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1.发明申请公开(公告)号：US20140299948A1
公开(公告)日：2014-10-09
申请号：US13582141
申请日：2011-12-29
申请人： Zhe Wang , Mengjin Cai
发明人： Zhe Wang , Mengjin Cai
CPC分类号： H04R1/02 , B81B7/0061 , B81B2201/0257 , H01L2924/1461 , H04R1/086 , H04R7/04 , H04R19/005 , H04R19/04 , H04R2201/003 , H04R2201/02 , H04R2207/00
摘要： The present invention relates to a silicon based MEMS microphone, comprising a silicon substrate and an acoustic sensing part supported on the silicon substrate, wherein a mesh-structured back hole is formed in the substrate and aligned with the acoustic sensing part, the mesh-structured back hole includes a plurality of mesh beams which are interconnected with each other and supported on the side wall of the mesh-structure back hole, the plurality of mesh beams and the side wall define a plurality of mesh holes which all have a tapered profile and merge into one hole in the vicinity of the acoustic sensing part at the top side of the silicon substrate. The mesh-structured back hole can help to streamline the air pressure pulse caused, for example, in a drop test and thus reduce the impact on the acoustic sensing part of the microphone, and also serve as a protection filter to prevent alien substances such as particles entering the microphone.
摘要翻译： 本发明涉及一种基于硅的MEMS麦克风，其包括硅衬底和支撑在硅衬底上的声学感测部件，其中在衬底中形成网格结构的后孔并与声学感测部件对准，网状结构 后孔包括彼此互连并支撑在网状结构后孔的侧壁上的多个网眼梁，多个网状梁和侧壁限定多个网孔，其全部具有锥形轮廓， 合并到硅衬底顶部的声学传感部分附近的一个孔中。 网格结构的后孔可以帮助简化例如在跌落测试中引起的空气压力脉冲，从而减少对麦克风的声学传感部分的影响，并且还用作保护过滤器以防止外来物质例如 颗粒进入麦克风。
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公开(公告)号：US09438972B2
公开(公告)日：2016-09-06
申请号：US13582141
申请日：2011-12-29
申请人： Zhe Wang , Mengjin Cai
发明人： Zhe Wang , Mengjin Cai
CPC分类号： H04R1/02 , B81B7/0061 , B81B2201/0257 , H01L2924/1461 , H04R1/086 , H04R7/04 , H04R19/005 , H04R19/04 , H04R2201/003 , H04R2201/02 , H04R2207/00
摘要： The present invention relates to a silicon based MEMS microphone, comprising a silicon substrate and an acoustic sensing part supported on the silicon substrate, wherein a mesh-structured back hole is formed in the substrate and aligned with the acoustic sensing part, the mesh-structured back hole includes a plurality of mesh beams which are interconnected with each other and supported on the side wall of the mesh-structure back hole, the plurality of mesh beams and the side wall define a plurality of mesh holes which all have a tapered profile and merge into one hole in the vicinity of the acoustic sensing part at the top side of the silicon substrate. The mesh-structured back hole can help to streamline the air pressure pulse caused, for example, in a drop test and thus reduce the impact on the acoustic sensing part of the microphone, and also serve as a protection filter to prevent alien substances such as particles entering the microphone.
摘要翻译： 本发明涉及一种基于硅的MEMS麦克风，其包括硅衬底和支撑在硅衬底上的声学感测部件，其中在衬底中形成网格结构的后孔并与声学感测部件对准，网状结构 后孔包括彼此互连并支撑在网状结构后孔的侧壁上的多个网眼梁，多个网状梁和侧壁限定多个网孔，其全部具有锥形轮廓， 合并到硅衬底顶部的声学传感部分附近的一个孔中。 网格结构的后孔可以帮助简化例如在跌落测试中引起的空气压力脉冲，从而减少对麦克风的声学传感部分的影响，并且还用作保护过滤器以防止外来物质例如 颗粒进入麦克风。
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