统（MEMS）开关包括基板，第一和第二固定信号线，其在基板上以彼此间隔开的关系对称地形成，以在其间具有预定的间隙;压电致动器，其布置成与第一 并且所述第二固定信号线处于所述预定间隙中，并且具有支撑在所述基板上的第一端，以允许所述压电致动器能够上下移动;以及可移动信号线，其具有连接到所述第一和第二 固定信号线，以及构造成与第一和第二固定信号线中的另一个接触或分离的第二端，可移动信号线的至少一侧连接到压电致动器的上表面。