Optical sensor
    1.
    发明授权
    Optical sensor 有权
    光学传感器

    公开(公告)号:US08598587B2

    公开(公告)日:2013-12-03

    申请号:US13209188

    申请日:2011-08-12

    IPC分类号: H01L31/0376

    摘要: An optical sensor preventing damage to a semiconductor layer, and preventing a disconnection and a short circuit of a source electrode and a drain electrode, and a manufacturing method of the optical sensor is provided. The optical sensor includes: a substrate; an infrared ray sensing thin film transistor including a first semiconductor layer disposed on the substrate; a visible ray sensing thin film transistor including a second semiconductor layer disposed on the substrate; a switching thin film transistor including a third semiconductor layer disposed on the substrate; and a semiconductor passivation layer enclosing an upper surface and a side surface of an end portion of at least one of the first semiconductor layer, the second semiconductor layer, and the third semiconductor layer.

    摘要翻译: 提供了防止半导体层损坏并防止源电极和漏极的断开和短路的光学传感器以及光学传感器的制造方法。 光学传感器包括:基板; 包括设置在所述基板上的第一半导体层的红外线感测薄膜晶体管; 包括设置在所述基板上的第二半导体层的可见光线感测薄膜晶体管; 开关薄膜晶体管,其包括设置在所述基板上的第三半导体层; 以及半导体钝化层,其包围第一半导体层,第二半导体层和第三半导体层中的至少一个的端部的上表面和侧面。