公开(公告)号：US20100102227A1

公开(公告)日：2010-04-29

申请号：US12257304

申请日：2008-10-23

申请人： ZHONGWEI CHEN ,  WEIMING REN ,  JOE WANG ,  XUEDONG LIU ,  JUYING DOU ,  FUMIN HE ,  FENG CAO ,  YAN REN ,  XIAOLI GUO ,  WEI HE ,  QINGPO XI

发明人： ZHONGWEI CHEN ,  WEIMING REN ,  JOE WANG ,  XUEDONG LIU ,  JUYING DOU ,  FUMIN HE ,  FENG CAO ,  YAN REN ,  XIAOLI GUO ,  WEI HE ,  QINGPO XI

IPC分类号： G01N23/00 ,  H01J3/20

CPC分类号： H01J37/073 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/06341 ,  H01J2237/24592

摘要： The present invention relates to a charged particle beam apparatus which employs a scanning electron microscope for sample inspection and defect review.The present invent provides solution of improving imaging resolution by utilizing a field emission cathode tip with a large tip radius, applying a large accelerating voltage across ground potential between the cathode and anode, positioning the beam limit aperture before condenser lens, utilizing condenser lens excitation current to optimize image resolution, applying a high tube bias to shorten electron travel time, adopting and modifying SORIL objective lens to ameliorate aberration at large field of view and under electric drifting and reduce the urgency of water cooling objective lens while operating material analysis.The present invent provides solution of improving throughput by utilizing fast scanning ability of SORIL and providing a large voltage difference between sample and detectors.

摘要翻译： 本发明涉及采用扫描电子显微镜进行样品检查和缺陷检查的带电粒子束装置。 本发明提供了通过利用具有大的尖端半径的场致发射阴极尖端来提高成像分辨率的解决方案，在阴极和阳极之间的地电位上施加大的加速电压，将光束极限孔定位在聚光透镜之前，利用聚光透镜激发电流 优化图像分辨率，应用高管偏压缩短电子行进时间，采用和修正SORIL物镜，以改善大视野和电漂移下的像差，并减少水冷物镜在操作材料分析时的紧迫性。 本发明提供了通过利用SORIL的快速扫描能力并在样品和检测器之间提供大的电压差来提高产量的解决方案。

公开(公告)号：US20110139996A1

公开(公告)日：2011-06-16

申请号：US12636007

申请日：2009-12-11

申请人： ZHONGWEI CHEN ,  WEIMING REN ,  KENICHI KANAI ,  XUEDONG LIU

发明人： ZHONGWEI CHEN ,  WEIMING REN ,  KENICHI KANAI ,  XUEDONG LIU

IPC分类号： H01J1/50

CPC分类号： H01J37/141 ,  H01J2237/1405

摘要： The present invention relates to a multi-axis magnetic lens for a charged particle beam system. The apparatus eliminates the undesired non-axisymmetric transverse magnetic field components from the magnetic field generated by a common excitation coil and leaves the desired axisymmetric field for focusing each particle beam employed within the system.

摘要翻译： 本发明涉及带电粒子束系统的多轴磁透镜。 该装置从由公共的励磁线圈产生的磁场中消除不期望的非轴对称的横向磁场分量，并且留下用于聚焦在系统内采用的每个粒子束的期望的轴对称场。

公开(公告)号：US20120145917A1

公开(公告)日：2012-06-14

申请号：US12968221

申请日：2010-12-14

申请人： ZHONGWEI CHEN ,  WEIMING REN ,  KENICHI KANAI ,  XUEDONG LIU

发明人： ZHONGWEI CHEN ,  WEIMING REN ,  KENICHI KANAI ,  XUEDONG LIU

IPC分类号： H01J3/32

CPC分类号： H01J37/141 ,  H01J37/28 ,  H01J2237/1035 ,  H01J2237/1415 ,  H01J2237/1534

摘要： An apparatus basically uses a simple and compact multi-axis magnetic lens to focus each of a plurality of charged particle beams on sample surface at the same time. In each sub-lens module of the multi-axis magnetic lens, two magnetic rings are respectively inserted into upper and lower holes with non-magnetic radial gap. Each gap size is small enough to keep a sufficient magnetic coupling and large enough to get a sufficient axial symmetry of magnetic scale potential distribution in the space near to its optical axis. This method eliminates the non-axisymmetric transverse field in each sub-lens and the round lens field difference among all sub-lenses at the same time; both exist inherently in a conventional multi-axis magnetic lens. In the apparatus, some additional magnetic shielding measures such as magnetic shielding tubes, plates and house are used to eliminate the non-axisymmetric transverse field on the charged particle path from each charged particle source to the entrance of each sub-lens and from the exit of each sub-lens to the sample surface.

公开(公告)号：US20120145900A1

公开(公告)日：2012-06-14

申请号：US12968201

申请日：2010-12-14

申请人： ZHONGWEI CHEN ,  WEIMING REN ,  KENICHI KANAI ,  XUEDONG LIU

发明人： ZHONGWEI CHEN ,  WEIMING REN ,  KENICHI KANAI ,  XUEDONG LIU

IPC分类号： G01N23/04

CPC分类号： G01N23/2251 ,  G01N2223/6116 ,  G01N2223/646 ,  H01J37/141 ,  H01J2237/2817

摘要： An apparatus basically uses a simple and compact multi-axis magnetic lens to focus each of a plurality of charged particle beams on sample surface at the same time. In each sub-lens module of the multi-axis magnetic lens, two magnetic rings are respectively inserted into upper and lower holes with non-magnetic radial gap. Each gap size is small enough to keep a sufficient magnetic coupling and large enough to get a sufficient axial symmetry of magnetic scale potential distribution in the space near to its optical axis. This method eliminates the non-axisymmetric transverse field in each sub-lens and the round lens field difference among all sub-lenses at the same time; both exist inherently in a conventional multi-axis magnetic lens. In the apparatus, some additional magnetic shielding measures such as magnetic shielding tubes, plates and house are used to eliminate the non-axisymmetric transverse field on the charged particle path from each charged particle source to the entrance of each sub-lens and from the exit of each sub-lens to the sample surface.

摘要翻译： 设备基本上使用简单紧凑的多轴磁性透镜来同时将多个带电粒子束中的每一个聚焦在样品表面上。 在多轴磁性透镜的每个子透镜模块中，两个磁环分别插入具有非磁性径向间隙的上孔和下孔中。 每个间隙尺寸足够小以保持足够的磁耦合并且足够大以在靠近其光轴的空间中获得足够的磁标势电位分布的轴向对称性。 该方法同时消除了每个子透镜中的非轴对称横向场和所有子透镜之间的圆透镜场差; 都存在于传统的多轴磁性透镜中。 在该装置中，使用一些额外的磁屏蔽措施，例如磁屏蔽管，板和房子来消除带电粒子路径上从每个带电粒子源到每个子透镜的入口和从出口的入口处的非轴对称横向场 每个子透镜到样品表面。

公开(公告)号：US20110291007A1

公开(公告)日：2011-12-01

申请号：US12787139

申请日：2010-05-25

申请人： YI-XIANG WANG ,  JOE WANG ,  XUEDONG LIU ,  ZHONGWEI CHEN

发明人： YI-XIANG WANG ,  JOE WANG ,  XUEDONG LIU ,  ZHONGWEI CHEN

IPC分类号： G01N23/22 ,  H01J37/244

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/024 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24495 ,  H01J2237/2611 ,  H01J2237/2817

摘要： The present invention generally relates to a detection unit of a charged particle imaging system. More particularly, portion of the detection unit can move into or out of the detection system as imaging condition required. With the assistance of a Wein filter (also known as an E×B charged particle analyzer) and a movable detector design, the present invention provides a stereo imaging system that suitable for both low current, high resolution mode and high current, high throughput mode. Merely by way of example, the invention has been applied to a scanning electron beam inspection system. But it would be recognized that the invention could apply to other system using charged particle beam as an observation tool.

摘要翻译： 本发明一般涉及带电粒子成像系统的检测单元。 更具体地，检测单元的一部分可以作为所需的成像条件移入或移出检测系统。 在Wein滤波器（也称为E×B带电粒子分析仪）和可移动检测器设计的帮助下，本发明提供了一种适用于低电流，高分辨率模式和高电流，高通量模式的立体成像系统 。 仅作为示例，本发明已经应用于扫描电子束检查系统。 但是应当认识到，本发明可以应用于使用带电粒子束作为观测工具的其它系统。