公开(公告)号：US5844369A

公开(公告)日：1998-12-01

申请号：US855916

申请日：1997-05-14

申请人： Yuji Yoshizako ,  Tsuneo Ito ,  Akie Nakamoto

发明人： Yuji Yoshizako ,  Tsuneo Ito ,  Akie Nakamoto

IPC分类号： H05H1/46 ,  H05H1/24

CPC分类号： H05H1/46

摘要： A phase adjusting circuit for adjusting phases of output powers from two high frequency power generators in a plasma processing apparatus comprises first and second synthesizing circuits for generating first and second high frequency signals of a predetermined waveform with frequencies of f0 and f0.+-..DELTA.f (.DELTA.f

摘要翻译： 用于调整等离子体处理装置中的两个高频发电机的输出功率的相位的相位调整电路包括用于产生频率为f0和f0 +/- DELTA f的预定波形的第一和第二高频信号的第一和第二合成电路（ DELTA f << f0），用于检测板电极的检测信号之间的相位差的相位差检测电路，用于产生具有与确定的相位相同的第一频率信号的频率和波形的高频信号的第三波形合成电路 来自相位差和相位差检测电路的输出之间的相位误差，以及基于第一和第三波形合成电路的输出确定两个高频发电机的输出功率的相位调整电路。

公开(公告)号：US5399977A

公开(公告)日：1995-03-21

申请号：US180691

申请日：1994-01-13

申请人： Yuji Yoshizako ,  Michio Taniguchi ,  Yuji Ishida

发明人： Yuji Yoshizako ,  Michio Taniguchi ,  Yuji Ishida

IPC分类号： H01P5/08 ,  H01P5/04

CPC分类号： H01P5/04

摘要： In a microwave power source apparatus for a microwave oscillator for generating a microwave, a DC power source supplies a DC power for generating the microwave to the microwave oscillator. A measuring section of a voltage standing wave detector is mounted on a microwave transmission line connected between the microwave oscillator and a microwave load, and measures either one of an impedance seen looking toward the microwave load at a mounted point thereof and a reflection coefficient thereat by detecting a voltage standing wave of the microwave being generated by the microwave oscillator and propagating on the microwave transmission line. A controller calculates a progressive wave power of the microwave propagating on the microwave transmission line from the microwave oscillator toward the microwave load based on either one of the impedance and the reflection coefficient measured by the measuring section, and controls the DC power source to adjust the progressive wave power of the microwave to a predetermined desirable adjustment value based on the calculated progressive wave power.

摘要翻译： 在用于产生微波的微波振荡器的微波电源装置中，DC电源向微波振荡器提供用于产生微波的DC电力。 电压驻波检测器的测量部分安装在连接在微波振荡器和微波负载之间的微波传输线上，并且测量在其安装点看到微波负载的阻抗，其反射系数由 检测由微波振荡器产生的微波电压驻波，并在微波传输线上传播。 控制器基于由测量部测量的阻抗和反射系数中的任一个，计算从微波振荡器向微波负载传播的微波的逐行波功率，并且控制直流电源以调整 基于所计算的逐行波功率将微波的逐次波功率调整到预定的期望调节值。