公开(公告)号：US07759591B2

公开(公告)日：2010-07-20

申请号：US11513036

申请日：2006-08-31

申请人： Che-heung Kim ,  Hyung Choi ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Dong-kyun Kim ,  Young-tack Hong ,  Jong-seok Kim ,  Chang-seung Lee

发明人： Che-heung Kim ,  Hyung Choi ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Dong-kyun Kim ,  Young-tack Hong ,  Jong-seok Kim ,  Chang-seung Lee

IPC分类号： H01H57/00

CPC分类号： H01H59/0009 ,  H01H35/346 ,  H01H2221/02

摘要： A pneumatic micro electro mechanical system switch includes a substrate, a pneumatic actuating unit disposed on the substrate; the pneumatic actuating unit having a plurality of variable air cavities communicating such that when one of the plurality of variable air cavities is compressed, the rest are expanded; a signal line having a plurality of switching lines, each of which passes through a corresponding one of the plurality of variable air cavities and has switching ends disposed in a spaced-apart relation with each other in the corresponding one of the plurality of variable air cavities; a movable switching unit to connect the first and the second switching ends of each of the plurality of switching lines if one of the plurality of variable air cavities is compressed; and a driving unit to drive the pneumatic actuating unit so as to selectively compress the plurality of variable air cavities.

摘要翻译： 气动微机电系统开关包括基板，设置在基板上的气动执行单元; 所述气动致动单元具有多个可变空气腔，所述多个可变空气腔连通，使得当所述多个可变空气腔中的一个被压缩时，其余部分被膨胀; 信号线具有多个切换线，每个切换线通过多个可变空气腔中的相应一个，并且具有相互间隔开的多个可变空气腔中相应的一个中的彼此间隔开的切换端 ; 如果多个可变空气腔中的一个被压缩，则可移动切换单元连接多个切换线中的每一个的第一和第二切换端; 以及驱动单元以驱动气动致动单元，以选择性地压缩多个可变空气腔。

公开(公告)号：US07446634B2

公开(公告)日：2008-11-04

申请号：US11429364

申请日：2006-05-08

申请人： Hee-moon Jeong ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Jun-o Kim ,  Young-tack Hong ,  In-sang Song ,  Sang-hun Lee

发明人： Hee-moon Jeong ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Jun-o Kim ,  Young-tack Hong ,  In-sang Song ,  Sang-hun Lee

IPC分类号： H01H51/22

CPC分类号： H01H59/0009 ,  H01H2059/0054

摘要： A MEMS switch including a substrate at least one fixed electrode formed on top of the substrate and at least one restoring electrode formed on top of the substrate and formed at a lateral surface of the fixed electrode. At least one signal line is formed on top of the substrate and has a switching contact part. A movable electrode is distantly connected from the top of the substrate at a predetermined space via an elastic connector on the substrate and at least one contact member formed on a bottom surface of the movable electrode or on a bottom surface of the elastic connector for attachment to or detachment from the switching contact part. At least one pivot boss is formed on either the bottom surface of the movable electrode or on the top of the substrate.

摘要翻译： 一种MEMS开关，其包括形成在所述基板的顶部上的至少一个固定电极的基板和形成在所述基板的顶部上并形成在所述固定电极的侧表面上的至少一个恢复电极。 至少一个信号线形成在基板的顶部上并且具有开关接触部分。 可移动电极通过基板上的弹性连接器在预定空间处从基板的顶部远离连接，以及形成在可动电极的底表面上或弹性连接器的底表面上的至少一个接触件，用于附接到 或从开关接触部分拆卸。 至少一个枢转凸起形成在可动电极的底表面上或衬底的顶部上。

公开(公告)号：US20070140614A1

公开(公告)日：2007-06-21

申请号：US11513036

申请日：2006-08-31

申请人： Che-heung Kim ,  Hyung Choi ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Dong-Kyun Kim ,  Young-tack Hong ,  Jong-seok Kim

发明人： Che-heung Kim ,  Hyung Choi ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Dong-Kyun Kim ,  Young-tack Hong ,  Jong-seok Kim

IPC分类号： G02B6/26

CPC分类号： H01H59/0009 ,  H01H35/346 ,  H01H2221/02

摘要： A pneumatic micro electro mechanical system switch includes a substrate, a pneumatic actuating unit disposed on the substrate; the pneumatic actuating unit having a plurality of variable air cavities communicating such that when one of the plurality of variable air cavities is compressed, the rest are expanded; a signal line having a plurality of switching lines, each of which passes through a corresponding one of the plurality of variable air cavities and has switching ends disposed in a spaced-apart relation with each other in the corresponding one of the plurality of variable air cavities; a movable switching unit to connect the first and the second switching ends of each of the plurality of switching lines if one of the plurality of variable air cavities is compressed; and a driving unit to drive the pneumatic actuating unit so as to selectively compress the plurality of variable air cavities.

摘要翻译： 气动微机电系统开关包括基板，设置在基板上的气动执行单元; 所述气动致动单元具有多个可变空气腔，所述多个可变空气腔连通，使得当所述多个可变空气腔中的一个被压缩时，其余部分被膨胀; 信号线具有多个切换线，每个切换线通过多个可变空气腔中的相应一个，并且具有相互间隔开的多个可变空气腔中相应的一个中的彼此间隔开的切换端 ; 如果多个可变空气腔中的一个被压缩，则可移动切换单元连接多个切换线中的每一个的第一和第二切换端; 以及驱动单元以驱动气动致动单元，以选择性地压缩多个可变空气腔。

公开(公告)号：US07619289B2

公开(公告)日：2009-11-17

申请号：US11472312

申请日：2006-06-22

申请人： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Duck-hwan Kim ,  Yun-kwon Park ,  Hee-moon Jeong ,  Young-tack Hong ,  Che-heung Kim ,  Seok-chul Yun ,  Kuang-woo Nam

发明人： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Duck-hwan Kim ,  Yun-kwon Park ,  Hee-moon Jeong ,  Young-tack Hong ,  Che-heung Kim ,  Seok-chul Yun ,  Kuang-woo Nam

IPC分类号： H01L29/78

CPC分类号： H01H61/02 ,  H01H61/063 ,  H01H2061/006

摘要： A MEMS switch includes a lower substrate having a signal line on an upper surface of the lower substrate; an upper substrate, having a cavity therein, disposed apart from the upper surface of the lower substrate by a distance, and having a membrane layer on a lower surface of the upper substrate; a bimetal layer formed in the cavity of the upper substrate on the membrane layer; a heating layer formed on a lower surface of the membrane layer; and a contact member formed on a lower surface of the heating layer. The contact member can come into contact with or separate from the signal line. A method for manufacturing the MEMS switch includes preparing the upper and lower substrates and combining them so that a surface having the signal line faces a surface having the contact member and the upper and lower substrates are disposed apart by a distance.

摘要翻译： MEMS开关包括在下基板的上表面上具有信号线的下基板; 在其上具有空腔的上基板，与下基板的上表面隔开一段距离，并且在上基板的下表面上具有膜层; 形成在膜层上的上基板的空腔中的双金属层; 形成在所述膜层的下表面上的加热层; 以及形成在所述加热层的下表面上的接触构件。 接触构件可以与信号线接触或分离。 制造MEMS开关的方法包括制备上基板和下基板并将其组合，使得具有信号线的表面面向具有接触构件的表面，并且上下基板分开一定距离。

公开(公告)号：US20110108400A1

公开(公告)日：2011-05-12

申请号：US13007017

申请日：2011-01-14

申请人： Young-tack HONG ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

发明人： Young-tack HONG ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

IPC分类号： H01H57/00

CPC分类号： B41J2/04581 ,  B41J2/04541

摘要： A Micro Electro Mechanical System (MEMS) switch includes a substrate, a fixed signal line formed on the substrate, a movable signal line spaced apart from one of an upper surface and a lower surface of the fixed signal line, and at least one piezoelectric actuator connected to a first end of the movable signal line so as to bring or separate the movable signal line in contact with or from the fixed signal line. The piezoelectric actuator includes a first electrode, a piezoelectric layer formed on the first electrode, a second electrode formed on the piezoelectric layer, and a connecting layer formed on the second electrode and connected with the movable signal line.

摘要翻译： 微机电系统（MEMS）开关包括基板，形成在基板上的固定信号线，与固定信号线的上表面和下表面之一间隔开的可移动信号线，以及至少一个压电致动器 连接到可移动信号线的第一端，以使可移动信号线与固定信号线接触或分离。 压电致动器包括第一电极，形成在第一电极上的压电层，形成在压电层上的第二电极，以及形成在第二电极上并与可移动信号线连接的连接层。

公开(公告)号：US20070024390A1

公开(公告)日：2007-02-01

申请号：US11417242

申请日：2006-05-04

申请人： Young-tack Hong ,  Seok-chul Yun ,  Seok-mo Chang ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Hee-moon Jeong ,  Sang-hun Lee ,  Jun-o Kim ,  In-sang Song

发明人： Young-tack Hong ,  Seok-chul Yun ,  Seok-mo Chang ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Hee-moon Jeong ,  Sang-hun Lee ,  Jun-o Kim ,  In-sang Song

IPC分类号： H01P1/10

CPC分类号： H01H59/0009

摘要： A vertical comb actuator radio frequency (RF) micro-electro-mechanical system (MEMS) switch. The RF MEMS switch includes a substrate; first and second signal lines spaced at a predetermined interval from each other and deposited on an upper surface of the substrate; an actuator positioned over the first and second signal lines when viewed from the upper surface of the substrate and spaced at a predetermined interval from the first and second signal lines; and a fixing portion positioned over the actuator when viewed from the upper surface of the substrate, wherein the fixing portion permits the actuator to come in contact with the first and second signal lines when a predetermined driving voltage is applied. Thus, it is possible to prevent the actuator from sticking to the substrate. In addition, the RF MEMS switch can be operated with a low voltage and insertion loss and power loss can be reduced.

摘要翻译： 立式梳子致动器射频（RF）微机电系统（MEMS）开关。 RF MEMS开关包括基板; 第一和第二信号线以预定间隔彼此间隔开并沉积在基板的上表面上; 当从所述基板的上表面观察并且以与所述第一信号线和所述第二信号线预定的间隔隔开时，所述致动器位于所述第一和第二信号线上方; 以及当从基板的上表面观察时定位在致动器上方的固定部分，其中当施加预定的驱动电压时，固定部分允许致动器与第一和第二信号线接触。 因此，可以防止致动器粘附到基板。 此外，RF MEMS开关可以在低电压和插入损耗下工作，并且可以降低功率损耗。

公开(公告)号：US20070018760A1

公开(公告)日：2007-01-25

申请号：US11429364

申请日：2006-05-08

申请人： Hee-moon Jeong ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Jun-o Kim ,  Young-tack Hong ,  In-sang Song ,  Sang-hun Lee

发明人： Hee-moon Jeong ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Jun-o Kim ,  Young-tack Hong ,  In-sang Song ,  Sang-hun Lee

IPC分类号： H01H51/22

CPC分类号： H01H59/0009 ,  H01H2059/0054

摘要： A MEMS switch including a substrate at least one fixed electrode formed on top of the substrate and at least one restoring electrode formed on top of the substrate and formed at a lateral surface of the fixed electrode. At least one signal line is formed on top of the substrate and has a switching contact part. A movable electrode is distantly connected from the top of the substrate at a predetermined space via an elastic connector on the substrate and at least one contact member formed on a bottom surface of the movable electrode or on a bottom surface of the elastic connector for attachment to or detachment from the switching contact part. At least one pivot boss is formed on either the bottom surface of the movable electrode or on the top of the substrate.

摘要翻译： 一种MEMS开关，其包括形成在所述基板的顶部上的至少一个固定电极的基板和形成在所述基板的顶部上并形成在所述固定电极的侧表面上的至少一个恢复电极。 至少一个信号线形成在基板的顶部上并且具有开关接触部分。 可移动电极通过基板上的弹性连接器在预定空间处从基板的顶部远离连接，以及形成在可动电极的底表面上或弹性连接器的底表面上的至少一个接触件，用于附接到 或从开关接触部分拆卸。 至少一个枢转凸起形成在可动电极的底表面上或衬底的顶部上。

公开(公告)号：US08198785B2

公开(公告)日：2012-06-12

申请号：US13007017

申请日：2011-01-14

申请人： Young-tack Hong ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

发明人： Young-tack Hong ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

IPC分类号： H01L41/00

CPC分类号： B41J2/04581 ,  B41J2/04541

摘要： A Micro Electro Mechanical System (MEMS) switch includes a substrate, a fixed signal line formed on the substrate, a movable signal line spaced apart from one of an upper surface and a lower surface of the fixed signal line, and at least one piezoelectric actuator connected to a first end of the movable signal line so as to bring or separate the movable signal line in contact with or from the fixed signal line. The piezoelectric actuator includes a first electrode, a piezoelectric layer formed on the first electrode, a second electrode formed on the piezoelectric layer, and a connecting layer formed on the second electrode and connected with the movable signal line.

摘要翻译： 微机电系统（MEMS）开关包括基板，形成在基板上的固定信号线，与固定信号线的上表面和下表面之一间隔开的可移动信号线，以及至少一个压电致动器 连接到可移动信号线的第一端，以使可移动信号线与固定信号线接触或分离。 压电致动器包括第一电极，形成在第一电极上的压电层，形成在压电层上的第二电极，以及形成在第二电极上并与可移动信号线连接的连接层。

公开(公告)号：US07501911B2

公开(公告)日：2009-03-10

申请号：US11417242

申请日：2006-05-04

申请人： Young-tack Hong ,  Seok-chul Yun ,  Seok-mo Chang ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Hee-moon Jeong ,  Sang-hun Lee ,  Jun-o Kim ,  In-sang Song

发明人： Young-tack Hong ,  Seok-chul Yun ,  Seok-mo Chang ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Hee-moon Jeong ,  Sang-hun Lee ,  Jun-o Kim ,  In-sang Song

IPC分类号： H01P1/15

CPC分类号： H01H59/0009

摘要： A vertical comb actuator radio frequency (RF) micro-electro-mechanical system (MEMS) switch. The RF MEMS switch includes a substrate; first and second signal lines spaced at a predetermined interval from each other and deposited on an upper surface of the substrate; an actuator positioned over the first and second signal lines when viewed from the upper surface of the substrate and spaced at a predetermined interval from the first and second signal lines; and a fixing portion positioned over the actuator when viewed from the upper surface of the substrate, wherein the fixing portion permits the actuator to come in contact with the first and second signal lines when a predetermined driving voltage is applied. Thus, it is possible to prevent the actuator from sticking to the substrate. In addition, the RF MEMS switch can be operated with a low voltage and insertion loss and power loss can be reduced.

摘要翻译： 立式梳子致动器射频（RF）微机电系统（MEMS）开关。 RF MEMS开关包括基板; 第一和第二信号线以预定间隔彼此间隔开并沉积在基板的上表面上; 当从所述基板的上表面观察并且以与所述第一信号线和所述第二信号线预定的间隔隔开时，致动器定位在所述第一和第二信号线上方; 以及当从基板的上表面观察时定位在致动器上方的固定部分，其中当施加预定的驱动电压时，固定部分允许致动器与第一和第二信号线接触。 因此，可以防止致动器粘附到基板。 此外，RF MEMS开关可以在低电压和插入损耗下工作，并且可以降低功率损耗。

公开(公告)号：US20080001691A1

公开(公告)日：2008-01-03

申请号：US11585235

申请日：2006-10-24

申请人： Young-tack Hong ,  Jong-seok Kim ,  In-sang Song ,  Sang-wook Kwon ,  Sang-hun Lee ,  Che-heung Kim

发明人： Young-tack Hong ,  Jong-seok Kim ,  In-sang Song ,  Sang-wook Kwon ,  Sang-hun Lee ,  Che-heung Kim

IPC分类号： H01F7/08

CPC分类号： H01H59/0009 ,  B81B3/001 ,  B81B2201/014 ,  B81B2201/016

摘要： A MEMS switch includes a substrate, at least one signal line and at least one electrode formed on the substrate, and a moving beam disposed in a spaced-apart relation with respect to the substrate above the substrate so as to be connected with or disconnected from the signal line according to an operation of the electrode. The moving beam includes at least one body, and at least one support to support the body. The body has a modulus of elasticity larger than that of the support. The MEMS switch prevents the moving beam from being stuck and increases a contact force generating between the moving beam and the signal line, thereby enabling a signal to be stably transmitted.

摘要翻译： MEMS开关包括衬底，至少一个信号线和形成在衬底上的至少一个电极以及相对于衬底在衬底上间隔开的关系设置的移动束，以便与衬底连接或断开 根据电极的操作的信号线。 移动梁包括至少一个主体和至少一个支撑体以支撑身体。 身体的弹性模量大于支撑体的弹性模量。 MEMS开关防止移动光束被卡住，并增加在移动光束和信号线之间产生的接触力，从而使信号能够稳定地传输。