摘要:
A nanometer precision six-DOF magnetic suspension micro-stage and the application thereof are provided which are mainly used in semiconductor photolithography devices. The micro-stage includes a cross support and four two-DOF actuators. Each 2-DOF actuator comprises a vertically polarized permanent magnet, a horizontal force coil and a vertical force coil; the permanent magnet being mounted on an end of the cross support, the horizontal force coil and the vertical force coil being arranged on a side of and below the permanent magnet respectively and being spaced apart from the permanent magnet; the cross support and four vertically polarized permanent magnets constitute a mover of the micro-stage; the horizontal force coil and the vertical force coil being fixed by a coil framework respectively and constituting a stator of the micro-stage; and the stator being mounted on a base of the micro-stage. A dual-wafer table positioning system of a photolithography machine may be constructed by two said micro-stages in combination with a two-DOF large stroke linear motor. The present invention features simple structure, large driving force, small mass and absence of cable disturbance, and is possible to realize high precision, high acceleration six-DOF micro-motion.
摘要:
A nanometer precision six-DOF magnetic suspension micro-stage and the application thereof are provided which are mainly used in semiconductor photolithography devices. The micro-stage includes a cross support and four two-DOF actuators. Each 2-DOF actuator comprises a vertically polarized permanent magnet, a horizontal force coil and a vertical force coil; the permanent magnet being mounted on an end of the cross support, the horizontal force coil and the vertical force coil being arranged on a side of and below the permanent magnet respectively and being spaced apart from the permanent magnet; the cross support and four vertically polarized permanent magnets constitute a mover of the micro-stage; the horizontal force coil and the vertical force coil being fixed by a coil framework respectively and constituting a stator of the micro-stage; and the stator being mounted on a base of the micro-stage. A dual-wafer table positioning system of a photolithography machine may be constructed by two said micro-stages in combination with a two-DOF large stroke linear motor. The present invention features simple structure, large driving force, small mass and absence of cable disturbance, and is possible to realize high precision, high acceleration six-DOF micro-motion.
摘要:
This invention relates to monoclonal antibodies that recognize an antigen specific to melanocytic lesions. These antibodies are useful in methods of isolating melanoma cells and diagnosing melanocytic lesions. These antibodies are also useful for immunotherapy against melanoma.
摘要:
A minimum resource FFT design may calculate the FFT for an input data series using minimal logic resources to implement the FFT. In one implementation, the FFT design may include a butterfly component for performing one or more complex addition and multiplication operations and outputting a plurality of results; a first memory coupled to the butterfly component, the first memory including a number of memory banks equal in number to the number of the plurality of the results; a second memory coupled to the butterfly component, the second memory including a number of memory banks equal in number to a number of the plurality of the results; and a control component to control reading and writing from the first and second memories and the butterfly component using a ping-pong access technique that reads and writes intermediate values to the first and second memories to implement the FFT.
摘要:
This invention relates to monoclonal antibodies that recognize an antigen specific to melanocytic lesions. These antibodies are useful in methods of isolating melanoma cells and diagnosing melanocytic lesions. These antibodies are also useful for immunotherapy against melanoma.
摘要:
The present application discloses a catalyst for olefin polymerization, comprising a product of the following components: (A) solid titanium-containing catalyst component comprising magnesium, titanium and halogen as essential components; (B) organo-aluminum compound catalyst component, and (C) silicon ether compound catalyst component, the silicon ether compound being represented by a general formula (I): wherein R1-R12 and A are as defined in the description.
摘要:
The present invention relates to silicon ether compounds having a general formula (I), a method for the preparation thereof and use thereof as a component of catalysts for polymerization of olefins. In particular, in propylene polymerization, catalyst systems comprising the silicon ether compounds as external electron donor component exhibit good hydrogen response, and can be used to prepare polymer having high isotacticity at high yield. wherein R1-R10 groups are as defined in the description.
摘要:
The present application discloses a catalyst for olefin polymerization, comprising a product of the following components: (A) solid titanium-containing catalyst component comprising magnesium, titanium and halogen as essential components; (B) organo-aluminum compound catalyst component, and (C) silicon ether compound catalyst component, the silicon ether compound being represented by a general formula (I): wherein R1-R12 and A are as defined in the description.