NANOMETER-PRECISION SIX-DEGREE-OF-FREEDOM MAGNETIC SUSPENSION MICRO-MOTION TABLE AND APPLICATION THEREOF
    1.
    发明申请
    NANOMETER-PRECISION SIX-DEGREE-OF-FREEDOM MAGNETIC SUSPENSION MICRO-MOTION TABLE AND APPLICATION THEREOF 有权
    NANOMETER-PRECISION六自由度磁悬浮微运动表及其应用

    公开(公告)号:US20130038853A1

    公开(公告)日:2013-02-14

    申请号:US13635168

    申请日:2011-03-15

    IPC分类号: H02K41/02 G03B27/58

    CPC分类号: G03F7/70758 G03F7/70716

    摘要: A nanometer precision six-DOF magnetic suspension micro-stage and the application thereof are provided which are mainly used in semiconductor photolithography devices. The micro-stage includes a cross support and four two-DOF actuators. Each 2-DOF actuator comprises a vertically polarized permanent magnet, a horizontal force coil and a vertical force coil; the permanent magnet being mounted on an end of the cross support, the horizontal force coil and the vertical force coil being arranged on a side of and below the permanent magnet respectively and being spaced apart from the permanent magnet; the cross support and four vertically polarized permanent magnets constitute a mover of the micro-stage; the horizontal force coil and the vertical force coil being fixed by a coil framework respectively and constituting a stator of the micro-stage; and the stator being mounted on a base of the micro-stage. A dual-wafer table positioning system of a photolithography machine may be constructed by two said micro-stages in combination with a two-DOF large stroke linear motor. The present invention features simple structure, large driving force, small mass and absence of cable disturbance, and is possible to realize high precision, high acceleration six-DOF micro-motion.

    摘要翻译: 提供了主要用于半导体光刻设备的纳米精密六自由度磁悬浮微步及其应用。 微型平台包括十字支架和四个双自由度执行器。 每个2-DOF致动器包括垂直极化永磁体,水平力线圈和垂直力线圈; 所述永磁体安装在所述十字支架的一端上,所述水平力线圈和所述垂直力线圈分别设置在所述永久磁铁的一侧和下方并与所述永磁体隔开; 交叉支撑和四个垂直极化永磁体构成微型载物; 水平力线圈和垂直力线圈分别由线圈框架固定并构成微型定子; 并且定子安装在微型台的基座上。 光刻机的双晶片台定位系统可以由两个微步与二自由度大行程直线电机组合构成。 本发明结构简单,驱动力大,质量小,无电缆扰动,可实现高精度,高加速度六自由度微动作。

    Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereof
    2.
    发明授权
    Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereof 有权
    纳米精度六自由度磁悬浮微动平台及其应用

    公开(公告)号:US08599361B2

    公开(公告)日:2013-12-03

    申请号:US13635168

    申请日:2011-03-15

    CPC分类号: G03F7/70758 G03F7/70716

    摘要: A nanometer precision six-DOF magnetic suspension micro-stage and the application thereof are provided which are mainly used in semiconductor photolithography devices. The micro-stage includes a cross support and four two-DOF actuators. Each 2-DOF actuator comprises a vertically polarized permanent magnet, a horizontal force coil and a vertical force coil; the permanent magnet being mounted on an end of the cross support, the horizontal force coil and the vertical force coil being arranged on a side of and below the permanent magnet respectively and being spaced apart from the permanent magnet; the cross support and four vertically polarized permanent magnets constitute a mover of the micro-stage; the horizontal force coil and the vertical force coil being fixed by a coil framework respectively and constituting a stator of the micro-stage; and the stator being mounted on a base of the micro-stage. A dual-wafer table positioning system of a photolithography machine may be constructed by two said micro-stages in combination with a two-DOF large stroke linear motor. The present invention features simple structure, large driving force, small mass and absence of cable disturbance, and is possible to realize high precision, high acceleration six-DOF micro-motion.

    摘要翻译: 提供了主要用于半导体光刻设备的纳米精密六自由度磁悬浮微步及其应用。 微型平台包括十字支架和四个双自由度执行器。 每个2-DOF致动器包括垂直极化永磁体,水平力线圈和垂直力线圈; 所述永磁体安装在所述十字支架的一端上,所述水平力线圈和所述垂直力线圈分别设置在所述永久磁铁的一侧和下方并与所述永磁体隔开; 交叉支撑和四个垂直极化永磁体构成微型载物; 水平力线圈和垂直力线圈分别由线圈框架固定并构成微型定子; 并且定子安装在微型台的基座上。 光刻机的双晶片台定位系统可以由两个微步与二自由度大行程直线电机组合构成。 本发明结构简单,驱动力大,质量小,无电缆扰动,可实现高精度,高加速度六自由度微动作。

    Method and composition for diagnosis of melanocytic lesions
    4.
    发明申请
    Method and composition for diagnosis of melanocytic lesions 审中-公开
    黑色素细胞病变诊断方法和组成

    公开(公告)号:US20050227303A1

    公开(公告)日:2005-10-13

    申请号:US11146518

    申请日:2005-06-06

    申请人: Yajun Guo Jing Ma

    发明人: Yajun Guo Jing Ma

    CPC分类号: C07K16/3053

    摘要: This invention relates to monoclonal antibodies that recognize an antigen specific to melanocytic lesions. These antibodies are useful in methods of isolating melanoma cells and diagnosing melanocytic lesions. These antibodies are also useful for immunotherapy against melanoma.

    摘要翻译: 本发明涉及识别黑素细胞病变特异性抗原的单克隆抗体。 这些抗体可用于分离黑素瘤细胞和诊断黑素细胞病变的方法。 这些抗体也可用于针对黑色素瘤的免疫治疗。

    Minimum resource fast fourier transform
    5.
    发明授权
    Minimum resource fast fourier transform 有权
    最小资源快速傅里叶变换

    公开(公告)号:US08612505B1

    公开(公告)日:2013-12-17

    申请号:US12471197

    申请日:2009-05-22

    IPC分类号: G06F17/14 G06F15/00

    CPC分类号: G06F17/142

    摘要: A minimum resource FFT design may calculate the FFT for an input data series using minimal logic resources to implement the FFT. In one implementation, the FFT design may include a butterfly component for performing one or more complex addition and multiplication operations and outputting a plurality of results; a first memory coupled to the butterfly component, the first memory including a number of memory banks equal in number to the number of the plurality of the results; a second memory coupled to the butterfly component, the second memory including a number of memory banks equal in number to a number of the plurality of the results; and a control component to control reading and writing from the first and second memories and the butterfly component using a ping-pong access technique that reads and writes intermediate values to the first and second memories to implement the FFT.

    摘要翻译: 最小资源FFT设计可以使用最小逻辑资源来计算输入数据序列的FFT,以实现FFT。 在一个实现中,FFT设计可以包括用于执行一个或多个复加数和乘法运算并输出多个结果的蝶形分量; 耦合到所述蝶形部件的第一存储器,所述第一存储器包括与所述多个结果的数量相等的多个存储器组; 耦合到所述蝶形部件的第二存储器,所述第二存储器包括数量等于所述多个结果的数量的多个存储器组; 以及控制部件,用于使用乒乓访问技术来控制来自第一和第二存储器和蝶形部件的读取和写入,该乒乓访问技术将中间值读取和写入到第一和第二存储器以实现FFT。

    Method and composition for diagnosis of melanocytic lesions
    6.
    发明授权
    Method and composition for diagnosis of melanocytic lesions 失效
    黑色素细胞病变诊断方法和组成

    公开(公告)号:US07666609B1

    公开(公告)日:2010-02-23

    申请号:US09915746

    申请日:2001-07-26

    申请人: Yajun Guo Jing Ma

    发明人: Yajun Guo Jing Ma

    IPC分类号: G01N33/53 G01N33/574

    CPC分类号: C07K16/3053

    摘要: This invention relates to monoclonal antibodies that recognize an antigen specific to melanocytic lesions. These antibodies are useful in methods of isolating melanoma cells and diagnosing melanocytic lesions. These antibodies are also useful for immunotherapy against melanoma.

    摘要翻译: 本发明涉及识别黑素细胞病变特异性抗原的单克隆抗体。 这些抗体可用于分离黑素瘤细胞和诊断黑素细胞病变的方法。 这些抗体也可用于针对黑色素瘤的免疫治疗。