Displacement transducer which simultaneously extracts signals via
sequential switching
    4.
    发明授权
    Displacement transducer which simultaneously extracts signals via sequential switching 失效
    位移传感器,通过顺序切换同时提取信号

    公开(公告)号:US4680466A

    公开(公告)日:1987-07-14

    申请号:US725088

    申请日:1985-04-19

    IPC分类号: G01D5/36 G01D5/34

    CPC分类号: G01D5/366

    摘要: A displacement transducer comprising a code disk on which a plurality of light permeable slits arranged with a fixed pitch are formed, a light source which emits light to the code disk, and an image sensor which receives the light from the light source through the light permeable slits. High resolution and fast response performance are realized by measuring a displacement of the code disk from the amount of the phase shift of a fundamental wave component contained in the output obtained from the image sensor. There is a further advantage of suppressing zero point return operation to a minimum as well as improving linearity of an image sensor.

    摘要翻译: 一种位移传感器,包括其上形成有以固定间距排列的多个透光狭缝的代码盘,向代码盘发光的光源,以及通过透光性接收来自光源的光的图像传感器 狭缝 通过从由图像传感器获得的输出中包含的基波分量的相移量测量代码盘的位移来实现高分辨率和快速响应性能。 还有将零点返回操作抑制到最小以及提高图像传感器的线性度的另一个优点。

    XY STAGE
    5.
    发明申请
    XY STAGE 审中-公开
    XY阶段

    公开(公告)号:US20090014932A1

    公开(公告)日:2009-01-15

    申请号:US11816661

    申请日:2006-02-16

    IPC分类号: B23Q1/25 B23Q1/62

    摘要: An XY stage for controlling a position of a slider part on a lattice platen in two-dimensional directions has a plurality of the slider parts whose positions are controlled independently. The plurality of the slider parts each has: a position controlling part for controlling a position of the slider part in an X axis direction and a Y axis direction; and a yawing correcting part for correcting a yawing of the slider part around a Z axis.

    摘要翻译: 用于控制二维方向上的格子台板上的滑块部件的位置的XY台具有多个独立地控制位置的滑块部件。 多个滑块部具有:用于控制滑块部在X轴方向和Y轴方向上的位置的位置控制部, 以及偏转校正部,用于校正滑动部围绕Z轴的偏转。