公开(公告)号：US20160207771A1

公开(公告)日：2016-07-21

申请号：US15085586

申请日：2016-03-30

申请人： ZEON CORPORATION ,  NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

发明人： Akiyoshi SHIBUYA ,  Keiichi KAWATA ,  Kenji HATA ,  Motoo YUMURA

IPC分类号： C01B31/02 ,  C23C16/46 ,  C23C16/26

CPC分类号： C23C16/46 ,  B01J15/005 ,  B01J19/088 ,  B01J19/126 ,  B01J19/22 ,  B01J2219/0009 ,  B01J2219/00094 ,  B01J2219/00123 ,  B01J2219/00135 ,  B01J2219/00139 ,  B01J2219/00148 ,  B01J2219/00159 ,  B01J2219/00164 ,  B01J2219/0894 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/158 ,  C01B32/16 ,  C01B32/164 ,  C01B2202/08 ,  C23C16/26

摘要： An apparatus of the present invention for producing aligned carbon nanotube aggregates is an apparatus for producing aligned carbon nanotube aggregates, the apparatus being configured to grow the aligned carbon nanotube aggregate by: causing a catalyst formed on a surface of a substrate to be surrounded by a reducing gas environment constituted by a reducing gas; heating at least either the catalyst or the reducing gas; causing the catalyst to be surrounded by a raw material gas environment constituted by a raw material gas; and heating at least either the catalyst or the raw material gas, at least either an apparatus component exposed to the reducing gas or an apparatus component exposed to the raw material gas being made from a heat-resistant alloy, and having a surface plated with molten aluminum.

摘要翻译： 本发明的用于制造排列的碳纳米管集合体的装置是一种用于生产排列的碳纳米管集合体的装置，该装置被配置为通过以下方式使对准的碳纳米管集合体生长：使形成在基板表面上的催化剂被 由还原气体构成的减少气体环境; 至少加热催化剂或还原气体; 使催化剂被原料气体构成的原料气体环境包围; 并且至少对催化剂或原料气体进行加热，至少暴露于还原气体的装置部件或暴露于原料气体的装置部件由耐热合金制成，并且具有表面镀有熔融 铝。

公开(公告)号：US20230083267A1

公开(公告)日：2023-03-16

申请号：US17760361

申请日：2021-02-15

申请人： ZEON CORPORATION

发明人： Akiyoshi SHIBUYA ,  Keiichi KAWATA

IPC分类号： C01B32/164 ,  C01B32/162

摘要： A production method for growing a carbon nanotube assembly on a substrate having a catalyst on a surface thereof. In this production method, in each of a formation unit that carries out a formation step of reducing a catalyst on the substrate and a growth unit that carries out a growth step of growing a carbon nanotube assembly, the substrate is continuously being conveyed using conveyance units that convey the substrate by screw rotations. In carrying out the formation step and the growth step, these steps are carried out while the gas environments in these steps are prevented from mixing with each other.