FinFET device with a graphene gate electrode and methods of forming same
    2.
    发明授权
    FinFET device with a graphene gate electrode and methods of forming same 有权
    具有石墨烯栅电极的FinFET器件及其形成方法

    公开(公告)号:US08815739B2

    公开(公告)日:2014-08-26

    申请号:US13545621

    申请日:2012-07-10

    IPC分类号: H01L21/20

    摘要: One illustrative device disclosed herein includes at least one fin comprised of a semiconducting material, a layer of gate insulation material positioned adjacent an outer surface of the fin, a gate electrode comprised of graphene positioned on the layer of gate insulation material around at least a portion of the fin, and an insulating material formed on the gate electrode.

    摘要翻译: 本文公开的一个说明性装置包括至少一个由半导体材料构成的鳍片,邻近翅片的外表面定位的栅极绝缘材料层,由石墨烯组成的栅电极,栅极电极定位在栅极绝缘材料层周围的至少一部分 并且形成在栅电极上的绝缘材料。